US4355094A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Positive radiation sensitive resist terpolymers
Assignee: Intersil Corp
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Filing: 1981-03-16
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Granted: 1982-10-19
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Expires: 2001-03-16
Abstract
Abstract This invention relates to novel terpolymers of 3-methylcyclopentene, an omega alkynoic acid and sulfur dioxide. Positive radiation sensitive films prepared from the subject terpolymers adhere well to the substrate, demonstrate resistance to cracking and erosion during development and possess excellent edge definition.
Inventors
- 👤 Thomas R. Pampalone
- 👤 Kurt B. Kilichowski
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 16:41
CPC Classifications
C; C08; C08G; C08G75/00; C08G75/20; C08G75/205; C08G75/22; G; G03; G03F; G03F7/00; G03F7/004; G03F7/039
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
96 words
A method of forming a patterned layer on a substrate comprising: (a) coating the subject with a composition comprising a terpolymer comprising an organic monomer component and sulfur dioxide in a 1:1 molar ratio, said monomer component being comprised of 3-methylcyclopentene, and an omega alkynoic acid represented by the formula CH.tbd.C--(CH.sub.2).sub.n --COOH wherein n is an integer from 1 to 20, and a suitable solvent therefor; (b) drying said coating to form a positive recording medium; (c) irradiating selected portions of said medium and (d) developing the irradiated portions of said medium with a suitable developer.
Claim 2
Independent Claim
96 words
A method of forming a patterned layer on a substrate comprising: (a) coating the subject with a composition comprising a terpolymer comprising an organic monomer component and sulfur dioxide in a 1:1 molar ratio, said monomer component being comprised of 3-methylcyclopentene, and an omega alkynoic acid represented by the formula CH.tbd.C--(CH.sub.2).sub.n --COOH wherein n is an integer from 1 to 20, and a suitable solvent therefor; (b) drying said coating to form a positive recording medium; (c) irradiating selected portions of said medium and (d) developing the irradiated portions of said medium with a suitable developer.
Claim 3
Dependent Claim
26 words
The method in accordance with claim 1, wherein said composition contains from about 1 percent by weight to about 20 percent by weight of said terpolymer.
Claim 4
Dependent Claim
26 words
The method in accordance with claim 2, wherein said composition contains from about 6 percent by weight to about 10 percent by weight of said terpolymer.
Claim 5
Dependent Claim
14 words
The method in accordance with claim 1, wherein said solvent is 2-methoxyethylacetate or cyclopentanone.
Claim 6
Dependent Claim
19 words
A method in accordance with claim 1, wherein said medium is irradiated with a source of modulated electron beam.
Claim 7
Dependent Claim
16 words
A method in accordance with claim 1, wherein said development exposes corresponding portions of the substrate.
Claim 8
Dependent Claim
17 words
A method in accordance with claim 6 additionally including etching the exposed substrate with a suitable etchant.
Claim 9
Dependent Claim
65 words
A positive recording medium comprising a substrate and a radiation sensitive film applied to a surface of the substrate, said film comprised of a terpolymer comprising an organic monomer component and sulfur dioxide in a 1:1 molar ratio, said monomer component being comprised of 3-methylcyclopentene, and an omega alkynoic acid represented by the formula CH.tbd.C--(CH.sub.2).sub.n --COOH wherein n is an integer from 1 to 20.
Claim 10
Dependent Claim
65 words
A positive recording medium comprising a substrate and a radiation sensitive film applied to a surface of the substrate, said film comprised of a terpolymer comprising an organic monomer component and sulfur dioxide in a 1:1 molar ratio, said monomer component being comprised of 3-methylcyclopentene, and an omega alkynoic acid represented by the formula CH.tbd.C--(CH.sub.2).sub.n --COOH wherein n is an integer from 1 to 20.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1985-10-18 | 1986-04-19 | 1986-10-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1989-10-18 | 1990-04-19 | 1990-10-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1993-10-18 | 1994-04-19 | 1994-10-19 | $7700.00 | Window Closed / Lapsed |