US4411678A
Expired / Lapsed
US
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Method for fabricating an optical waveguide on a planar glass substrate
Assignee: NEC Corp
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Filing: 1982-03-31
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Granted: 1983-10-25
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Expires: 2002-03-31
Abstract
Abstract A collimated laser beam focuses on a substrate put in a reaction vessel which includes glass raw materials to raise the temperature high enough for the thermal reaction of the glass raw materials to form a glass layer. The repeated scanning of the glass substrate with the laser beam accumulates a plurality of layers and forms an optical waveguide on the glass substrate.
Inventors
- 👤 Motohiro Arai
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 03:02
CPC Classifications
C; C03; C03C; C03C17/00; C03C17/02
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
117 words
A method of fabricating an optical waveguide comprising the steps of: installing a planar glass substrate within a reaction vessel; supplying glass raw materials into the reaction vessel; irradiating a collimated laser beam on a defined region of the planar glass substrate to enhance the temperature high enough for the thermal reaction of the glass raw materials to form on the defined region a transparent glass layer having an index of refraction greater than that of the planar glass substrate, but said temperature being lower than the softening point of the planar glass substrate; and repeatedly scanning the glass substrate with the laser beam to accumulate a plurality of transparent glass layers which form an optical waveguide.
Claim 2
Independent Claim
117 words
A method of fabricating an optical waveguide comprising the steps of: installing a planar glass substrate within a reaction vessel; supplying glass raw materials into the reaction vessel; irradiating a collimated laser beam on a defined region of the planar glass substrate to enhance the temperature high enough for the thermal reaction of the glass raw materials to form on the defined region a transparent glass layer having an index of refraction greater than that of the planar glass substrate, but said temperature being lower than the softening point of the planar glass substrate; and repeatedly scanning the glass substrate with the laser beam to accumulate a plurality of transparent glass layers which form an optical waveguide.
Claim 3
Dependent Claim
28 words
The method of claim 1, further comprising the step of coating the optical waveguide with glass layers having a lower refractive index than that of the optical waveguide.
Claim 4
Dependent Claim
18 words
The method of claim 1 or 2, wherein the laser beam is that of a carbon dioxide laser.
Claim 5
Dependent Claim
25 words
The method of claim 1 or 2, wherein the laser beam is focused almost to the same size as the width of the optical waveguide.
References Cited (Backward Citations)
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Cited
US3957474A
Cited
JPS5266443A
Cited
US4090776A
Cited
JPS5367447A
Cited
JPS5445147A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1986-10-24 | 1987-04-25 | 1987-10-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-10-24 | 1991-04-25 | 1991-10-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1994-10-24 | 1995-04-25 | 1995-10-25 | $7700.00 | Window Closed / Lapsed |