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US4433264A
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Electrode structure for a zinc oxide thin film
Assignee: Murata Manufacturing Co Ltd
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Filing: 1983-06-03
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Granted: 1984-02-21
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Expires: 2003-06-03
Abstract
Abstract An electrode structure for a zinc oxide thin film having a SnO 2 layer between the surface of the zinc oxide thin film and the electrode. A tuning fork vibrator equipped with such a structure has a high reliability in that changes in resonance frequency and insulation resistance (IR) with time are small and the increase in series resonance resistance (R O ) is small.
Inventors
- 👤 Hiroshi Nishiyama
- 👤 Takeshi Nakamura
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 22:40
CPC Classifications
H; H03; H03H; H03H9/00; H03H9/15; H03H9/21; H03H9/02; H03H9/125; H03H9/13; H03H9/131; H10; H10N; H10N30/00; H10N30/01; H10N30/06
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
29 words
An electrode structure for a zinc oxide thin film comprising an electrode and a SnO 2 layer between the surface of the zinc oxide thin film and the electrode.
Claim 2
Dependent Claim
29 words
An electrode structure for a zinc oxide thin film comprising an electrode and a SnO 2 layer between the surface of the zinc oxide thin film and the electrode.
Claim 3
Dependent Claim
21 words
The electrode structure of claim 1, wherein the electrode is selected from the group consisting of Cr-Au or Ti-Au base electrodes.
Claim 4
Dependent Claim
37 words
The electrode structure of claim 2, wherein the Cr or Ti layer of the base electrode has a thickness of 200 Å to 500 Å and the Au layer a thickness of 3,000 Å to 5,000 Å.
Claim 5
Dependent Claim
20 words
The electrode structure of claim 3, wherein the SnO 2 layer has a thickness of 100 Å to 100,000 Å.
Claim 6
Dependent Claim
20 words
The electrode structure of claim 4, wherein the SnO 2 layer has a thickness of 3,000 Å to 10,000 Å.
Claim 7
Dependent Claim
18 words
The electrode structure of claim 1, including 1 to 15 mol% of Sb in the SnO 2 layer.
Claim 8
Dependent Claim
34 words
In a tuning fork vibrator having a zinc oxide thin film layer and an electrode, the improvement comprising a SnO 2 layer between the surface of the zinc oxide thin film and the electrode.
Claim 9
Dependent Claim
34 words
In a tuning fork vibrator having a zinc oxide thin film layer and an electrode, the improvement comprising a SnO 2 layer between the surface of the zinc oxide thin film and the electrode.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-02-20 | 1987-08-22 | 1988-02-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-02-20 | 1991-08-22 | 1992-02-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-02-20 | 1995-08-22 | 1996-02-21 | $7700.00 | Window Closed / Lapsed |