Abstract An interdigital shear transducer which includes a substrate to which a first pair of first and second electrode arrays is deposited. Each array includes n metalized conductive pads and a pair of electrodes for each pad. Except for the first and last pads of the first and second arrays, respectively, one electrode of each pair is common to a corresponding but adjacent pad of an opposite array. The first and last pad electrodes are independent. All electrodes are interdigitated between electrodes of an opposite array. A piezoelectric film is deposited over the electrodes of the first pair and the substrate. A second pair of identical first and second arrays is deposited so as to have conductive pads in common with the first pair and electrodes deposited on the film over like electrodes of the first pair.
An interdigital mosaic thin-film shear transducer comprising a substrate; a first pair of arrays positioned on said substrate, said first pair consisting of a first and a second spaced apart array, each array including from two to n metalized conductive pads, the n-(n-1)th pad of said first array and the nth pad of said second array being adapted to receive an electrical input of opposite polarity and each of said pads including two spaced apart substantially parallel elongated electrodes; said other pads each having an elongated electrode and a common electrode, said common electrodes each being coextensive between an associated n-(n-2,3 . . . n) pad of said first array and an n-(n1,2 . . . (n-1)) pad of said second array, each of said common electrodes being spaced between and parallel to an elongated electrode from an adjacent pad of the same array and an elongated electrode of a corresponding pad of said other array; a piezoelectric film positioned over and in contact with the electrodes of said first and second array of said first pair and said substrate; and a second pair of arrays, said second pair consisting pf first and second arrays, said first array having n metal conductive pads in common with the pads of said first array of said first pair and said second array having n metalized conductive pads in common with the pads of said second array of said first pair, each pad of said first and second arrays of said second pair having a pair of electrodes positioned on said piezoelectric film that overlie and are identical to the electrodes of the common pad of said first and second arrays of said first pair.
Claim 2
Dependent Claim
282 words
An interdigital mosaic thin-film shear transducer comprising a substrate; a first pair of arrays positioned on said substrate, said first pair consisting of a first and a second spaced apart array, each array including from two to n metalized conductive pads, the n-(n-1)th pad of said first array and the nth pad of said second array being adapted to receive an electrical input of opposite polarity and each of said pads including two spaced apart substantially parallel elongated electrodes; said other pads each having an elongated electrode and a common electrode, said common electrodes each being coextensive between an associated n-(n-2,3 . . . n) pad of said first array and an n-(n1,2 . . . (n-1)) pad of said second array, each of said common electrodes being spaced between and parallel to an elongated electrode from an adjacent pad of the same array and an elongated electrode of a corresponding pad of said other array; a piezoelectric film positioned over and in contact with the electrodes of said first and second array of said first pair and said substrate; and a second pair of arrays, said second pair consisting pf first and second arrays, said first array having n metal conductive pads in common with the pads of said first array of said first pair and said second array having n metalized conductive pads in common with the pads of said second array of said first pair, each pad of said first and second arrays of said second pair having a pair of electrodes positioned on said piezoelectric film that overlie and are identical to the electrodes of the common pad of said first and second arrays of said first pair.
Claim 3
Dependent Claim
27 words
A shear transducer as set forth in claim 1 wherein the space between said electrodes is at least 100 times greater than the thickness of said film.