US4428808A
Expired / Lapsed
US
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Method for obtaining oriented gold and piezoelectric films
Assignee: Westinghouse Electric Corp
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Filing: 1981-04-01
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Granted: 1984-01-31
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Expires: 2001-04-01
Abstract
Abstract A method for depositing thin films of gold having a high degree of orientation on surfaces previously yielding only unoriented gold by sputtering a layer of glass over the surface of the material followed by depositing a layer of oriented gold over the layer of glass. The additional step of depositing a layer of piezoelectric material over the layer of oriented gold is included to provide piezoelectric material having good orientation due to the oriented gold. A transducer is described having a layer of glass deposited over a material which previously provided unoriented gold followed by a layer of gold, a layer of piezoelectric material and a top conductive electrode to form a transducer wherein the piezoelectric material has a high degree of orientation.
Inventors
- 👤 Robert W. Weinert
- 👤 Donald H. Watt
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 16:04
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/06; C23C14/14; C23C14/18; C23C14/10; C30; C30B; C30B23/00; C30B23/02; C30B29/00; C30B29/02; H; H10; H10N; H10N30/00; H10N30/01; H10N30/07; H10N30/074; H10N30/079; H03; H03H; H03H9/00; H03H9/15; H03H9/17; H10N30/076
Claims Analysis
Total Claims: 42
Claim 1
Independent Claim
57 words
A method for depositing a layer of gold having a preferred crystalline orientation on the surface of a material which normally produces a layer of gold having no preferred crystalline orientation comprising the steps of: sputtering a layer of glass over said surface of said material, and depositing a layer of gold over said layer of glass.
Claim 2
Independent Claim
57 words
A method for depositing a layer of gold having a preferred crystalline orientation on the surface of a material which normally produces a layer of gold having no preferred crystalline orientation comprising the steps of: sputtering a layer of glass over said surface of said material, and depositing a layer of gold over said layer of glass.
Claim 3
Dependent Claim
18 words
The method of claim 1 wherein said layer of glass has a thickness of at least 500 Angstroms.
Claim 4
Dependent Claim
16 words
The method of claim 1 wherein said layer of glass includes silicon dioxide and barium oxide.
Claim 5
Dependent Claim
14 words
The method of claim 3 wherein said layer of glass further includes boron oxide.
Claim 6
Dependent Claim
31 words
The method of claim 1 wherein said layer of gold has its <111> axes of its various crystallites within an acute angle α of the normal to the layer of gold.
Claim 7
Dependent Claim
13 words
The method of claim 5 wherein said angle α is less than 5°.
Claim 8
Dependent Claim
13 words
The method of claim 5 wherein said angle α is less that 1.6°.
Claim 9
Dependent Claim
17 words
The method of claim 1 wherein said material includes a layer of silicon dioxide on said surface.
Claim 10
Dependent Claim
16 words
The method of claim 8 wherein said material includes silicon underneath said layer of silicon dioxide.
Claim 11
Independent Claim
47 words
A method for depositing piezoelectric material having a predetermined crystalline orientation comprising the steps of: sputtering a layer of glass over the upper surface of a substrate, depositing a layer of gold over said layer of glass, and depositing said piezoelectric material over said layer of gold.
Claim 12
Independent Claim
47 words
A method for depositing piezoelectric material having a predetermined crystalline orientation comprising the steps of: sputtering a layer of glass over the upper surface of a substrate, depositing a layer of gold over said layer of glass, and depositing said piezoelectric material over said layer of gold.
Claim 13
Dependent Claim
18 words
The method of claim 10 wherein said layer of glass has a thickness of at least 500 Angstroms.
Claim 14
Dependent Claim
16 words
The method of claim 10 wherein said layer of glass includes silicon dioxide and barium oxide.
Claim 15
Dependent Claim
14 words
The method of claim 12 wherein said layer of glass further includes boron oxide.
Claim 16
Dependent Claim
31 words
The method of claim 10 wherein said layer of gold has its <111> axis of its various crystallites within an acute angle α of the normal to the layer of gold.
Claim 17
Dependent Claim
13 words
The method of claim 14 wherein said angle α is less than 5°.
Claim 18
Dependent Claim
13 words
The method of claim 15 wherein said angle α is less than 1.6°.
Claim 19
Dependent Claim
33 words
The method of claim 14 wherein said layer of piezoelectric material has a preferred axis of its various crystallites within an acute angle β of the normal to the layer of piezoelectric material.
Claim 20
Dependent Claim
22 words
The method of claim 17 wherein said layer of piezoelectric material is zinc oxide and wherein said preferred axis is its C-axis.
Claim 21
Dependent Claim
13 words
The method of claim 17 wherein said angle β is less than 5°.
Claim 22
Independent Claim
57 words
A method for depositing a layer of gold having a preferred crystalline orientation on the surface of a material which normally produces a layer of gold having no preferred crystalline orientation comprising the steps of: depositing a layer of glass over said surface of said material, and depositing a layer of gold over said layer of glass.
Claim 23
Independent Claim
57 words
A method for depositing a layer of gold having a preferred crystalline orientation on the surface of a material which normally produces a layer of gold having no preferred crystalline orientation comprising the steps of: depositing a layer of glass over said surface of said material, and depositing a layer of gold over said layer of glass.
Claim 24
Dependent Claim
18 words
The method of claim 20 wherein said layer of glass has a thickness of at least 500 Angstroms.
Claim 25
Dependent Claim
16 words
The method of claim 20 wherein said layer of glass includes silicon dioxide and barium oxide.
Claim 26
Dependent Claim
14 words
The method of claim 22 wherein said layer of glass further includes boron oxide.
Claim 27
Dependent Claim
31 words
The method of claim 20 wherein said layer of gold has its <111> axes of its various crystallites within an acute angle α of the normal to the layer of gold.
Claim 28
Dependent Claim
13 words
The method of claim 24 wherein said angle α is less than 5°.
Claim 29
Dependent Claim
13 words
The method of claim 24 wherein said angle α is less than 1.6°.
Claim 30
Dependent Claim
17 words
The method of claim 20 wherein said material includes a layer of silicon dioxide on said surface.
Claim 31
Dependent Claim
16 words
The method of claim 27 wherein said material includes silicon underneath said layer of silicon dioxide.
Claim 32
Independent Claim
47 words
A method for depositing piezoelectric material having a predetermined crystalline orientation comprising the steps of: depositing a layer of glass over the upper surface of a substrate, depositing a layer of gold over said layer of glass, and depositing said piezoelectric material over said layer of gold.
Claim 33
Independent Claim
47 words
A method for depositing piezoelectric material having a predetermined crystalline orientation comprising the steps of: depositing a layer of glass over the upper surface of a substrate, depositing a layer of gold over said layer of glass, and depositing said piezoelectric material over said layer of gold.
Claim 34
Dependent Claim
18 words
The method of claim 29 wherein said layer of glass has a thickness of at least 500 Angstroms.
Claim 35
Dependent Claim
16 words
The method of claim 29 wherein said layer of glass includes silicon dioxide and barium oxide.
Claim 36
Dependent Claim
14 words
The method of claim 31 wherein said layer of glass further includes boron oxide.
Claim 37
Dependent Claim
31 words
The method of claim 29 wherein said layer of gold has its <111> axis of its various crystallites within an acute angle α of the normal to the layer of gold.
Claim 38
Dependent Claim
13 words
The method of claim 33 wherein said angle α is less than 5°.
Claim 39
Dependent Claim
13 words
The method of claim 34 wherein said angle α is less than 1.6°.
Claim 40
Dependent Claim
33 words
The method of claim 33 wherein said layer of piezoelectric material has a preferred axis of its various crystallites within an acute angle β of the normal to the layer of piezoelectric material.
Claim 41
Dependent Claim
22 words
The method of claim 36 wherein said layer of piezoelectric material is zinc oxide and wherein said preferred axis is its C-axis.
Claim 42
Dependent Claim
13 words
The method of claim 36 wherein said angle β is less than 5°.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-01-30 | 1987-08-01 | 1988-01-31 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-01-30 | 1991-08-01 | 1992-01-31 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-01-30 | 1995-08-01 | 1996-01-31 | $7700.00 | Window Closed / Lapsed |