Patent US4413020A successfully refreshed from Google Patents.
US4413020A
Expired / Lapsed
US
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Device fabrication incorporating liquid assisted laser patterning of metallization
Assignee: Texas Instruments Inc
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Filing: 1982-02-01
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Granted: 1983-11-01
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Expires: 2002-02-01
Abstract
Abstract Laser patterning of metallization is done by transmitting laser energy through a liquid film directly in contact with the metallization to be patterned. When the metal is evaporated by the laser energy, the vapor is condensed immediately by the liquid film. This prevents redeposition of metal on the patterned surface and suspends the removed metal in the liquid so that it may be reclaimed by filtration.
Inventors
- 👤 William R. McKee
- 👤 Russell H. Murdock
- 👤 Eric F. Schulte
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 23:12
CPC Classifications
B; B23; B23K; B23K26/00; B23K26/18; B23K26/009; H; H10; H10P; H10P34/00; H10P34/40; H10P34/42; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/067; H10W20/068; H05; H05K; H05K3/00; H05K3/02; H05K3/027; H05K3/10; H05K3/14; H05K3/143; Y; Y10; Y10S; Y10S438/00; Y10S438/94
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
129 words
A method for patterning a layer of material on a substrate comprising the following steps: (a) selecting a substrate having a high thermal conductivity; (b) forming a layer of insulating material over those areas of the substrate not requiring contact with a succeeding layer of the structure; (c) depositing on said insulating layer and on said substrate where exposed by said insulating layer, a thin layer of a material capable of absorbing radiated energy easily; (d) maintaining a thin film of liquid in direct contact with material to be patterned for confinement and collection of removed material; (e) subjecting said thin layer of material and overlying liquid film to radiant energy sufficient to cause sublimation of areas of said thin layer of material that are over said insulating material.
Claim 2
Independent Claim
129 words
A method for patterning a layer of material on a substrate comprising the following steps: (a) selecting a substrate having a high thermal conductivity; (b) forming a layer of insulating material over those areas of the substrate not requiring contact with a succeeding layer of the structure; (c) depositing on said insulating layer and on said substrate where exposed by said insulating layer, a thin layer of a material capable of absorbing radiated energy easily; (d) maintaining a thin film of liquid in direct contact with material to be patterned for confinement and collection of removed material; (e) subjecting said thin layer of material and overlying liquid film to radiant energy sufficient to cause sublimation of areas of said thin layer of material that are over said insulating material.
Claim 3
Dependent Claim
31 words
A method as in claim 1, wherein said sublimated material is condensed in said thin film of liquid, and said liquid is filtered after removal for recovery of said condensed material.
Claim 4
Independent Claim
71 words
A method for patterning metal in an integrated circuit, comprising the steps of: providing a substrate having a layer of metal to be patterned on a surface thereof; maintaining a thin film of liquid in direct contact with said layer of metal to be patterned, for confinement and collection of removed metal; and subjecting said metal and overlying liquid film to a laser process for removing areas of metal not wanted.
Claim 5
Independent Claim
71 words
A method for patterning metal in an integrated circuit, comprising the steps of: providing a substrate having a layer of metal to be patterned on a surface thereof; maintaining a thin film of liquid in direct contact with said layer of metal to be patterned, for confinement and collection of removed metal; and subjecting said metal and overlying liquid film to a laser process for removing areas of metal not wanted.
Claim 6
Dependent Claim
29 words
The method of claim 3, further comprising the subsequent step of: filtering said liquid after completion of laser process, for recovery of said metal removed from the composite substrate.
Claim 7
Dependent Claim
10 words
The method of claim 1, wherein said liquid comprises water.
Claim 8
Dependent Claim
10 words
The method of claim 3, wherein said liquid comprises water.
Claim 9
Dependent Claim
11 words
The method of claim 6, wherein said liquid consists of water.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1986-10-31 | 1987-05-02 | 1987-11-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-10-31 | 1991-05-02 | 1991-11-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1994-10-31 | 1995-05-02 | 1995-11-01 | $7700.00 | Window Closed / Lapsed |