Method of manufacturing semiconductor device provided with complementary semiconductor elements

Claim 1

A method of manufacturing a compound semiconductor device comprising the steps of: applying a first mask layer onto one major surface of a semiconductor substrate except a first local region, said first mask layer having an upper layer and a lower layer of the same material and an intermediate layer of a different material having a first etching speed; forming a first semiconductor layer of a first conductivity type on the entire surface of said substrate by an epitaxial growth process, said first semiconductor layer including a single crystalline layer grown from said first local region of said semiconductor substrate, and a polycrystalline layer grown from said first mask layer; forming a second mask layer of said same material on a portion of said first semiconductor layer corresponding to said first local region, said second mask layer being etchable by a solution which barely etches said intermediate layer and being substantially thicker than said lower layer of said first mask layer; etching said first semiconductor layer by using said second mask layer so as to leave only said single crystalline layer having inclined surfaces determined by a crystal structure of said single crystalline layer; removing said second mask layer; forming a layer containing an impurity of the first conductivity type at a high concentration over the entire outer surface of said single crystalline layer; forming a first insulating layer on said single crystalline layer; removing said first mask layer; forming a second semiconductor layer of a second conductivity type over the entire surface of the substrate by epitaxial growth process, said second semiconductor layer including a polycrystalline layer grown from said first insulating layer and a single crystalline layer grown from said semiconductor substrate; selectively forming a third mask layer on the single crystalline layer of the second semiconductor layer; etching said second semiconductor layer by using said third mask layer so as to leave a single crystalline layer of the second semiconductor layer on a second local region of the semiconductor substrate thereby forming inclined surfaces determined by crystal structure of said semiconductor substrate; removing said third mask layer; forming a layer containing at a high concentration an impurity of the second conductivity type on the entire outer surface of the remaining single crystalline layer of said second semiconductor layer and exposed surface of said substrate; forming a second insulating layer on a surface containing the remaining single crystalline layer of said second semiconductor layer and exposed surface of said substrate; forming a polycrystalline semiconductor layer on said surfaces of said first and second insulating layers; removing said semiconductor substrate; and forming semiconductor elements having complementary characteristics in respective exposed single crystalline layers by utilizing a surface formed by polishing as a major plane.

Claim 2

A method of manufacturing a compound semiconductor device comprising the steps of: applying a first mask layer onto one major surface of a semiconductor substrate except a first local region, said first mask layer having an upper layer and a lower layer of the same material and an intermediate layer of a different material having a first etching speed; forming a first semiconductor layer of a first conductivity type on the entire surface of said substrate by an epitaxial growth process, said first semiconductor layer including a single crystalline layer grown from said first local region of said semiconductor substrate, and a polycrystalline layer grown from said first mask layer; forming a second mask layer of said same material on a portion of said first semiconductor layer corresponding to said first local region, said second mask layer being etchable by a solution which barely etches said intermediate layer and being substantially thicker than said lower layer of said first mask layer; etching said first semiconductor layer by using said second mask layer so as to leave only said single crystalline layer having inclined surfaces determined by a crystal structure of said single crystalline layer; removing said second mask layer; forming a layer containing an impurity of the first conductivity type at a high concentration over the entire outer surface of said single crystalline layer; forming a first insulating layer on said single crystalline layer; removing said first mask layer; forming a second semiconductor layer of a second conductivity type over the entire surface of the substrate by epitaxial growth process, said second semiconductor layer including a polycrystalline layer grown from said first insulating layer and a single crystalline layer grown from said semiconductor substrate; selectively forming a third mask layer on the single crystalline layer of the second semiconductor layer; etching said second semiconductor layer by using said third mask layer so as to leave a single crystalline layer of the second semiconductor layer on a second local region of the semiconductor substrate thereby forming inclined surfaces determined by crystal structure of said semiconductor substrate; removing said third mask layer; forming a layer containing at a high concentration an impurity of the second conductivity type on the entire outer surface of the remaining single crystalline layer of said second semiconductor layer and exposed surface of said substrate; forming a second insulating layer on a surface containing the remaining single crystalline layer of said second semiconductor layer and exposed surface of said substrate; forming a polycrystalline semiconductor layer on said surfaces of said first and second insulating layers; removing said semiconductor substrate; and forming semiconductor elements having complementary characteristics in respective exposed single crystalline layers by utilizing a surface formed by polishing as a major plane.