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III-V Group compound semiconductor light-emitting element having a doped tantalum barrier layer

Assignee: Toshiba Corp
•
Filing: 1981-02-02
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Granted: 1984-05-08
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Expires: 2001-02-02
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Abstract

Abstract Disclosed is a III-V Group compound semiconductor light-emitting element having a III-V Group compound semiconductor body with a p-n junction and including a p-type layer involved in forming the p-n junction; and a multi-layer electrode mounted on the p-type layer of the semiconductor body. The electrode comprises a first layer of gold alloy containing a small amount of beryllium or zinc and formed in direct contact with the p-type layer of the semiconductor body and an uppermost layer formed of gold or aluminum. A tantalum layer doped with carbon, nitrogen and/or oxygen is formed between the first layer and the uppermost layer by means of vacuum vapor deposition.

Inventors

  • 👤 Yasuhisa Oana
  • 👤 Nobuaki Yasuda
  • 👤 Masato Yamashita
  • 👤 Norio Ozawa

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-03 18:54
CPC Classifications
H; H10; H10H; H10H20/00; H10H20/80; H10H20/83; H10H20/832; H10H20/01; H10H20/011; H10H20/013; H10H20/81; H10H20/819; H10H20/82; H10W; H10W72/00; H10W72/90; H10H20/822; H10H20/824; H10W72/50; H10W72/551; H10W72/552; H10W72/5522; H10W72/59; H10W72/851; H10W72/874; H10W72/884; H10W74/00

Claims Analysis

Total Claims: 6
Claim 1
Independent Claim 150 words
A light-emitting element comprising: a III-V Group compound semiconductor body having a p-n junction and including a p-type layer involved in forming said p-n junction; and a multi-layer electrode mounted on the p-type layer; said electrode including a first layer formed of a gold alloy containing a small amount of a metal selected from the group consisting of beryllium and zinc; said first layer being formed in direct contact with the p-type layer; a second layer formed on the first layer and made of tantalum doped with at least one dopant selected from the group consisting of the elements carbon, nitrogen and oxygen, and a mixture of at least two of said elements, said elements present in an amount between 0.5-2.0, 0.6-1.2 and 0.8-2.0 atomic %, respectively; and a third layer formed on the second layer and made of a metal selected from the group consisting of gold and aluminum.
Claim 2
Dependent Claim 150 words
A light-emitting element comprising: a III-V Group compound semiconductor body having a p-n junction and including a p-type layer involved in forming said p-n junction; and a multi-layer electrode mounted on the p-type layer; said electrode including a first layer formed of a gold alloy containing a small amount of a metal selected from the group consisting of beryllium and zinc; said first layer being formed in direct contact with the p-type layer; a second layer formed on the first layer and made of tantalum doped with at least one dopant selected from the group consisting of the elements carbon, nitrogen and oxygen, and a mixture of at least two of said elements, said elements present in an amount between 0.5-2.0, 0.6-1.2 and 0.8-2.0 atomic %, respectively; and a third layer formed on the second layer and made of a metal selected from the group consisting of gold and aluminum.
Claim 3
Dependent Claim 22 words
The element according to claim 1, wherein the first layer of the multi-layer electrode contains 1 to 2% by weight of beryllium.
Claim 4
Dependent Claim 16 words
The element according to claim 1, wherein the tantalum layer is about 0.2 to 0.4μ thick.
Claim 5
Dependent Claim 15 words
The element according to claim 3, wherein the III-V Group compound semiconductor is gallium phosphide.
Claim 6
Dependent Claim 22 words
The element according to claim 1 wherein the first layer of the multi-layered electrode contains 1 to 2% by weight of zinc.

References Cited (Backward Citations)

US896705A Cited
US1023315A Cited
US3379520A Cited
US3675090A Cited
US3701931A Cited
JPS53110460A Cited
JPS5411689A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1987-05-08 1987-11-07 1988-05-08 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1991-05-08 1991-11-07 1992-05-08 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1995-05-08 1995-11-07 1996-05-08 $7700.00 Window Closed / Lapsed

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