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Method for fabricating an optical waveguide on a planar glass substrate

Assignee: NEC Corp
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Filing: 1982-03-31
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Granted: 1983-10-25
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Expires: 2002-03-31
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Abstract

Abstract A collimated laser beam focuses on a substrate put in a reaction vessel which includes glass raw materials to raise the temperature high enough for the thermal reaction of the glass raw materials to form a glass layer. The repeated scanning of the glass substrate with the laser beam accumulates a plurality of layers and forms an optical waveguide on the glass substrate.

Inventors

  • 👤 Motohiro Arai

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-31 23:24
CPC Classifications
C; C03; C03C; C03C17/00; C03C17/02

Claims Analysis

Total Claims: 5
Claim 1
Independent Claim 117 words
A method of fabricating an optical waveguide comprising the steps of: installing a planar glass substrate within a reaction vessel; supplying glass raw materials into the reaction vessel; irradiating a collimated laser beam on a defined region of the planar glass substrate to enhance the temperature high enough for the thermal reaction of the glass raw materials to form on the defined region a transparent glass layer having an index of refraction greater than that of the planar glass substrate, but said temperature being lower than the softening point of the planar glass substrate; and repeatedly scanning the glass substrate with the laser beam to accumulate a plurality of transparent glass layers which form an optical waveguide.
Claim 2
Independent Claim 117 words
A method of fabricating an optical waveguide comprising the steps of: installing a planar glass substrate within a reaction vessel; supplying glass raw materials into the reaction vessel; irradiating a collimated laser beam on a defined region of the planar glass substrate to enhance the temperature high enough for the thermal reaction of the glass raw materials to form on the defined region a transparent glass layer having an index of refraction greater than that of the planar glass substrate, but said temperature being lower than the softening point of the planar glass substrate; and repeatedly scanning the glass substrate with the laser beam to accumulate a plurality of transparent glass layers which form an optical waveguide.
Claim 3
Dependent Claim 28 words
The method of claim 1, further comprising the step of coating the optical waveguide with glass layers having a lower refractive index than that of the optical waveguide.
Claim 4
Dependent Claim 18 words
The method of claim 1 or 2, wherein the laser beam is that of a carbon dioxide laser.
Claim 5
Dependent Claim 25 words
The method of claim 1 or 2, wherein the laser beam is focused almost to the same size as the width of the optical waveguide.

References Cited (Backward Citations)

DE2402270A1 Cited
US3957474A Cited
JPS5266443A Cited
US4090776A Cited
JPS5367447A Cited
JPS5445147A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1986-10-24 1987-04-25 1987-10-25 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1990-10-24 1991-04-25 1991-10-25 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1994-10-24 1995-04-25 1995-10-25 $7700.00 Window Closed / Lapsed

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