US4394237A
Expired / Lapsed
US
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Spectroscopic monitoring of gas-solid processes
Assignee: AT&T Inc
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Filing: 1981-07-17
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Granted: 1983-07-19
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Expires: 2001-07-17
Abstract
Abstract A method for accurately monitoring and adjusting gas phase processes such as gas etching and chemical vapor deposition has been found. This method relies on the use of induced fluorescence. The gaseous phase used in the process to be monitored is probed by excitation with a suitable energy source. The emission from the gas phase induced through this excitation is then monitored and yields an accurate measure of concentration of the active species present. In turn the conditions of the fabrication process are adjusted based on these discerned concentrations.
Inventors
- 👤 Vincent M. Donnelly
- 👤 Daniel L. Flamm
- 👤 Robert F. Karlicek, Jr.
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 11:16
CPC Classifications
G; G01; G01N; G01N21/00; G01N21/62; G01N21/63; G01N21/64; G01N21/6402; C; C23; C23C; C23C16/00; C23C16/44; C23C16/52; C23F; C23F4/00
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
111 words
A process for fabricating devices comprising the steps of introducing a gas into proximity to a material surface, inducing a change in said material surface, spectroscopically monitoring said gas and controlling said process in accordance with said spectroscopic monitoring characterized in that the quantitative concentration of a plurality of species in said gas is monitored by inducing fluorescence from said plurality of species with a light source external to said gas wherein at least one of said species fluoresces through a spectroscopic fragmentation process or multiple photon process, and wherein based on the quantitative measurement of said fluorescence the conditions of said fabrication process are adjusted to yield a desired result.
Claim 2
Dependent Claim
111 words
A process for fabricating devices comprising the steps of introducing a gas into proximity to a material surface, inducing a change in said material surface, spectroscopically monitoring said gas and controlling said process in accordance with said spectroscopic monitoring characterized in that the quantitative concentration of a plurality of species in said gas is monitored by inducing fluorescence from said plurality of species with a light source external to said gas wherein at least one of said species fluoresces through a spectroscopic fragmentation process or multiple photon process, and wherein based on the quantitative measurement of said fluorescence the conditions of said fabrication process are adjusted to yield a desired result.
Claim 3
Dependent Claim
14 words
The process of claim 1 wherein said process comprises a chemical vapor deposition process.
Claim 4
Dependent Claim
28 words
The process of claim 2 wherein a material chosen from the group of semiconductor materials consisting of III-V compounds, II-V compounds and quaternaries and ternaries thereof is deposited.
Claim 5
Dependent Claim
14 words
The process of claim 1 wherein said fabrication process comprises a gas etching process.
Claim 6
Dependent Claim
15 words
The process of claim 4 wherein said process comprises an electrical gas discharge etching process.
Claim 7
Dependent Claim
14 words
The process of claim 5 wherein said process comprises a reactive ion etching process.
Claim 8
Dependent Claim
13 words
The process of claim 1 wherein said fluorescence is induced using a laser.
Claim 9
Dependent Claim
12 words
The process of claim 1 wherein said laser is an excimer laser.
Claim 10
Dependent Claim
12 words
The process of claim 7 wherein said laser comprises an ArF laser.
Claim 11
Dependent Claim
24 words
The process of claim 9 wherein said fluorescence results from a material chosen from the group consisting of indium-containing, gallium-containing, arsenic-containing and phosphorous-containing species.
Claim 12
Dependent Claim
112 words
A process for fabricating devices comprising the steps of introducing a gas into proximity to a material surface, inducing a change in said material surface, spectroscopically monitoring said gas and controlling said process in accordance with said spectroscopic monitoring characterized in that species that etch the composition of said surface of said material are produced, fluorescence of at least one of said etching species is induced by using an external pulsed light excitation source, a quantitative measure of said etching species is made by monitoring said fluorescence at a time when said source excitation has terminated, and based on said quantitative measure said fabrication process is adjusted to yield a desired result.
Claim 13
Dependent Claim
112 words
A process for fabricating devices comprising the steps of introducing a gas into proximity to a material surface, inducing a change in said material surface, spectroscopically monitoring said gas and controlling said process in accordance with said spectroscopic monitoring characterized in that species that etch the composition of said surface of said material are produced, fluorescence of at least one of said etching species is induced by using an external pulsed light excitation source, a quantitative measure of said etching species is made by monitoring said fluorescence at a time when said source excitation has terminated, and based on said quantitative measure said fabrication process is adjusted to yield a desired result.
Claim 14
Dependent Claim
13 words
The process of claim 11 wherein said gas is a chlorine containing gas.
Claim 15
Dependent Claim
22 words
The process of claim 11 wherein said surface contains a member of the group consisting of indium phosphorous, arsenic and gallium species.
Claim 16
Dependent Claim
14 words
The process of claim 11 wherein said etching species is produced by electrical discharge.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1986-07-18 | 1987-01-17 | 1987-07-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-07-18 | 1991-01-17 | 1991-07-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1994-07-18 | 1995-01-17 | 1995-07-19 | $7700.00 | Window Closed / Lapsed |