Patent US4391678A successfully refreshed from Google Patents.
US4391678A
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Methods of making infrared detector array cold shield
Assignee: United States Department of the Army
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Filing: 1981-11-18
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Granted: 1983-07-05
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Expires: 2001-11-18
Abstract
Abstract An infrared detector array is covered by an insulation subcoat atop which o metal layers are applied. The first layer is a thin sputtered or evaporated layer atop which the thick layer is electroplated. Holes through the metal layers uncover the individual detectors of the array.
Inventors
- 👤 Wallace L. Freeman
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 18:51
CPC Classifications
H; H10; H10F; H10F71/00; H10F71/129; H10F77/00; H10F77/30; H10F77/306; H10F77/331; H10F77/334
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
114 words
A method of making a cold shield for an infrared detector array, wherein the array consists of a plurality of detectors and connecting leads on one side of a substrate, wherein the method includes the steps of: (a) coating said detectors, said leads, and one side of said substrate with a thin subcoat; (b) depositing a relatively thin metal layer on said subcoat; (c) electroplating a relatively thick metal on said thin metal layer; (d) masking said thick metal layer in accordance with said array and etching through said thick and thin metal layers to uncover the subcoat over the detectors and at least a portion of said leads; and (e) removing the mask.
Claim 2
Independent Claim
114 words
A method of making a cold shield for an infrared detector array, wherein the array consists of a plurality of detectors and connecting leads on one side of a substrate, wherein the method includes the steps of: (a) coating said detectors, said leads, and one side of said substrate with a thin subcoat; (b) depositing a relatively thin metal layer on said subcoat; (c) electroplating a relatively thick metal on said thin metal layer; (d) masking said thick metal layer in accordance with said array and etching through said thick and thin metal layers to uncover the subcoat over the detectors and at least a portion of said leads; and (e) removing the mask.
Claim 3
Independent Claim
113 words
A method of making a cold shield for an infrared detector array, wherein the array consists of a plurality of detectors and connecting leads on one side of a substrate, wherein the method includes the steps of: (a) coating said detectors, said leads, and one side of said substrate with a thin subcoat; (b) depositing a relatively thin metal layer on said subcoat; (c) masking said thin metal layer in accordance with said array and etching through said thin metal layer to uncover the sublayer over the detectors and at least a portion of said leads; (d) removing the mask; and (e) electroplating a relatively thick metal layer on said thin metal layer.
Claim 4
Independent Claim
113 words
A method of making a cold shield for an infrared detector array, wherein the array consists of a plurality of detectors and connecting leads on one side of a substrate, wherein the method includes the steps of: (a) coating said detectors, said leads, and one side of said substrate with a thin subcoat; (b) depositing a relatively thin metal layer on said subcoat; (c) masking said thin metal layer in accordance with said array and etching through said thin metal layer to uncover the sublayer over the detectors and at least a portion of said leads; (d) removing the mask; and (e) electroplating a relatively thick metal layer on said thin metal layer.
Claim 5
Dependent Claim
19 words
The method as set forth in either claim 1 or claim 2 wherein said subcoat is a photoresist layer.
Claim 6
Dependent Claim
21 words
The method as set forth in either claim 1 or claim 2 wherein the uncovered portions of said subcoat are removed.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1986-07-04 | 1987-01-03 | 1987-07-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-07-04 | 1991-01-03 | 1991-07-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1994-07-04 | 1995-01-03 | 1995-07-05 | $7700.00 | Window Closed / Lapsed |