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High-performance bipolar microwave transistor

Assignee: United States Department of the Navy
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Filing: 1980-12-19
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Granted: 1983-04-19
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Expires: 2000-12-19
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Abstract

Abstract A high-frequency transistor and method of making same wherein the parasiticapacitance between base and collector is reduced. The collector layer of GaAs is impregnated with boron ions to form an insulative region under the base contact structure thereby reducing the capacitance in this region and leaving only the region underlying the emitter structure as the active transistor region.

Inventors

  • 👤 Nax N. Yoder

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-27 17:52
CPC Classifications
H; H10; H10D; H10D10/00; H10D10/80; H10D10/821; H10D62/00; H10D62/10; H10D62/113; H10D62/115; H10D62/13; H10D62/137; H10D62/138; H10D62/165; H10D64/00; H10D64/20; H10D64/23; H10D64/231; H10D64/27; H10D64/281

Claims Analysis

Total Claims: 5
Claim 1
Independent Claim 166 words
An improved bipolar transistor of the type having a collector layer lying on one side of a substrate and an ohmic contact lying on the other side thereof, a base layer lying on the collector layer, an emitter structure including a tunnel barrier layer lying on a center region of the base layer, an emitter layer lying on the tunnel barrier layer and another ohmic contact lying on the emitter layer, and a base contact structure including a contact layer lying on outer regions of the base layer and a metal layer lying on the contact layer, the emitter and base contact structures being spaced from each other, wherein the improvement comprises: forming a semi-insulative region in the collector layer underlying the base contact structure, so that the region through which charge carriers travel from the emitter structure through the base layer into the collector layer is restricted substantially to the center region of the base layer underlying the tunnel barrier layer of the emitter structure.
Claim 2
Dependent Claim 166 words
An improved bipolar transistor of the type having a collector layer lying on one side of a substrate and an ohmic contact lying on the other side thereof, a base layer lying on the collector layer, an emitter structure including a tunnel barrier layer lying on a center region of the base layer, an emitter layer lying on the tunnel barrier layer and another ohmic contact lying on the emitter layer, and a base contact structure including a contact layer lying on outer regions of the base layer and a metal layer lying on the contact layer, the emitter and base contact structures being spaced from each other, wherein the improvement comprises: forming a semi-insulative region in the collector layer underlying the base contact structure, so that the region through which charge carriers travel from the emitter structure through the base layer into the collector layer is restricted substantially to the center region of the base layer underlying the tunnel barrier layer of the emitter structure.
Claim 3
Dependent Claim 44 words
The improved bipolar transistor of claim 1 wherein the collector layer is formed from GaAs, and the semi-insulative region in the collector layer is formed by implanting and subsequently annealing the collector layer underlying the base contact structure with boron-ions to a predetermined density.
Claim 4
Dependent Claim 22 words
The improved bipolar transistor of claim 2 wherein the predetermined density of the boron-ions is at least 1×10 16 /cm 3 .
Claim 5
Dependent Claim 30 words
The improved bipolar transistor of claim 3 wherein the semi-insulative region is deeper than the depth of the collector layer and extends into the one side of the underlying substrate.

References Cited (Backward Citations)

US3653978A Cited
US3622842A Cited
US4007474A Cited
US4151006A Cited
US4173763A Cited
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US4286275A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1986-04-18 1986-10-18 1987-04-19 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1990-04-18 1990-10-18 1991-04-19 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1994-04-18 1994-10-18 1995-04-19 $7700.00 Window Closed / Lapsed

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