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US3561963A
Expired / Lapsed
US
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Transparent mask and method for making the same
Assignee: Signetics Corp
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Filing: 1967-09-11
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Granted: 1971-02-09
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Expires: 1987-09-11
Abstract
Abstract THE USE OF A TRANSPARENT MASK COMPRISING A GLASS SUBSTRATE WITH A STAIN OF ELEMENTAL COPPER THEREIN IN A PROCESS IN WHICH A PHOTORESIST IS EXPOSED TO ULTRAVIOLET LIGHT THROUGH THE MASK.
Inventors
- 👤 William M Kiba
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 04:45
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/54
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-02-08 | 1974-08-10 | 1975-02-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-02-08 | 1978-08-10 | 1979-02-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-02-08 | 1982-08-10 | 1983-02-09 | $7700.00 | Window Closed / Lapsed |