US3584847A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Advancing workpieces through a sputtering chamber
Assignee: AT&T Inc
•
Filing: 1968-05-31
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Granted: 1971-06-15
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Expires: 1988-05-31
Abstract
Abstract An apparatus for depositing a thin film of tantalum to workpieces includes a sputtering chamber and entrance and exit chambers located at opposite ends of and communicating with the sputtering chamber. Sealing devices are provided for isolating the sputtering chamber from the entrance and exit chambers. A reciprocating conveyor having a central conveyor section located within the sputtering chamber, and first and second conveyor sections, located in the entrance and exit chambers, respectively, and which sections may all be connected together, is provided for advancing workpieces from a first magazine in the entrance chamber, through the sputtering chamber, to a second magazine in the exit chamber.
Inventors
- 👤 Charles S Hammond Jr J Tribble
- 👤 Robert M Tribble
- 👤 Paul M Johnson Jr
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 07:12
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/56; Y; Y10; Y10S; Y10S414/00; Y10S414/135; Y10S414/137; Y10S414/139
Claims Analysis
Total Claims: 27
Claim 1
Independent Claim
85 words
An apparatus for moving articles through a treating chamber having a controlled atmosphere maintained therein, which comprises: a reciprocating conveyor for advancing articles through the treating chamber, said conveyor including (1) a central conveyor section mounted for reciprocating movement in the treating chamber and (2) first and second conveyor sections, mounted for reciprocating movement at opposite ends of the treating chamber, detachably connected to said central conveyor section; and means for sealing the treating chamber from the outside atmosphere when said conveyor sections are disconnected.
Claim 2
Independent Claim
85 words
An apparatus for moving articles through a treating chamber having a controlled atmosphere maintained therein, which comprises: a reciprocating conveyor for advancing articles through the treating chamber, said conveyor including (1) a central conveyor section mounted for reciprocating movement in the treating chamber and (2) first and second conveyor sections, mounted for reciprocating movement at opposite ends of the treating chamber, detachably connected to said central conveyor section; and means for sealing the treating chamber from the outside atmosphere when said conveyor sections are disconnected.
Claim 3
Independent Claim
176 words
An apparatus for moving articles through a treating chamber having entrance and exit openings formed in opposite sides thereof and having a controlled atmosphere maintained therein, which comprises: a reciprocating conveyor for advancing articles through the treating chamber, said conveyor incluDing (1) a central conveyor section extending through the treating chamber and mounted for reciprocating movement along a path extending between the entrance and exit openings formed in the chamber, (2) first and second conveyor sections located outside the treating chamber at opposite ends of and aligned with said central conveyor section and mounted for reciprocating movement along paths parallel to the path of reciprocation of said central conveyor section; means selectively operable for coupling said first and second conveyor sections together; means for imparting reciprocating movement to the coupled conveyor sections to advance articles through the treating chamber during forward movement of the conveyor sections; and means for sealing the entrance and exit openings of the treating chamber to seal the interior of the chamber from the ambient atmosphere when said conveyor sections are uncoupled.
Claim 4
Independent Claim
176 words
An apparatus for moving articles through a treating chamber having entrance and exit openings formed in opposite sides thereof and having a controlled atmosphere maintained therein, which comprises: a reciprocating conveyor for advancing articles through the treating chamber, said conveyor incluDing (1) a central conveyor section extending through the treating chamber and mounted for reciprocating movement along a path extending between the entrance and exit openings formed in the chamber, (2) first and second conveyor sections located outside the treating chamber at opposite ends of and aligned with said central conveyor section and mounted for reciprocating movement along paths parallel to the path of reciprocation of said central conveyor section; means selectively operable for coupling said first and second conveyor sections together; means for imparting reciprocating movement to the coupled conveyor sections to advance articles through the treating chamber during forward movement of the conveyor sections; and means for sealing the entrance and exit openings of the treating chamber to seal the interior of the chamber from the ambient atmosphere when said conveyor sections are uncoupled.
Claim 5
Dependent Claim
65 words
An apparatus for moving articles through a treating chamber having entrance and exit openings formed in opposite sides thereof and having a controlled atmosphere maintained therein, as set forth in claim 2, which includes: means on said conveyor sections for engaging articles to be advanced during the forward movement of the conveyor sections and for disengaging the articles during backward movement of said conveyor sections.
Claim 6
Dependent Claim
86 words
An apparatus for moving articles through a treating chamber having entrance and exit openings formed in opposite sides thereof and having a controlled atmosphere maintained therein, as set forth in claim 3, wherein: said article-engaging means comprises a plurality of gravity-operated fingers, pivotally mounted to the conveyor sections at equal distances along said conveyor sections, said fingers being normally urged into article-engaging positions by gravity during forward movement of the conveyor sections and being pivoted to bypass the articles during backward movement of said conveyor sections.
Claim 7
Dependent Claim
185 words
In an apparatus for moving articles through a treating chamber having entrance and exit openings formed in opposite sides thereof and having a controlled atmosphere maintained therein: entrance and exit chambers located at opposite ends of and communicating with the treating chamber through the entrance and exit openings, respectively; a conveyor for advancing articles from said entrance chamber, through said treating chamber to said exit chamber, said conveyor including (1) a central conveyor section mounted in said treating chamber for reciprocating movement in a path extending from the entrance opening to the exit opening, and (2) first and second conveyor sections, mounted in said entrance and exit chambers, respectively, for reciprocating movement in paths parallel to the path of reciprocation of said central conveyor section; means selectively operable for connecting said first and second conveyor sections to said central conveyor section; means for imparting reciprocating movement to the connected conveyor sections to advance articles through said treating chamber during forward movement of said conveyor sections; and means operable when said conveyor sections are disconnected for sealing said entrance and exit chambers from said treating chamber.
Claim 8
Dependent Claim
185 words
In an apparatus for moving articles through a treating chamber having entrance and exit openings formed in opposite sides thereof and having a controlled atmosphere maintained therein: entrance and exit chambers located at opposite ends of and communicating with the treating chamber through the entrance and exit openings, respectively; a conveyor for advancing articles from said entrance chamber, through said treating chamber to said exit chamber, said conveyor including (1) a central conveyor section mounted in said treating chamber for reciprocating movement in a path extending from the entrance opening to the exit opening, and (2) first and second conveyor sections, mounted in said entrance and exit chambers, respectively, for reciprocating movement in paths parallel to the path of reciprocation of said central conveyor section; means selectively operable for connecting said first and second conveyor sections to said central conveyor section; means for imparting reciprocating movement to the connected conveyor sections to advance articles through said treating chamber during forward movement of said conveyor sections; and means operable when said conveyor sections are disconnected for sealing said entrance and exit chambers from said treating chamber.
Claim 9
Dependent Claim
206 words
In an apparatus for conveying articles through a treating chamber having a controlled atmosphere maintained therein: entrance and exit chambers located at opposite ends of and communicating with the treating chamber; a conveyor track having a center track section extending through the treating chamber for receiving and guiding articles in movement through that chamber, a first track section extending from said entrance chamber toward said center track section and a second track section extending from said exit chamber toward said center track section; first means located between said entrance chamber and the treating chamber and mounted to move between said first and center track sections for sealing tHe treating chamber from said entrance chamber; second means located between said exit chamber and the treating chamber mounted to move between said center and second track sections for sealing the treating chamber from said exit chamber; and article-engaging means mounted for reciprocating movement along said track sections to move articles from said entrance chamber through the treating chamber to said exit chamber, said engaging means including a central portion for engaging articles on said center track section and first and second portions separable from said central portion for engaging articles on said first and second track sections, respectively.
Claim 10
Dependent Claim
206 words
In an apparatus for conveying articles through a treating chamber having a controlled atmosphere maintained therein: entrance and exit chambers located at opposite ends of and communicating with the treating chamber; a conveyor track having a center track section extending through the treating chamber for receiving and guiding articles in movement through that chamber, a first track section extending from said entrance chamber toward said center track section and a second track section extending from said exit chamber toward said center track section; first means located between said entrance chamber and the treating chamber and mounted to move between said first and center track sections for sealing tHe treating chamber from said entrance chamber; second means located between said exit chamber and the treating chamber mounted to move between said center and second track sections for sealing the treating chamber from said exit chamber; and article-engaging means mounted for reciprocating movement along said track sections to move articles from said entrance chamber through the treating chamber to said exit chamber, said engaging means including a central portion for engaging articles on said center track section and first and second portions separable from said central portion for engaging articles on said first and second track sections, respectively.
Claim 11
Independent Claim
295 words
An apparatus for advancing workpieces through a sputtering chamber having entrance and exit openings formed in opposite sides thereof and having a controlled atmosphere maintained therein, which comprises: entrance and exit chambers located at opposite ends of and communicating with the sputtering chamber through the entrance and exit openings, respectively; central guide means extending through the sputtering chamber for receiving and guiding workpieces in movement through that chamber; first and second guide means located in said entrance and exit chambers, respectively, and aligned with said central guide means in the sputtering chamber; workpiece-advancing means mounted for reciprocating movement along said guide means to engage and move workpieces along said guide means to engage and move workpieces along said first guide means in said entrance chamber to said central guide means in the sputtering chamber and then to said second guide means in said exit chamber, said advancing means including a central portion for engaging workpieces on said central guide means and first and second portions, which may be coupled to said central portion for engaging workpieces on said first and second guide means, respectively; means for imparting reciprocating movement to said workpiece-advancing means after the portions thereof are coupled together to advance workpieces along said guide means during forward movement of said workpiece-advancing means in a direction extending from said entrance chamber toward said exit chamber; a first sealing device located between said entrance chamber and the sputtering chamber for sealing the sputtering chamber from said entrance chamber when said first and central portions of said workpiece-engaging means are uncoupled; and a second sealing device located between said exit chamber and the sputtering chamber for sealing the sputtering chamber from said exit chamber when the central and second portions of said workpiece-engaging means are uncoupled.
Claim 12
Independent Claim
295 words
An apparatus for advancing workpieces through a sputtering chamber having entrance and exit openings formed in opposite sides thereof and having a controlled atmosphere maintained therein, which comprises: entrance and exit chambers located at opposite ends of and communicating with the sputtering chamber through the entrance and exit openings, respectively; central guide means extending through the sputtering chamber for receiving and guiding workpieces in movement through that chamber; first and second guide means located in said entrance and exit chambers, respectively, and aligned with said central guide means in the sputtering chamber; workpiece-advancing means mounted for reciprocating movement along said guide means to engage and move workpieces along said guide means to engage and move workpieces along said first guide means in said entrance chamber to said central guide means in the sputtering chamber and then to said second guide means in said exit chamber, said advancing means including a central portion for engaging workpieces on said central guide means and first and second portions, which may be coupled to said central portion for engaging workpieces on said first and second guide means, respectively; means for imparting reciprocating movement to said workpiece-advancing means after the portions thereof are coupled together to advance workpieces along said guide means during forward movement of said workpiece-advancing means in a direction extending from said entrance chamber toward said exit chamber; a first sealing device located between said entrance chamber and the sputtering chamber for sealing the sputtering chamber from said entrance chamber when said first and central portions of said workpiece-engaging means are uncoupled; and a second sealing device located between said exit chamber and the sputtering chamber for sealing the sputtering chamber from said exit chamber when the central and second portions of said workpiece-engaging means are uncoupled.
Claim 13
Dependent Claim
77 words
An apparatus for advancing workpieces through a sputtering chamber having entrance and exit openings formed in opposite sides thereof and having a controlled atmosphere maintained therein, as set forth in claim 7, which includes: a plurality of fingers, pivotally mounted on the portions of said workpiece-advancing means at equal distances therealong, for engaging workpieces on said guide means during forward movement of said workpiece-advancing means and for disengaging the workpieces during backward movement of said workpiece-advancing means.
Claim 14
Dependent Claim
65 words
An apparatus for advancing workpieces through a sputtering chamber having entrance and exit openings formed in opposite sides thereof and having a controlled atmosphere maintained therein, as set forth in claim 8, wherein: said fingers are normally urged into workpiece-engaging positions by gravity during forward movement of said workpiece-advancing means and are pivoted to bypass the advanced workpieces during backward movement of said workpiece-advancing means.
Claim 15
Dependent Claim
66 words
An apparatus for advancing workpieces through a sputtering chamber having entrance and exit openings formed in opposite sides thereof and having a controlled atmosphere maintained therein, as set forth in claim 7, which includes: heating means mounted in said entrancE chamber for raising the temperature of workpieces located in said entrance chamber to a desired level prior to advancement of the workpieces into the sputtering chamber.
Claim 16
Dependent Claim
181 words
An apparatus for advancing workpieces through a sputtering chamber having entrance and exit openings formed in opposite sides thereof and having a controlled atmosphere maintained therein, as set forth in claim 7, which includes: a first magazine located within said entrance chamber for receiving a plurality of workpieces to be advanced through the sputtering chamber, said first magazine being mounted to move relative to the first portion of said workpiece-advancing mechanism to feed the workpieces, one at a time, to said first portion of said workpiece-advancing mechanism; a second magazine located with said exit chamber for receiving workpieces after advancement thereof through the sputtering chamber, said second magazine being mounted to move relative to the second portion of said workpiece advancing mechanism to remove workpieces, one at a time, from said second portion of said workpiece-advancing mechanism; and means for moving said first and second magazines relative to said first and second portions of said workpiece-advancing mechanism, respectively, to feed workpieces to said workpiece-advancing mechanism in said entrance chamber and to remove workpieces from said advancing mechanism in said exit chamber.
Claim 17
Independent Claim
153 words
An apparatus for moving articles into a treating chamber having an entrance opening formed therein and having a controlled atmosphere maintained therein, which comprises: a conveyor for advancing articles through the entrance opening into the treating chamber, said conveyor including (1) an internal conveyor section located inside the treating chamber with one end thereof adjacent to the entrance opening, said internal section being mounted for reciprocating movement and (2) an external conveyor section located outside the treating chamber with one end thereof adjacent to the entrance opening, said external conveyor section also mounted for reciprocating movement; means selectively operable for connecting said external conveyor section to said internal conveyor section; means for imparting reciprocating movement to the connected conveyor sections to advance articles from said external conveyor section to said internal conveyor section; and means for sealing the treating chamber from the ambient atmosphere when said internal and external conveyor sections are disconnected.
Claim 18
Independent Claim
153 words
An apparatus for moving articles into a treating chamber having an entrance opening formed therein and having a controlled atmosphere maintained therein, which comprises: a conveyor for advancing articles through the entrance opening into the treating chamber, said conveyor including (1) an internal conveyor section located inside the treating chamber with one end thereof adjacent to the entrance opening, said internal section being mounted for reciprocating movement and (2) an external conveyor section located outside the treating chamber with one end thereof adjacent to the entrance opening, said external conveyor section also mounted for reciprocating movement; means selectively operable for connecting said external conveyor section to said internal conveyor section; means for imparting reciprocating movement to the connected conveyor sections to advance articles from said external conveyor section to said internal conveyor section; and means for sealing the treating chamber from the ambient atmosphere when said internal and external conveyor sections are disconnected.
Claim 19
Dependent Claim
198 words
In an apparatus for moving articles into a treating chamber having an entrance opening formed therein and having a controlled atmosphere maintained therein: an entrance chamber located at one end of and communicating with the treating chamber through the entrance opening; a conveyor for advancing articles from said entrance chamber through the entrance opening into said treating chamber, said conveyor including (1) an internal conveyor section located inside the treating chamber with one end thereof adjacent to the entrance opening, said internal conveyor section mounted for reciprocating movement along a path extending from the entrance opening into the treating chamber, and (2) an external conveyor section located in the entrance chamber with one end thereof adjacent to the entrance opening, said external conveyor section being mounted for reciprocating movement along a path parallel to the path of reciprocation of said internal conveyor section; means selectively operable for coupling said external conveyor section to said internal conveyor section; means for imparting reciprocating movement to the coupled conveyor sections to advance articles from said entrance chamber into the treating chamber; and means for sealing said treating chamber from said entrance chamber when said internal and external conveyor sections are disconnected.
Claim 20
Dependent Claim
198 words
In an apparatus for moving articles into a treating chamber having an entrance opening formed therein and having a controlled atmosphere maintained therein: an entrance chamber located at one end of and communicating with the treating chamber through the entrance opening; a conveyor for advancing articles from said entrance chamber through the entrance opening into said treating chamber, said conveyor including (1) an internal conveyor section located inside the treating chamber with one end thereof adjacent to the entrance opening, said internal conveyor section mounted for reciprocating movement along a path extending from the entrance opening into the treating chamber, and (2) an external conveyor section located in the entrance chamber with one end thereof adjacent to the entrance opening, said external conveyor section being mounted for reciprocating movement along a path parallel to the path of reciprocation of said internal conveyor section; means selectively operable for coupling said external conveyor section to said internal conveyor section; means for imparting reciprocating movement to the coupled conveyor sections to advance articles from said entrance chamber into the treating chamber; and means for sealing said treating chamber from said entrance chamber when said internal and external conveyor sections are disconnected.
Claim 21
Independent Claim
100 words
An apparatus for conveying articles, which comprises: a central conveyor section mounted for reciprocating movement along a path through which articles are to be conveyed; first and second conveyor sections located adjacent to opposite ends of the central conveyor section and mounted for reciprocating movement along said path; means selectively operable for connecting said first and second conveyor sections to said central conveyor section; and means for imparting reciprocating movement to the connected conveyor sections to advance articles, during forward movement of the conveyor sections, from said first conveyor section along said central conveyor section to said second conveyor section.
Claim 22
Independent Claim
100 words
An apparatus for conveying articles, which comprises: a central conveyor section mounted for reciprocating movement along a path through which articles are to be conveyed; first and second conveyor sections located adjacent to opposite ends of the central conveyor section and mounted for reciprocating movement along said path; means selectively operable for connecting said first and second conveyor sections to said central conveyor section; and means for imparting reciprocating movement to the connected conveyor sections to advance articles, during forward movement of the conveyor sections, from said first conveyor section along said central conveyor section to said second conveyor section.
Claim 23
Dependent Claim
44 words
An apparatus for conveying articles, as set forth in claim 14, which includes: means on said conveyor sections for engaging articles to be advanced during forward movement of said conveyor sections and for disengaging the advanced articles during backward movement of said conveyor sections.
Claim 24
Dependent Claim
59 words
An apparatus for conveying articles, as set forth in claim 15, wherein: said article-engaging means comprises a plurality of gravity-operated fingers located at equal distances along said conveyor sections which are urged into article engaging positions by gravity during forward movement of the conveyor sections and pivot to bypass the advanced articles during backward movement of said conveyor sections.
Claim 25
Dependent Claim
113 words
In an apparatus for conveying articles: a first conveyor section mounted for reciprocating movement along a path in which articles are to be conveyed; a second conveyor section mounted for reciprocating movement along said path and located adjacent to said first conveyor section; connecting means operated upon movement of said first conveyor section into engagement with said second conveyor section for connecting said first and second conveyor sections; and means for imparting reciprocating movement to said first conveyor section to (1) move said first conveyor section into engagement with the second conveyor section to connect said sections together and (2) to advance articles from said first conveyor section along said second conveyor section.
Claim 26
Dependent Claim
113 words
In an apparatus for conveying articles: a first conveyor section mounted for reciprocating movement along a path in which articles are to be conveyed; a second conveyor section mounted for reciprocating movement along said path and located adjacent to said first conveyor section; connecting means operated upon movement of said first conveyor section into engagement with said second conveyor section for connecting said first and second conveyor sections; and means for imparting reciprocating movement to said first conveyor section to (1) move said first conveyor section into engagement with the second conveyor section to connect said sections together and (2) to advance articles from said first conveyor section along said second conveyor section.
Claim 27
Dependent Claim
28 words
In apparatus for conveying articles, as set forth in claim 17: means for disabling said connecting means to allow said first and second conveyor sections to be separated.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-06-14 | 1974-12-14 | 1975-06-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-06-14 | 1978-12-14 | 1979-06-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-06-14 | 1982-12-14 | 1983-06-15 | $7700.00 | Window Closed / Lapsed |