Patent US2461648A successfully refreshed from Google Patents.
Patent US4412771A successfully refreshed from Google Patents.
US4412771A
Expired / Lapsed
US
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Sample transport system
Assignee: Applied Biosystems Inc
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Filing: 1981-07-30
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Granted: 1983-11-01
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Expires: 2001-07-30
Abstract
Abstract A sample transport system adaptable for use in an MBE instrument includes means for introducing a plurality of substrates into a storage chamber and means for conveying each substrate on a preselected basis to a processing chamber whereby the wafers not being processed are completely protected against contaminants which may occur within the processing chamber.
Inventors
- 👤 Robert L. Gerlach
- 👤 David D. Seibel
- 👤 Mark C. Miller
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 14:38
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0451; H10P72/0452; H10P72/0456; C; C23; C23C; C23C14/00; C23C14/22; C23C14/56; C30; C30B; C30B23/00; C30B23/02; H10P72/0466; H10P72/0468; H10P72/0471; H10P72/30; H10P72/33; H10P72/3306; Y; Y10; Y10S; Y10S414/00; Y10S414/135; Y10S414/139
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
135 words
A transport system useful for introducing and conveying a plurality of workpieces within an ultra-high vacuum apparatus, said system comprising: means for retaining a plurality of workpieces in a stacked spaced relationship; means for selectively positioning said retaining means within said apparatus; means for conveying a selected workpiece from said retaining means to a processing chamber; and means for interlocking said retaining means and said positioning means; said interlocking means including a platform assembly having a surface upon which said retaining means can be positioned; said interlocking means further including at least one pawl which, when said retaining means is positioned on said assembly surface, extends into a recess in the bottom of said retaining means and which, when said assembly is urged toward said retaining means, grasps an internally extending shelf within said recess.
Claim 2
Dependent Claim
135 words
A transport system useful for introducing and conveying a plurality of workpieces within an ultra-high vacuum apparatus, said system comprising: means for retaining a plurality of workpieces in a stacked spaced relationship; means for selectively positioning said retaining means within said apparatus; means for conveying a selected workpiece from said retaining means to a processing chamber; and means for interlocking said retaining means and said positioning means; said interlocking means including a platform assembly having a surface upon which said retaining means can be positioned; said interlocking means further including at least one pawl which, when said retaining means is positioned on said assembly surface, extends into a recess in the bottom of said retaining means and which, when said assembly is urged toward said retaining means, grasps an internally extending shelf within said recess.
Claim 3
Dependent Claim
27 words
A system as claimed in claim 1 further comprising: means for receiving said retaining means, said receiving means having means associated therewith for controlling the ambient therein.
Claim 4
Dependent Claim
25 words
A system as claimed in claim 2 wherein said controlling means includes a vacuum pump communicating with said receiving means via a selectively sealable conduit.
Claim 5
Dependent Claim
27 words
A system as claimed in claim 3 wherein said controlling means also includes a vacuum gate valve between said receiving means and the remainder of said apparatus.
Claim 6
Dependent Claim
31 words
A system as claimed in claim 3 or 4 wherein said receiving means includes a vacuum sealable access port through which said retaining means can enter or exit said receiving means.
Claim 7
Dependent Claim
28 words
A system as claimed in claim 1 wherein said retaining means is a plurality of shelf members spaced apart by a spine rigidly affixed to a base member.
Claim 8
Dependent Claim
34 words
A system as claimed in claim 1 wherein said positioning means is an elevator means having a fixture affixed thereto, said fixture being adapted to interlock with said base member of said retaining means.
Claim 9
Dependent Claim
23 words
A system as claimed in claim 1 wherein said conveying means is a trolley means having means for supporting one of said workpieces.
Claim 10
Dependent Claim
23 words
A system as claimed in claim 1 wherein said platform assembly includes a rim adapted for receiving means for grasping said positioning means.
Claim 11
Dependent Claim
17 words
A system as claimed in claim 9 wherein said positioning means includes means for grasping said rim.
Claim 12
Dependent Claim
20 words
A system as claimed in claim 10 wherein said grasping means is a pawl pivotably affixed to said positioning means.
Claim 13
Dependent Claim
37 words
A system as claimed in claim 1 or 7 wherein said positioning means having elevator means, said elevator means having a fixture affixed thereto said elevator being adapted to extend across the path of said conveying means.
Claim 14
Dependent Claim
29 words
A system as claimed in claim 12 wherein said positioning means being adapted to be retracted sufficiently to remove said retaining means from said path of said conveying means.
Claim 15
Dependent Claim
31 words
A system as claimed in claim 13 wherein said extending and said retracting motion of said elevator means is linear, and said linear motion is driven from a rotary feedthru driver.
Claim 16
Dependent Claim
15 words
A system as claimed in claim 1 wherein said conveying means traverses a transport chamber.
Claim 17
Dependent Claim
24 words
A system as claimed in claim 15 wherein said conveying means is mounted on an assembly, said assembly being insertable into said transport chamber.
Claim 18
Dependent Claim
35 words
A system as claimed in claim 16 wherein said assembly includes a trolley having a cantilever arm extending therefrom, one end of said cantilever arm being adapted to receive means for supporting a workpiece thereon.
Claim 19
Dependent Claim
19 words
A system as claimed in claim 17 wherein said trolley is conveyed within said transport chamber along guide rails.
Claim 20
Dependent Claim
31 words
A system as claimed in claim 18 wherein said trolley is affixed to a wire which is driven by pulleys, at least one of said pulleys being driven by a motor.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1986-10-31 | 1987-05-02 | 1987-11-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-10-31 | 1991-05-02 | 1991-11-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1994-10-31 | 1995-05-02 | 1995-11-01 | $7700.00 | Window Closed / Lapsed |