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US4345176A
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Temperature compensated gallium arsenide surface acoustic wave devices
Assignee: RTX Corp
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Filing: 1980-11-03
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Granted: 1982-08-17
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Expires: 2000-11-03
Abstract
Abstract Temperature compensation is provided to a surface acoustic wave device including acoustoelectric transducers (12, 14) formed on a surface of a gallium arsenide substrate (10), by a composite layer including silicon dioxide (18, 26) and a mass loading metal (20, 24), which may be gold, titanium and gold, or other metals having Rayleigh wave velocities lower than that of gallium arsenide, such as silver and platinum.
Inventors
- 👤 Thomas W. Grudkowski
- 👤 Meyer Gilden
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 22:33
CPC Classifications
G; G10; G10K; G10K11/00; G10K11/36; H; H03; H03H; H03H9/00; H03H9/02; H03H9/02535; H03H9/02543; H03H9/02566; H03H9/02818; H03H9/02834
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
64 words
A temperature compensated surface acoustic wave device comprising a semi-insulating gallium arsenide substrate and at least one acoustoelectric transducer disposed on a surface of said substrate, characterized by: a composite mass loading and temperature compensating layer disposed on said surface, said layer including silicon dioxide and a metal having a Rayleigh wave velocity which is lower than the Rayleigh wave velocity of gallium arsenide.
Claim 2
Dependent Claim
64 words
A temperature compensated surface acoustic wave device comprising a semi-insulating gallium arsenide substrate and at least one acoustoelectric transducer disposed on a surface of said substrate, characterized by: a composite mass loading and temperature compensating layer disposed on said surface, said layer including silicon dioxide and a metal having a Rayleigh wave velocity which is lower than the Rayleigh wave velocity of gallium arsenide.
Claim 3
Dependent Claim
25 words
A surface acoustic wave device according to claim 1 wherein said composite layer includes a metal selected from the group including gold, silver and tungsten.
Claim 4
Dependent Claim
15 words
A surface acoustic wave device according to claim 2 wherein said composite layer includes gold.
Claim 5
Dependent Claim
48 words
A surface acoustic wave device according to claim 1 wherein said composite layer includes a layer of silicon dioxide deposited on said surface of said gallium arsenide substrate, a layer of titanium deposited over said silicon dioxide, and a layer of gold deposited over said layer of titanium.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1985-08-16 | 1986-02-15 | 1986-08-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1989-08-16 | 1990-02-15 | 1990-08-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1993-08-16 | 1994-02-15 | 1994-08-17 | $7700.00 | Window Closed / Lapsed |