US4461239A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Reduced capacitance electrode assembly
Assignee: United Solar Systems Corp
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Filing: 1982-07-30
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Granted: 1984-07-24
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Expires: 2002-07-30
Abstract
Abstract A reduced capacitance electrode assembly for use in an alternating current plasma system provides reduced input capacitance to an associated tuning network. The assembly includes an electrode adapted to receive alternating current power for maintaining a plasma region and a plurality of electrically conductive plates. The plates are closely spaced apart by less than a predetermined distance on one side of the electrode for precluding the formation of a plasma region on the one side of the electrode and for providing a plurality of series capacitances to present a substantially reduced capacitance to the alternating current power. The reduced capacitance electrode assembly is particularly useful in a system for making photovoltaic devices wherein a plurality of amorphous semiconductor materials is deposited onto a continuous conductive substrate moving through a corresponding plurality of deposition chambers. At least one of the chambers includes a reduced capacitance electrode assembly comprising an electrode spaced from the substrate adapted to receive alternating current power for establishing a plasma between the electrode and the substrate, and a plurality of electrically conductive plates being closely spaced apart on the side of the electrode opposite the substrate for confining the plasma between the electrode and the substrate and for providing a plurality of series coupled capacitances to present a substantially reduced capacitance to the alternating current power.
Inventors
- 👤 Vincent D. Cannella
- 👤 Prem Nath
- 👤 Robert J. Shuman
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 18:55
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32082; H01J37/32431; H01J37/32532; H01J37/32568; H01J37/32623; H01J37/32651; H01J37/32733; H01J37/32752; H01J37/32761; H01J37/3277; H05; H05H; H05H1/00; H05H1/24; H05H1/46; H01J2237/00; H01J2237/32; H01J2237/33; H01J2237/332; H01J2237/3322; H01J2237/3325
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
92 words
A reduced capacitance electrode assembly for use in alternating current electrode powered plasma systems, said assembly comprising: an electrode adapted to receive alternating current power for maintaining a plasma region; and a plurality of electrically conductive plates, said plates being closely spaced apart by less than a predetermined distance on one side of said electrode for precluding the formation of a plasma region on said one side of said electrode and for providing a plurality of serial capacitances with said electrode to present a substantially reduced capacitance to said alternating current power.
Claim 2
Dependent Claim
92 words
A reduced capacitance electrode assembly for use in alternating current electrode powered plasma systems, said assembly comprising: an electrode adapted to receive alternating current power for maintaining a plasma region; and a plurality of electrically conductive plates, said plates being closely spaced apart by less than a predetermined distance on one side of said electrode for precluding the formation of a plasma region on said one side of said electrode and for providing a plurality of serial capacitances with said electrode to present a substantially reduced capacitance to said alternating current power.
Claim 3
Dependent Claim
42 words
An assembly as defined in claim 1 further including a conductive shield substantially enclosing said plurality of plates, said shield having a bottom wall closely spaced from the plate most distant from said electrode, and said shield being coupled to ground potential.
Claim 4
Dependent Claim
37 words
An assembly as defined in claim 2 further comprising a plurality of insulating spacers between said plates for supporting and maintaining said plates in said closely spaced apart relation between said electrode and said shield bottom wall.
Claim 5
Dependent Claim
20 words
An assembly as defined in claim 3 wherein said electrode, said plates, and said shield bottom wall are substantially planar.
Claim 6
Dependent Claim
15 words
An assembly as defined in claim 3 wherein said spacers are formed from ceramic material.
Claim 7
Dependent Claim
102 words
A reduced capacitance electrode assembly for use in depositing amorphous semiconductor materials onto a large area conductive substrate, said assembly comprising: an electrode spaced from said substrate adapted to receive alternating current power for establishing a plasma between said electrode and said substrate; and a plurality of conductive plates, said plates being closely spaced apart on the side of said electrode opposite said substrate for confining said plasma to a region between said electrode and said substrate and for providing a plurality of series coupled capacitances in series with said electrode to present to said radio frequency power a substantially reduced capacitance.
Claim 8
Dependent Claim
102 words
A reduced capacitance electrode assembly for use in depositing amorphous semiconductor materials onto a large area conductive substrate, said assembly comprising: an electrode spaced from said substrate adapted to receive alternating current power for establishing a plasma between said electrode and said substrate; and a plurality of conductive plates, said plates being closely spaced apart on the side of said electrode opposite said substrate for confining said plasma to a region between said electrode and said substrate and for providing a plurality of series coupled capacitances in series with said electrode to present to said radio frequency power a substantially reduced capacitance.
Claim 9
Dependent Claim
18 words
An assembly as defined in claim 6 wherein said plates are substantially planar and parallel to said electrode.
Claim 10
Dependent Claim
33 words
An assembly as defined in claim 7 further comprising a conductive shield substantially enclosing said plates having a pair of sidewalls and a bottom wall substantially parallel to and spaced from said electrode.
Claim 11
Dependent Claim
26 words
An assembly as defined in claim 8 further comprising a plurality of insulative spacers for supporting said plates within said shield in said spaced apart relation.
Claim 12
Dependent Claim
15 words
An assembly as defined in claim 9 wherein said spacers are formed from ceramic material.
Claim 13
Dependent Claim
15 words
An assembly as defined in claim 8 wherein said shield is coupled to ground potential.
Claim 14
Dependent Claim
35 words
An assembly as defined in claim 8 wherein one of said shield sidewalls includes a high current feed through for coupling said electrode to said radio frequency power while insulating said electrode from said shield.
Claim 15
Dependent Claim
124 words
In a system for making photovoltaic devices wherein a plurality of amorphous semiconductor materials is deposited onto a continuous conductive substrate moving through a corresponding plurality of deposition chambers, the improvement of at least one of said chambers including a reduced capacitance electrode assembly comprising: an electrode spaced from said substrate adapted to receive alternating current power for establishing a plasma between said electrode and said substrate; and a plurality of electrically conductive plates, said plates being closely spaced apart on the side of said electrode opposite said substrate for confining said plasma between said electrode and said substrate and for providing a plurality of series coupled capacitances in series with said electrode to present a substantially reduced capacitance to said alternating current power.
Claim 16
Dependent Claim
124 words
In a system for making photovoltaic devices wherein a plurality of amorphous semiconductor materials is deposited onto a continuous conductive substrate moving through a corresponding plurality of deposition chambers, the improvement of at least one of said chambers including a reduced capacitance electrode assembly comprising: an electrode spaced from said substrate adapted to receive alternating current power for establishing a plasma between said electrode and said substrate; and a plurality of electrically conductive plates, said plates being closely spaced apart on the side of said electrode opposite said substrate for confining said plasma between said electrode and said substrate and for providing a plurality of series coupled capacitances in series with said electrode to present a substantially reduced capacitance to said alternating current power.
Claim 17
Dependent Claim
34 words
A system as defined in claim 13 further including a conductive shield substantially enclosing said plurality of plates, said shield having a bottom wall closely spaced from the plate most distant from said electrode.
Claim 18
Dependent Claim
26 words
A system as defined in claim 14 wherein said electrode, said plates, and said shield bottom wall are substantially planar and disposed in substantially parallel relation.
Claim 19
Dependent Claim
26 words
A system as defined in claim 15 further comprising a plurality of insulating spacers for supporting said plates within said shield in said spaced apart relation.
Claim 20
Dependent Claim
15 words
A system as defined in claim 16 wherein said spacers are formed from ceramic material.
Claim 21
Dependent Claim
15 words
A system as defined in claim 14 wherein said shield is coupled to ground potential.
Claim 22
Dependent Claim
44 words
A system as defined in claim 18 wherein said shield includes a pair of opposed sidewalls and wherein one of said sidewalls includes a high current feed through for coupling said alternating current power to said electrode while insulating said electrode from said shield.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-07-24 | 1988-01-23 | 1988-07-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-07-24 | 1992-01-23 | 1992-07-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-07-24 | 1996-01-23 | 1996-07-24 | $7700.00 | Window Closed / Lapsed |