Patent US4433386A successfully refreshed from Google Patents.
← Back to Patent Explorer
US4433386A Expired / Lapsed US ⏱️ 0.0 years remaining

Surface relief measuring equipment

Assignee: Nortel Networks Ltd
•
Filing: 1980-12-08
•
Granted: 1984-02-21
•
Expires: 2000-12-08
📄 Original PDF 🌐 Google Patents 🔄 Sync Now

Abstract

Abstract Surface relief analyzing equipment comprises a turntable and an audio frequency pick-up including a stylus. A substrate bearing the surface relief is rotated on the turntable at a fixed frequency and and analogue electrical signal produced at a pick-up transducer is passed through an a-d converter. Digital data is processed to produce an input to a display for registering a pictorial representation of the surface relief.

Inventors

  • 👤 Grantley O. Este

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-23 12:37
CPC Classifications
G; G01; G01B; G01B7/00; G01B7/02; G01B7/06; G01B7/063; G01B7/066

Claims Analysis

Total Claims: 10
Claim 1
Independent Claim 138 words
Apparatus for measuring the thickness of a coating comprising: a turntable for supporting and rotating a flat substrate bearing a regularly sectored coating pattern, wherein in use, the centers of the coating pattern and the turntable are substantially coincident; tracking means for bearing on a top surface of the patterned substrate, the tracking means vertically moveable in a direction perpendicular to the substrate; means for moving the tracking means radially of the turntable; a transducer operably connected to the tracking means for generating an electrical signal in response to vertical movement thereof; a band pass filter for passing a component of the transducer electrical output at a frequency corresponding to the frequency of traversal of the pattern sectors by the tracking means; and means for measuring amplitude of the filtered signal to provide an indication of coating thickness.
Claim 2
Dependent Claim 138 words
Apparatus for measuring the thickness of a coating comprising: a turntable for supporting and rotating a flat substrate bearing a regularly sectored coating pattern, wherein in use, the centers of the coating pattern and the turntable are substantially coincident; tracking means for bearing on a top surface of the patterned substrate, the tracking means vertically moveable in a direction perpendicular to the substrate; means for moving the tracking means radially of the turntable; a transducer operably connected to the tracking means for generating an electrical signal in response to vertical movement thereof; a band pass filter for passing a component of the transducer electrical output at a frequency corresponding to the frequency of traversal of the pattern sectors by the tracking means; and means for measuring amplitude of the filtered signal to provide an indication of coating thickness.
Claim 3
Dependent Claim 27 words
Apparatus as claimed in claim 1 in which the transducer and the tracking means are mounted on an arm spaced from the upper surface of the turntable.
Claim 4
Dependent Claim 15 words
Apparatus as claimed in claim 2 in which the tracking means is a mechanical stylus.
Claim 5
Dependent Claim 17 words
Apparatus as claimed in claim 3 further comprising a motor for driving the stylus along the arm.
Claim 6
Dependent Claim 41 words
Apparatus as claimed in claim 1 in which the means for measuring amplitude includes an analog-to-digital converter for digitizing an output signal from the band pass filter an output from the analog-to-digital converter forming one input to a data processing means.
Claim 7
Dependent Claim 58 words
Apparatus as claimed in claim 5, further comprising a phase locked loop having an input from the band pass filter, the phase locked loop operable to generate a timing signal which timing signal is taken to the data processing means to compensate for any deviation of the digitized signal output of the analog-to-digital converter from a preset phase.
Claim 8
Dependent Claim 40 words
Apparatus as claimed in claim 5 further comprising position monitoring means for monitoring the position at which the tracking means bears on the top surface of the patterned substrate, the data processing means having a second input representing said position.
Claim 9
Independent Claim 175 words
A method of measuring the thickness of a coating deposited on a surface by a coating process, the method comprising using said process to deposit onto a test substrate a regularly sectored coating pattern; supporting the test substrate on a turntable with a center of the coating pattern substantially coincident with a center of the turntable; bringing a tracking means to bear on a top surface of the patterned substrate, the tracking means being vertically moveable perpendicular to the substrate; rotating the turntable; simultaneously moving the tracking means progressively radially of the turntable; obtaining from a transducer operably connected to the tracking means an electrical signal corresponding to relative vertical movement produced in the tracking means by passage of the rotating regularly sectored coating pattern thereby; filtering the electrical signal to pass a component of the transducer electrical output at a frequency corresponding to the frequency of traversal of the patterned sectors by the tracking means; and measuring the amplitude of an output signal from the filter to provide an indication of the coating thickness.
Claim 10
Independent Claim 175 words
A method of measuring the thickness of a coating deposited on a surface by a coating process, the method comprising using said process to deposit onto a test substrate a regularly sectored coating pattern; supporting the test substrate on a turntable with a center of the coating pattern substantially coincident with a center of the turntable; bringing a tracking means to bear on a top surface of the patterned substrate, the tracking means being vertically moveable perpendicular to the substrate; rotating the turntable; simultaneously moving the tracking means progressively radially of the turntable; obtaining from a transducer operably connected to the tracking means an electrical signal corresponding to relative vertical movement produced in the tracking means by passage of the rotating regularly sectored coating pattern thereby; filtering the electrical signal to pass a component of the transducer electrical output at a frequency corresponding to the frequency of traversal of the patterned sectors by the tracking means; and measuring the amplitude of an output signal from the filter to provide an indication of the coating thickness.

References Cited (Backward Citations)

US3720818A Cited
US3683273A Cited
US3670153A Cited
US3968681A Cited
US4162528A Cited
US4328553A Cited
US4126036A Cited
US4154530A Cited
US4133204A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1987-02-20 1987-08-22 1988-02-21 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1991-02-20 1991-08-22 1992-02-21 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1995-02-20 1995-08-22 1996-02-21 $7700.00 Window Closed / Lapsed

Assigned Categories & Tags

No categories assigned to this patent yet.

Assign Category Tag