Patent US4834172A successfully refreshed from Google Patents.
Patent US4434217A successfully refreshed from Google Patents.
US4434217A
Expired / Lapsed
US
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Chalcogenide product
Assignee: GCA Corp
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Filing: 1981-01-05
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Granted: 1984-02-28
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Expires: 2001-01-05
Abstract
Abstract A layer of a chalcogenide glass resist material, on a substrate on which a microlithographic pattern is to be formed, has a deposit of silver halide on its outer surface. By actinic irradiation a latent silver image replicating the desired pattern is formed in the halide deposit. This image is developed to a metallic silver, which is used to photodope the resist material for subsequent etching to produce the microlithographic pattern on the substrate. Positive and negative patterns are possible from the same starting laminate. One form of a microlithograhic pattern is a mask for producing electronic circuits.
Inventors
- 👤 Joseph I. Masters
- 👤 Gershon M. Goldberg
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 13:06
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/60; G03F1/54; G03F7/00; G03F7/004; G03F7/09; G03F7/095
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
61 words
A unitary product comprising, as a substrate, a semiconductor body having a surface on which a micro pattern is to be imposed, a layer of chalcogenide glass material on said surface and, on the outer surface of said chalcogenide glass material, a silver image replicating said pattern, said silver image consisting primarily of metallic silver atoms in a silver halide matrix.
Claim 2
Dependent Claim
61 words
A unitary product comprising, as a substrate, a semiconductor body having a surface on which a micro pattern is to be imposed, a layer of chalcogenide glass material on said surface and, on the outer surface of said chalcogenide glass material, a silver image replicating said pattern, said silver image consisting primarily of metallic silver atoms in a silver halide matrix.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-02-27 | 1987-08-29 | 1988-02-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-02-27 | 1991-08-29 | 1992-02-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-02-27 | 1995-08-29 | 1996-02-28 | $7700.00 | Window Closed / Lapsed |