Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
224 words
In a method wherein a liquid coating material is applied to the surface of a substrate while the substrate is being spun in order to provide a thin coating on its surface, and wherein the coating is subsequently dried, the improvement comprising: (a) selecting a coating chamber; (b) charging the atmosphere of the coating chamber with a solvent for the coating material in a saturated vaporous form; (c) placing the substrate inside the coating chamber; (d) then depositing a quantity of the liquid coating material upon one surface of the substrate; (e) rotating the substrate about a self-contained vertical axis so as to radially disperse the liquid and thereby form a coating of uniform thickness on the substrate, by virtue of the saturated atmosphere which prevents any drying action upon the coating; (f) then selecting a drying chamber and, without exposing the interior of the coating chamber to outside atmosphere, placing the drying chamber in communication with the coating chamber so that the saturated atmosphere then occupies both chambers; (g) moving the coated substrate from the coating chamber into the drying chamber; (h) then independently sealing the drying chamber so as to retain both coated substrate and saturated atmosphere therein; and (i) thereafter initiating a drying action in the drying chamber so as to eliminate the saturated atmosphere therein while also drying the coating.
Claim 2
Dependent Claim
224 words
In a method wherein a liquid coating material is applied to the surface of a substrate while the substrate is being spun in order to provide a thin coating on its surface, and wherein the coating is subsequently dried, the improvement comprising: (a) selecting a coating chamber; (b) charging the atmosphere of the coating chamber with a solvent for the coating material in a saturated vaporous form; (c) placing the substrate inside the coating chamber; (d) then depositing a quantity of the liquid coating material upon one surface of the substrate; (e) rotating the substrate about a self-contained vertical axis so as to radially disperse the liquid and thereby form a coating of uniform thickness on the substrate, by virtue of the saturated atmosphere which prevents any drying action upon the coating; (f) then selecting a drying chamber and, without exposing the interior of the coating chamber to outside atmosphere, placing the drying chamber in communication with the coating chamber so that the saturated atmosphere then occupies both chambers; (g) moving the coated substrate from the coating chamber into the drying chamber; (h) then independently sealing the drying chamber so as to retain both coated substrate and saturated atmosphere therein; and (i) thereafter initiating a drying action in the drying chamber so as to eliminate the saturated atmosphere therein while also drying the coating.
Claim 3
Independent Claim
84 words
A method of applying a coating material in liquid form to a surface of a substrate so as to achieve a coating thereon which when dried is of uniform thickness, comprising the steps of: surrounding the surface with a solvent in a saturated vaporous form so as to prevent any drying action and at the same time centrifuging the substrate; and then when the centrifuging action is completed producing a drying action so as to remove the vaporous solvent and thus dry the coating.
Claim 4
Independent Claim
84 words
A method of applying a coating material in liquid form to a surface of a substrate so as to achieve a coating thereon which when dried is of uniform thickness, comprising the steps of: surrounding the surface with a solvent in a saturated vaporous form so as to prevent any drying action and at the same time centrifuging the substrate; and then when the centrifuging action is completed producing a drying action so as to remove the vaporous solvent and thus dry the coating.
Claim 5
Dependent Claim
26 words
The method of claim 2 wherein the substrate is first coated and centrifuged in a coating chamber, and is thereafter dried in a separate drying chamber.
Claim 6
Dependent Claim
18 words
The method of claim 3 wherein a solvent bath is maintained in the interior of the coating chamber.
Claim 7
Dependent Claim
15 words
The method of claim 2 wherein the coating material is a liquid photo resist material.
Claim 8
Dependent Claim
24 words
The method of claim 5 wherein excess liquid photo resist material that flows off the substrate during centrifuging is collected in a separate container.
Claim 9
Dependent Claim
18 words
The method of claim 2 wherein the drying action is produced by a combination of heat and vacuum.