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US4356152A Expired / Lapsed US ⏱️ 0.0 years remaining

Silicon melting crucible

Assignee: Intersil Corp
•
Filing: 1981-03-13
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Granted: 1982-10-26
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Expires: 2001-03-13
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Abstract

Abstract An improved liner for crucibles and dies used to melt silicon comprising one or more sheets of graphite each of which has on at least the surface facing the silicon melt a layer of silicon nitride or silicon oxynitride.

Inventors

  • 👤 Samuel Berkman
  • 👤 Michael T. Duffy
  • 👤 Harold E. Temple

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-25 18:46
CPC Classifications
F; F24; F24D; F24D1/00; C; C30; C30B; C30B15/00; C30B15/10; C30B35/00; C30B35/002; F27; F27B; F27B14/00; F27B14/08; F27B14/10; Y; Y10; Y10S; Y10S117/00; Y10S117/90; Y10S117/91; Y10T; Y10T117/00; Y10T117/10; Y10T117/1024; Y10T117/1032; Y10T117/1036; Y10T117/1044; Y10T428/00; Y10T428/26; Y10T428/263; Y10T428/30

Claims Analysis

Total Claims: 12
Claim 1
Independent Claim 70 words
In a crucible for forming a silicon melt, the improvement comprising providing on all internal surfaces of said crucible which might contact the molten silicon a protective lining comprising one or more thin, flexible sheets of graphite each of which has on at least the surface facing the molten silicon a layer of silicon nitride or silicon oxynitride and at least one of which has said layer on both surfaces.
Claim 2
Dependent Claim 70 words
In a crucible for forming a silicon melt, the improvement comprising providing on all internal surfaces of said crucible which might contact the molten silicon a protective lining comprising one or more thin, flexible sheets of graphite each of which has on at least the surface facing the molten silicon a layer of silicon nitride or silicon oxynitride and at least one of which has said layer on both surfaces.
Claim 3
Dependent Claim 27 words
The improved crucible in accordance with claim 1, wherein each of said sheets of graphite has a thickness of from about 2 mils to about 12 mils.
Claim 4
Dependent Claim 22 words
The improved crucible in accordance with claim 2, wherein each of said sheets of graphite has a thickness of about 3 mils.
Claim 5
Dependent Claim 21 words
The improved crucible in accordance with claim 1, wherein said layer is from about 1/20 mil to about 1 mil thick.
Claim 6
Dependent Claim 21 words
The improved crucible in accordance with claim 4, wherein said layer is from about 1/20 mil to about 1/2 mil thick.
Claim 7
Dependent Claim 29 words
The improved crucible in accordance with claim 1, wherein said lining is comprised of 2 sheets of graphite at least one of which has said layer on both surfaces.
Claim 8
Dependent Claim 24 words
The improved crucible in accordance with claim 1, wherein said lining has a total thickness of from about 3 mils to about 12 mils.
Claim 9
Dependent Claim 24 words
The improved crucible in accordance with claim 7, wherein said lining has a total thickness of from about 6 mils to about 7 mils.
Claim 10
Dependent Claim 37 words
The improved crucible in accordance with claim 1, wherein said crucible additionally includes die means for growing silicon in sheet or ribbon form, the internal surfaces of said die means also being provided with said protective lining.
Claim 11
Dependent Claim 18 words
The improved crucible in accordance with claim 1, wherein the improvement additionally comprises forming said crucible of mullite.
Claim 12
Dependent Claim 22 words
The improved crucible in accordance with claim 9, wherein the improvement additionally comprises forming said die means and said crucible of mullite.

References Cited (Backward Citations)

US3393054A Cited
US3491991A Cited
US4010064A Cited
US4090851A Cited
US4099924A Cited
JPS54157779A Cited
JPS54157781A Cited
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USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1985-10-25 1986-04-26 1986-10-26 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1989-10-25 1990-04-26 1990-10-26 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1993-10-25 1994-04-26 1994-10-26 $7700.00 Window Closed / Lapsed

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