US4451499A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for producing a beryllium oxide film
Assignee: Futaba Corp
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Filing: 1982-07-29
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Granted: 1984-05-29
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Expires: 2002-07-29
Abstract
Abstract A beryllium oxide (BeO) film is disclosed, which is produced by impinging partially ionized vapor of metal beryllium and oxygen upon a substrate.
Inventors
- 👤 Kiyoshi Morimoto
- 👤 Toshinori Takagi
- 👤 Hiroshi Watanabe
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 19:47
CPC Classifications
C; C30; C30B; C30B25/00; C30B25/02; C30B25/06; B; B01; B01J; B01J19/00; B01J19/08; B01J19/087; B01J19/088; C01; C01F; C01F3/00; C01F3/02; C04; C04B; C04B35/00; C04B35/01; C04B35/08; C23; C23C; C23C14/00; C23C14/0005; C23C14/0021; C23C14/22; C23C14/24; C23C14/32; C30B29/00; C30B29/10; C30B29/16
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
134 words
A method for preparing a film of beryllium oxide comprising: heating metallic beryllium in a closed crucible having at least one injection nozzle, thereby vaporizing said beryllium metal; injecting said vapor through said nozzle into an evacuated chamber, whereby a stream of beryllium atoms is produced, while simultaneously injecting oxygen into said chamber around said stream to provide an atmosphere of oxygen having a pressure not greater than 10 -2 of the vapor pressure in said crucible; ionizing at least part of said vapor stream by irradiating said vapor stream with electron beams whereby a vapor stream containing ionized and unionized atoms is produced; and permitting said vapor stream containing ionized and unionized atoms to impinge on a substrate surface together with said oxygen thereby forming a film of beryllium oxide on said substrate.
Claim 2
Independent Claim
134 words
A method for preparing a film of beryllium oxide comprising: heating metallic beryllium in a closed crucible having at least one injection nozzle, thereby vaporizing said beryllium metal; injecting said vapor through said nozzle into an evacuated chamber, whereby a stream of beryllium atoms is produced, while simultaneously injecting oxygen into said chamber around said stream to provide an atmosphere of oxygen having a pressure not greater than 10 -2 of the vapor pressure in said crucible; ionizing at least part of said vapor stream by irradiating said vapor stream with electron beams whereby a vapor stream containing ionized and unionized atoms is produced; and permitting said vapor stream containing ionized and unionized atoms to impinge on a substrate surface together with said oxygen thereby forming a film of beryllium oxide on said substrate.
Claim 3
Dependent Claim
15 words
The method of claim 1, wherein said vapor stream is accelerated by an electric field.
Claim 4
Dependent Claim
21 words
The method of claim 1, wherein said substrate is made of a substance which is soluble in water or organic solvents.
Claim 5
Dependent Claim
17 words
The method of claim 1, wherein said substrate is maintained at a temperature ranging from 300°-500° C.
Claim 6
Dependent Claim
44 words
The method of claim 1, wherein the vapor pressure ratio P/P o within the vacuum vessel is ≧10 2 , wherein P is the vapor pressure of the beryllium metal in the crucible and P o is the vapor pressure within the vacuum vessel.
Claim 7
Dependent Claim
22 words
The method of claim 1, wherein the oxygen pressure in said evacuated chamber ranges from 10 -6 Torr to 10 -3 Torr.
References Cited (Backward Citations)
US3373051A
Cited
US3925116A
Cited
US4090100A
Cited
US4227961A
Cited
US4197814A
Cited
US4147573A
Cited
US4213844A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-05-29 | 1987-11-28 | 1988-05-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-05-29 | 1991-11-28 | 1992-05-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-05-29 | 1995-11-28 | 1996-05-29 | $7700.00 | Window Closed / Lapsed |