Method for repairing glass photomasks

Claim 2

In a method of making a patterned photomask plate utilizing a glass substrate for use in a photofabrication process, wherein defects appear as discontinuities in the photomask pattern, the improvement which comprises contacting said defect area with a solution of a nickel compound comprising reducible nickel ions and a solution of a reducing agent capable of reducing said nickel ions in order to deposit a nickel-containing coating having a sufficient density to mask actinic radiation employed in said photofabrication process.

Claim 3

The method according to claim 1, wherein the electroless deposition of nickel is continued until the nickel-containing coating has a density of at least 2.0 with respect to ultraviolet light.

Claim 4

The method according to claim 1, wherein the electroless deposition of nickel is continued until a deposit is formed having a surface resistivity of about 100 ohms per square or less, and then deposition of nickel is continued by electroplating until a nickel-containing coating is obtained which has a density of at least about 2.0 with respect to ultraviolet light.

Claim 5

The method according to claim 1, wherein the electroless deposition of a nickel-containing coating is accomplished by reduction of a nickel ion-containing compound with a sodium borohydride reducing agent.

Claim 6

The method according to claim 4, wherein the glass surface is cleaned, sensitized with stannous chloride and activated with palladium chloride prior to contacting said surface with said nickel compound and reducing agent.

Claim 7

The method according to claim 1, wherein the photomask pattern is prepared by providing a glass substrate with a layer of photographic emulsion containing silver halide on a first surface of the glass substrate; placing a master mask over the photographic emulsion layer and exposing the photographic emulsion to actinic radiation through the master mask; contacting the exposed photographic emulsion with photographic developing solutions, thereby producing on the first surface of the flat glass substrate a pattern of electroconductive silver-containing emulsion areas and silver-free areas; applying a first electrode layer onto the developed photographic emulsion on the first side of the glass substrate and applying a second electrode layer onto the glass surface on the opposite side of the glass substrate from said first surface; applying a direct current electrical field between the electrode layers so that electric charge passes through the silver-containing emulsion areas and the thickness of the glass substrate thereby inducing electromigration of silver ions from the silver-containing emulsion areas into portions of the glass underlying the silver-containing emulsion areas, while the temperature is maintained between about 100° and 350° C.; maintaining the glass at an elevated temperature in the presence of a reducing agent for a sufficient time to reduce and agglomerate the migrated silver ions within the glass, thereby producing a stained pattern within the surface of the glass.

Claim 8

The method according to claim 6, wherein the migrated silver ions are reduced by means of ionic metal reducing agents containing within the glass substrate.

Claim 9

The method according to claim 6, wherein the reduction of silver ions is accomplished by means of a reducing atmosphere.

Claim 10

The method according to claim 1, wherein said nickel-containing coating is heated for a period of about 10 minutes to 60 minutes at a temperature of about 250° to 350° C. to increase the durability of the coating.