US4422763A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Automatic photomask alignment system for projection printing
Assignee: RCA Corp
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Filing: 1982-05-27
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Granted: 1983-12-27
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Expires: 2002-05-27
Abstract
Abstract An automatic photomask alignment system for projection printing includes a monochromatic light source, such as a laser, a series of diffraction patterns which are located on a semiconductor wafer in locations where alignments are to be made, at least one key which is located on a photomask with which the wafer is to be aligned, and a projection lens system. A light beam from the monochromatic light source is directed about the key on the photomask and through the projection lens system onto one of the diffraction patterns on the substrate to provide a pattern of light spots whose intensities at various locations are determined by the relative alignment of the key and the diffraction grating. A step and repeat mechanism is used to move the semiconductor wafer relative to the image of the photomask pattern which is projected onto the wafer while a feedback arrangement, which employs photocells and servo motors for aligning the locations where devices are to be formed on the substrate relative to the photomask, provides the alignment of the projected image with the proper locations for their formation.
Inventors
- 👤 Hans P. Kleinknecht
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 19:23
CPC Classifications
G; G03; G03F; G03F9/00; G03F9/70; G03F9/7073; G03F9/7076; G01; G01B; G01B11/00; G01B11/26; G01B11/27; G01B11/272; G03F9/7049
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
327 words
An automatic projection printing apparatus for aligning a photomask with a semiconductor wafer comprising: (a) a semiconductor wafer having a plurality of diffraction patterns formed thereon; (b) a monochromatic light source adapted to have a beam directed onto a selected one of said diffraction patterns; (c) a key on said photomask, said key being adapted to block portions of said selected one of said diffraction patterns from said beam of said monochromatic light source; (d) at least four photosensitive elements adapted to receive light from said monochromatic light source after said beam has been reflected from said selected one of said diffraction patterns; (e) step and repeat stage means for mounting said semiconductor wafer such that said semiconductor wafer can be moved in discrete steps from one position to another, each of said positions containing one of said diffraction patterns; (f) mounting means for mounting said photomask whereby light from said monochromatic light source can be directed onto said key on said photomask and thereafter directed onto said selected one of said diffraction patterns formed on said semiconductor wafer; (g) feedback means including said photosensitive elements and said mounting means for aligning said photomask to a selected portion of said substrate by relative linear and rotational movement between said photomask and said substrate in response to the intensities of light detected by said photosensitive elements; and (h) optical means comprising a pair of focusing lenses positioned between said source and said photomask for illuminating said key and focusing the portion of said beam not blocked by said key to a location above said wafer, said optical means further comprising a projection lens positioned between said focus location and said wafer for projecting said beam from said focused location to the surface of said wafer, (i) said optical means and said feedback means being arranged to focus reflected and diffracted beams from said diffraction pattern on said photosensitive elements when said photomask is in alignment with said wafer.
Claim 2
Dependent Claim
327 words
An automatic projection printing apparatus for aligning a photomask with a semiconductor wafer comprising: (a) a semiconductor wafer having a plurality of diffraction patterns formed thereon; (b) a monochromatic light source adapted to have a beam directed onto a selected one of said diffraction patterns; (c) a key on said photomask, said key being adapted to block portions of said selected one of said diffraction patterns from said beam of said monochromatic light source; (d) at least four photosensitive elements adapted to receive light from said monochromatic light source after said beam has been reflected from said selected one of said diffraction patterns; (e) step and repeat stage means for mounting said semiconductor wafer such that said semiconductor wafer can be moved in discrete steps from one position to another, each of said positions containing one of said diffraction patterns; (f) mounting means for mounting said photomask whereby light from said monochromatic light source can be directed onto said key on said photomask and thereafter directed onto said selected one of said diffraction patterns formed on said semiconductor wafer; (g) feedback means including said photosensitive elements and said mounting means for aligning said photomask to a selected portion of said substrate by relative linear and rotational movement between said photomask and said substrate in response to the intensities of light detected by said photosensitive elements; and (h) optical means comprising a pair of focusing lenses positioned between said source and said photomask for illuminating said key and focusing the portion of said beam not blocked by said key to a location above said wafer, said optical means further comprising a projection lens positioned between said focus location and said wafer for projecting said beam from said focused location to the surface of said wafer, (i) said optical means and said feedback means being arranged to focus reflected and diffracted beams from said diffraction pattern on said photosensitive elements when said photomask is in alignment with said wafer.
Claim 3
Dependent Claim
13 words
The apparatus of claim 1 wherein said monochromatic light source comprises a laser.
Claim 4
Dependent Claim
19 words
The apparatus of claim 1 wherein said diffraction patterns are comprised of photoresist patterns formed on a semiconductor wafer.
Claim 5
Dependent Claim
27 words
The apparatus of claim 1 wherein said wafer comprises a silicon wafer and said diffraction patterns are comprised of a silicon dioxide pattern formed on said wafer.
Claim 6
Dependent Claim
31 words
The apparatus of claim 1 wherein said diffraction patterns comprise a series of diffraction gratings which provide x-axis and y-axis information regarding the relative alignment of said photomask and said wafer.
Claim 7
Dependent Claim
29 words
The apparatus of claim 1 wherein said key comprises an opaque pattern adapted to prevent light from said monochromatic light source from reaching a portion of said diffraction pattern.
Claim 8
Dependent Claim
11 words
The apparatus of claim 1 wherein said photosensitive elements comprise photodiodes.
Claim 9
Dependent Claim
35 words
The apparatus of claim 1 further comprising an exposure light adapted to have a beam therefrom directed through said photomask onto said position on said semiconductor wafer including said selected one of said diffraction patterns.
Claim 10
Dependent Claim
19 words
The apparatus of claim 8 further comprising means for directing said beam of said exposure light through said photomask.
Claim 11
Dependent Claim
17 words
The apparatus of claim 9 wherein said means for directing said exposure light comprises an interference mirror.
Claim 12
Dependent Claim
25 words
The apparatus of claim 1 wherein said projection lens optically reduces the size of the image on said photomask for projection onto said semiconductor wafer.
Claim 13
Dependent Claim
39 words
The apparatus of claim 1 wherein said photomask is illuminated by said beam at a portion thereof surrounding and comprising said key such that the periphery only of said diffraction pattern on said wafer is illuminated by said beam.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1986-12-26 | 1987-06-27 | 1987-12-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-12-26 | 1991-06-27 | 1991-12-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1994-12-26 | 1995-06-27 | 1995-12-27 | $7700.00 | Window Closed / Lapsed |