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US4377542A
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Method of forming a densified silicon nitride article
Assignee: Ceradyne Inc
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Filing: 1981-12-21
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Granted: 1983-03-22
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Expires: 2001-12-21
Abstract
Abstract A method is disclosed in this specification for forming a densified silicon nitride article. The method is initiated by forming a reaction bonded article of moderate density. This moderate density reaction bonded article has a primary phase of substantially pure grains of silicon nitride surrounded by a secondary grain boundary phase. The secondary grain boundary phase contains silicon nitride, silicon dioxide and a densification aid incorporated in the reaction bonded article of moderate density. The compounds forming the secondary grain boundary phase are present either in their pure forms or interacted with one another. The reaction bonded article is packed in a packing powder which contains portions of the pure compounds found in or interacted with one another to define the secondary grain boundary phase. The reaction bonded article of moderate density is heated in the packing powder to a temperature and for a time whereby interaction of the secondary grain boundary phase and the packing powder may take place. The interaction takes place so that a new grain boundary phase can be developed about the substantially pure grains of silicon nitride. The new grain boundary phase developed is a unitary phase of a selected composition.
Inventors
- 👤 John A. Mangels
- 👤 John R. Baer
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 06:49
CPC Classifications
C; C04; C04B; C04B35/00; C04B35/515; C04B35/58; C04B35/584; C04B35/591; C04B35/593; C04B35/5935
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
205 words
A method of forming a densified silicon nitride article which comprises: forming a reaction bonded article of moderate density, said reaction bonded article having a primary phase of substantially pure grains of silicon nitride surrounded by a secondary grain boundary phase which contains silicon nitride, silicon dioxide and a yttrium oxide densification aid incorporated in the reaction bonded article of moderate density either in their pure forms or interacted with one another; packing said reaction bonded silicon nitride article of moderate density in a packing powder which contains 15 weight percent SiO 2 , 9 weight percent Y 2 O 3 , 25 weight percent BN and 51 weight percent silicon nitride; and heating said reaction bonded article of moderate density in said packing powder in a nitrogen pressure of 0.206 MPa for four hours at 1900° C. and in a nitrogen pressure of 2.06 MPa for two hours at 1950° C., whereby interaction of said secondary grain boundary phase may take place with the pure compounds contained in said packing powder whereby a new grain boundary phase is developed about the substantially pure grains of silicon nitride, which new grain boundary phase is a unitary phase of Y 2 Si 2 O 7 .
Claim 2
Independent Claim
205 words
A method of forming a densified silicon nitride article which comprises: forming a reaction bonded article of moderate density, said reaction bonded article having a primary phase of substantially pure grains of silicon nitride surrounded by a secondary grain boundary phase which contains silicon nitride, silicon dioxide and a yttrium oxide densification aid incorporated in the reaction bonded article of moderate density either in their pure forms or interacted with one another; packing said reaction bonded silicon nitride article of moderate density in a packing powder which contains 15 weight percent SiO 2 , 9 weight percent Y 2 O 3 , 25 weight percent BN and 51 weight percent silicon nitride; and heating said reaction bonded article of moderate density in said packing powder in a nitrogen pressure of 0.206 MPa for four hours at 1900° C. and in a nitrogen pressure of 2.06 MPa for two hours at 1950° C., whereby interaction of said secondary grain boundary phase may take place with the pure compounds contained in said packing powder whereby a new grain boundary phase is developed about the substantially pure grains of silicon nitride, which new grain boundary phase is a unitary phase of Y 2 Si 2 O 7 .
Claim 3
Independent Claim
212 words
A method of forming a densified silicon nitride article which comprises: forming a reaction bonded article of moderate density, said reaction bonded article having a primary phase of substantially pure grains of silicon nitride surrounded by a secondary grain boundary phase which contains silicon nitride, silicon dioxide and a yttrium oxide densification and incorporated in the reaction bonded article of moderate density either in their pure forms or interacted with one another; packing said reaction bonded silicon nitride article of moderate density in a packing powder which contains 5 weight percent SiO 2 , 9 weight percent Y 2 O 3 , 25 weight percent BN and 61 weight percent silicon nitride; and heating said reaction bonded article of moderate density in said packing powder in a nitrogen pressure of 0.206 MPa for hour hours at 1900° C. and in a nitrogen pressure of 2.06 MPa for two hours at 1950° C., whereby interaction of said secondary grain boundary phase may take place with the pure compounds contained in said packing powder whereby a new grain boundary phase is developed about the substantially pure grains of silicon nitride, which new grain boundary phase is a unitary phase of H phase composition Si 3 N 4 /4SiO 2 /5Y 2 O 3 .
Claim 4
Independent Claim
212 words
A method of forming a densified silicon nitride article which comprises: forming a reaction bonded article of moderate density, said reaction bonded article having a primary phase of substantially pure grains of silicon nitride surrounded by a secondary grain boundary phase which contains silicon nitride, silicon dioxide and a yttrium oxide densification and incorporated in the reaction bonded article of moderate density either in their pure forms or interacted with one another; packing said reaction bonded silicon nitride article of moderate density in a packing powder which contains 5 weight percent SiO 2 , 9 weight percent Y 2 O 3 , 25 weight percent BN and 61 weight percent silicon nitride; and heating said reaction bonded article of moderate density in said packing powder in a nitrogen pressure of 0.206 MPa for hour hours at 1900° C. and in a nitrogen pressure of 2.06 MPa for two hours at 1950° C., whereby interaction of said secondary grain boundary phase may take place with the pure compounds contained in said packing powder whereby a new grain boundary phase is developed about the substantially pure grains of silicon nitride, which new grain boundary phase is a unitary phase of H phase composition Si 3 N 4 /4SiO 2 /5Y 2 O 3 .
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1986-03-21 | 1986-09-20 | 1987-03-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-03-21 | 1990-09-20 | 1991-03-22 | $3760.00 | Window Closed / Lapsed |
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