US4363953A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Electron beam scribing method
Assignee: Hitachi Ltd
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Filing: 1980-05-01
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Granted: 1982-12-14
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Expires: 2000-05-01
Abstract
Abstract A plurality of band-shaped regions on a specimen are successively scanned by an electron beam having a ribbon-shaped rectangular cross-section. This scanning is effected by deflecting the electron beam electrostatically in the direction of the shorter side of the beam cross-section and electromagnetically in the direction of the longer side of the beam cross-section.
Inventors
- 👤 Teiji Katsuta
- 👤 Koji Nishiwaki
- 👤 Shinjiro Katagiri
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 06:33
CPC Classifications
B; B82; B82Y; B82Y10/00; B23; B23K; B23K15/00; B82Y40/00; H; H01; H01J; H01J37/00; H01J37/30; H01J37/3002; H01J37/3007; H01J37/317; H01J37/3174; H10; H10P; H10P95/00; H01J2237/00; H01J2237/30; H01J2237/304; H01J2237/30472; H01J2237/30483; H01J2237/317; H01J2237/3175; H01J2237/31776
Claims Analysis
Total Claims: 3
Claim 1
Independent Claim
286 words
A method of scribing a predetermined pattern on the surface of a specimen with an electron beam of a rectangular cross-section having a long side and a short side, the surface of the specimen being divided into matrix imaginary regions, each of said matrix imaginary regions being composed of band-shaped imaginary regions each of which has a long side and a short side, and each of the band-shaped imaginary regions being composed of a plurality of fine imaginary regions, comprising the steps of: (1) scanning each of predetermined ones of the band-shaped imaginary regions in each of predetermined ones of the matrix imaginary regions with the electron beam to electromagnetically deflect the same from one to another of predetermined ones of the fine imaginary regions in each of the predetermined band-shaped imaginary regions in a stepped manner in the direction of the long side of the rectangular cross-section of the electron beam and to electrostatically deflect the electron beam in each of the predetermined fine imaginary regions in the direction of the short side of the rectangular cross-section of the electron beam during periods between stepped deflections of the electron beam in the direction of the long side of the rectangular cross-section thereof, with the direction of the long side of the rectangular cross-section of the electron beam coinciding substantially with the direction of the long side of the band-shaped imaginary regions; (2) electromagnetically deflecting the electron beam to expose each of the predetermined band-shaped imaginary regions in each of the predetermined matrix imaginary regions to said electron beam in a stepped manner; and (3) two-dimensionally shifting the specimen to expose each of the predetermined matrix imaginary regions to the electron beam in a stepped manner.
Claim 2
Independent Claim
286 words
A method of scribing a predetermined pattern on the surface of a specimen with an electron beam of a rectangular cross-section having a long side and a short side, the surface of the specimen being divided into matrix imaginary regions, each of said matrix imaginary regions being composed of band-shaped imaginary regions each of which has a long side and a short side, and each of the band-shaped imaginary regions being composed of a plurality of fine imaginary regions, comprising the steps of: (1) scanning each of predetermined ones of the band-shaped imaginary regions in each of predetermined ones of the matrix imaginary regions with the electron beam to electromagnetically deflect the same from one to another of predetermined ones of the fine imaginary regions in each of the predetermined band-shaped imaginary regions in a stepped manner in the direction of the long side of the rectangular cross-section of the electron beam and to electrostatically deflect the electron beam in each of the predetermined fine imaginary regions in the direction of the short side of the rectangular cross-section of the electron beam during periods between stepped deflections of the electron beam in the direction of the long side of the rectangular cross-section thereof, with the direction of the long side of the rectangular cross-section of the electron beam coinciding substantially with the direction of the long side of the band-shaped imaginary regions; (2) electromagnetically deflecting the electron beam to expose each of the predetermined band-shaped imaginary regions in each of the predetermined matrix imaginary regions to said electron beam in a stepped manner; and (3) two-dimensionally shifting the specimen to expose each of the predetermined matrix imaginary regions to the electron beam in a stepped manner.
Claim 3
Dependent Claim
24 words
A method as defined in claim 1, wherein the length of the long side of the rectangular cross-section of the electron beam is variable.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1985-12-13 | 1986-06-14 | 1986-12-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1989-12-13 | 1990-06-14 | 1990-12-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1993-12-13 | 1994-06-14 | 1994-12-14 | $7700.00 | Window Closed / Lapsed |