US3846649A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Piezoelectric transducer comprising oriented zinc oxide film and method of manufacture
Assignee: RCA Corp
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Filing: 1973-06-18
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Granted: 1974-11-05
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Expires: 1993-06-18
Abstract
Abstract A transducer capable of generating shear waves at microwave frequencies in a propagation medium, comprising an oriented polycrystalline film of zinc oxide on a substrate which is a film of zinc, In2O3, or In2O3/SnO2. The zinc oxide film is deposited by rf sputtering, with the substrate surface oriented 45* with respect to the sputtering target.
Inventors
- 👤 H Lehmann
- 👤 R Widmer
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 10:38
CPC Classifications
H; H03; H03H; H03H9/00; H03H9/02; H03H9/125; H10; H10N; H10N30/00; H10N30/80; H10N30/85; H10N30/853
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
29 words
A PIEZOELECTRIC TRANSDUCER COMPRISING A POLYCRYSTALLINE FILM OF PARALLEL-ORIENTED ZINC OXIDE ON A SUBSTRATE COMPRISING EITHER A FILM OF ZINC, A FILM OF IN2O3 OR A FILM OF IN2O3/SNO2
Claim 2
Dependent Claim
29 words
A PIEZOELECTRIC TRANSDUCER COMPRISING A POLYCRYSTALLINE FILM OF PARALLEL-ORIENTED ZINC OXIDE ON A SUBSTRATE COMPRISING EITHER A FILM OF ZINC, A FILM OF IN2O3 OR A FILM OF IN2O3/SNO2
Claim 3
Dependent Claim
14 words
A transducer according to claim 1 in which said body is magnesium aluminate spinel.
Claim 4
Dependent Claim
73 words
Apparatus comprising an elongated body of a substance capable of transmitting ultrasonic waves of energy, said body having on one of its surfaces a piezoelectric transducer comprising a thin substrate film of either zinc or a film of In2O3, or a film of In2O3/SnO2 which is capable of producing a parallel oriented film of ZnO, and a thin film of polycrystalline zinc oxide, oriented in the parallel mode, adhered to said first-mentioned film.
Claim 5
Dependent Claim
73 words
Apparatus comprising an elongated body of a substance capable of transmitting ultrasonic waves of energy, said body having on one of its surfaces a piezoelectric transducer comprising a thin substrate film of either zinc or a film of In2O3, or a film of In2O3/SnO2 which is capable of producing a parallel oriented film of ZnO, and a thin film of polycrystalline zinc oxide, oriented in the parallel mode, adhered to said first-mentioned film.
Claim 6
Dependent Claim
15 words
Apparatus according to claim 3 in which said body is composed of magnesium aluminate spinel.
Claim 7
Dependent Claim
13 words
Apparatus according to claim 4 including a signal generator connected across said transducer.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1977-11-04 | 1978-05-06 | 1978-11-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1981-11-04 | 1982-05-06 | 1982-11-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1985-11-04 | 1986-05-06 | 1986-11-05 | $7700.00 | Window Closed / Lapsed |