Patent US4350866A successfully refreshed from Google Patents.
US4350866A
Expired / Lapsed
US
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Discharge device and method for use in processing semiconductor devices
Assignee: Fujitsu Ltd
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Filing: 1979-11-29
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Granted: 1982-09-21
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Expires: 1999-11-29
Abstract
Abstract An electrical discharge is applied to a wafer mounted in a wafer holder. The wafer includes at least one conducting region covered by an insulating layer. The discharge causes a conductive channel from the conductive region through the insulating layer. The conductive channel provides a relatively low impedance path suitable for conducting away electrons which are injected into the region during processing steps such as electron beam exposure.
Inventors
- 👤 John J. Zasio
- 👤 Michael W. Samuels
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 20:51
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/064; H10W20/065; H10P; H10P76/00; H10P76/20; H10P76/204; H10P76/2045; Y; Y10; Y10S; Y10S269/00; Y10S269/903; Y10S438/00; Y10S438/972
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
65 words
A process for making electrical contact to a conductive region of a wafer comprising, covering a conductive region of the wafer with an insulating layer, forming a resist layer on said insulating layer, engaging said wafer in an electrically conducting wafer holder, and, applying a voltage between said wafer and said holder to cause an electrical connection between said conductive region and said wafer holder.
Claim 2
Dependent Claim
65 words
A process for making electrical contact to a conductive region of a wafer comprising, covering a conductive region of the wafer with an insulating layer, forming a resist layer on said insulating layer, engaging said wafer in an electrically conducting wafer holder, and, applying a voltage between said wafer and said holder to cause an electrical connection between said conductive region and said wafer holder.
Claim 3
Independent Claim
127 words
An apparatus for manufacturing a semiconductor device comprising, a holder for a semiconductor wafer wherein the wafer includes a conductive region covered with an insulating layer and includes an electron beam resist over at least a portion of the insulating layer, said holder including a metallic frame with an opening for mounting said wafer, a discharge unit for receiving said holder and the mounted wafer, said discharge unit including a hinged cover holding a needle for moving said needle into contact with the electron beam resist on said wafer, voltage means for generating a voltage pulse, and means connecting said voltage pulse between said needle and said holder to cause a conductive channel to be formed between said holder and said conductive region through said insulating layer.
Claim 4
Independent Claim
127 words
An apparatus for manufacturing a semiconductor device comprising, a holder for a semiconductor wafer wherein the wafer includes a conductive region covered with an insulating layer and includes an electron beam resist over at least a portion of the insulating layer, said holder including a metallic frame with an opening for mounting said wafer, a discharge unit for receiving said holder and the mounted wafer, said discharge unit including a hinged cover holding a needle for moving said needle into contact with the electron beam resist on said wafer, voltage means for generating a voltage pulse, and means connecting said voltage pulse between said needle and said holder to cause a conductive channel to be formed between said holder and said conductive region through said insulating layer.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1985-09-20 | 1986-03-22 | 1986-09-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1989-09-20 | 1990-03-22 | 1990-09-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1993-09-20 | 1994-03-22 | 1994-09-21 | $7700.00 | Window Closed / Lapsed |