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US4431900A
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Laser induced flow Ge-O based materials
Assignee: National Semiconductor Corp
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Filing: 1982-01-15
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Granted: 1984-02-14
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Expires: 2002-01-15
Abstract
Abstract In a semiconductor device, laser energy is used to selectively heat various SiO 2 and/or GeO 2 based materials to elevated temperatures while maintaining the active device region and electrical interconnects at relatively low temperatures, to for example, induce densification and/or flow of the SiO 2 and/or GeO 2 based material to round off sharp edges and stops, without damaging or affecting the active region and electrical interconnects.
Inventors
- 👤 Michelangelo Delfino
- 👤 William I. Lehrer
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 11:05
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/69; H10P14/692; H10P14/6921; H10P14/6922; H10P14/63; H10P14/6326; H10P14/6328; H10P14/6334; H10P14/65; H10P14/6516; H10P14/6529; H10P14/6536; H10P14/6542; H10P14/6923; H10P34/00; H10P34/40; H10P34/42; H10P95/00; H10W; H10W20/00; H10W20/01; H10W20/071; H10W20/081; H10W20/082; H10W20/092; H10W20/093; H10W20/097; Y; Y10; Y10S; Y10S438/00; Y10S438/978
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
78 words
A method of inducing flow or densification of a first portion of a structure in close proximity to a second portion of the structure, said structure portion including a silicon substrate and interconnect metallization, said first portion being of the type wherein flow or densification is induced therein upon application of heat thereto, said method comprising laser heating said first portion to an extent substantially greater than said second portion wherein said first portion comprises germanium-oxygen bonded material.
Claim 2
Independent Claim
78 words
A method of inducing flow or densification of a first portion of a structure in close proximity to a second portion of the structure, said structure portion including a silicon substrate and interconnect metallization, said first portion being of the type wherein flow or densification is induced therein upon application of heat thereto, said method comprising laser heating said first portion to an extent substantially greater than said second portion wherein said first portion comprises germanium-oxygen bonded material.
Claim 3
Dependent Claim
18 words
The method of claim 1 wherein said first portion comprises at least 80 mole percent germanium-oxide bonded material.
Claim 4
Dependent Claim
20 words
The method of claim 1 wherein said first portion comprises a mixture of silicon-oxygen bonded material and germanium-oxygen bonded material.
Claim 5
Dependent Claim
25 words
The method of claim 3 wherein said first portion comprises a mixture of at least 80 mole percent silicon-oxygen bonded material and germanium-oxygen bonded material.
Claim 6
Independent Claim
22 words
The method of claims 1, 2, 3, or 4 wherein at least a part of said second portion interconnect metallization comprises metal.
Claim 7
Independent Claim
53 words
The method of claims 1, 2, 3 or 4 wherein the step of heating said first portion to an extent substantially greater than said second portion comprises subjecting said first portion to a laser beam having a wavelength of from 9 to 11 microns and coupled in energy absorption to said first portion.
Claim 8
Dependent Claim
38 words
The method of claim 6 wherein said laser beam is provided by a CO 2 laser having a waveform including a narrow high powered spike and a power tail of from approximately 100 to 200 microseconds in width.
Claim 9
Dependent Claim
16 words
The method of claim 7 wherein said CO 2 laser is a tunable CO 2 laser.
Claim 10
Dependent Claim
17 words
The method of claim 6 wherein said laser beam is provided by an N 2 O laser.
Claim 11
Dependent Claim
13 words
The product manufactured by the method of claims 1, 2, 3 or 4.
Claim 12
Dependent Claim
9 words
The product manufactured by the method of claim 5.
Claim 13
Dependent Claim
9 words
The product manufactured by the method of claim 6.
Claim 14
Dependent Claim
9 words
The product manufactured by the method of claim 7.
Claim 15
Dependent Claim
9 words
The product manufactured by the method of claim 8.
Claim 16
Dependent Claim
9 words
The product manufactured by the method of claim 9.
References Cited (Backward Citations)
US3542572A
Cited
US4284659A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-02-13 | 1987-08-15 | 1988-02-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-02-13 | 1991-08-15 | 1992-02-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-02-13 | 1995-08-15 | 1996-02-14 | $7700.00 | Window Closed / Lapsed |