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US4341589A Expired / Lapsed US ⏱️ 0.0 years remaining

Method for producing large surface plate or disc-shaped Si crystals with columnar structure

Assignee: Siemens AG
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Filing: 1980-03-20
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Granted: 1982-07-27
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Expires: 2000-03-20
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Abstract

Abstract Large surface silicon crystal layers with a columnar structure are produced by directing a plurality of spaced-apart cooling gas streams arranged relative to one another to correspond to a desired columnar structure and positioned a relatively short distance above a free surface of a silicon melt surface located below such system so that a spontaneous seed crystal formation occurs at the regions or areas of the melt immediately below each gas stream and thereafter the affected melt surface is solidified, and then removing the so-formed plate or disc-shaped silicon body from the melt. Dopant material can be incorporated within the so-formed plate or disc-shaped silicon crystal so that a pn-juncture parallel to the surface of such plate or disc is attained.

Inventors

  • 👤 Josef Grabmaier

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-02 18:06
CPC Classifications
C; C30; C30B; C30B11/00; C30B11/003; C30B29/00; C30B29/60; Y; Y10; Y10S; Y10S438/00; Y10S438/914; Y10S438/925

Claims Analysis

Total Claims: 7
Claim 1
Independent Claim 211 words
In a method of producing a relatively large surface silicon crystal plate-shaped body having a columnar crystalline structure and which is useful for manufacture of solar cells, said body being produced through a directional solidification of molten silicon in a silicon melting tank, the improvement comprising: arranging a cooling gas system comprised of a controllable cooling gas source interconnected with a plurality of gas nozzles in working relation with said silicon melting tank; positioning said gas nozzles a relatively short distance above a silicon melt surface in said melting tank and arranging said nozzles relative to one another so that spacing between one nozzle center and an adjacent nozzle center corresponds to the diameter of crystallites forming the desired columnar structure; directing a plurality of cooling gas streams from said cooling gas source through said nozzles and onto the silicon melt surface below such nozzles for a period of time sufficient to attain a desired thickness for said silicon body whereby a substantial spontaneous seed crystal formation occurs in the melt surface in the region thereof lying directly opposite such streams and the area of the melt surface below such streams solidifies about such seed crystals to form columnar crystallite structure; and removing the thus-formed silicon body from said melt surface.
Claim 2
Dependent Claim 211 words
In a method of producing a relatively large surface silicon crystal plate-shaped body having a columnar crystalline structure and which is useful for manufacture of solar cells, said body being produced through a directional solidification of molten silicon in a silicon melting tank, the improvement comprising: arranging a cooling gas system comprised of a controllable cooling gas source interconnected with a plurality of gas nozzles in working relation with said silicon melting tank; positioning said gas nozzles a relatively short distance above a silicon melt surface in said melting tank and arranging said nozzles relative to one another so that spacing between one nozzle center and an adjacent nozzle center corresponds to the diameter of crystallites forming the desired columnar structure; directing a plurality of cooling gas streams from said cooling gas source through said nozzles and onto the silicon melt surface below such nozzles for a period of time sufficient to attain a desired thickness for said silicon body whereby a substantial spontaneous seed crystal formation occurs in the melt surface in the region thereof lying directly opposite such streams and the area of the melt surface below such streams solidifies about such seed crystals to form columnar crystallite structure; and removing the thus-formed silicon body from said melt surface.
Claim 3
Dependent Claim 76 words
In a method as defined in claim 1 wherein a given dopant of one conductivity type is admixed with said silicon melt prior to directing said cooling gas streams onto said melt surface and a dopant of an opposing conductivity type relative to that of said given dopant is admixed with said gas streams before such streams contact said melt surface so that a pn-junction extending parallel to the surface of the formed silicon body results.
Claim 4
Dependent Claim 19 words
A method as defined in claim 2 wherein said dopant admixed with said gas streams is a gaseous substance.
Claim 5
Dependent Claim 29 words
A method as defined in claim 1 wherein said cooling gas streams are composed of a gas selected from the group consisting of hydrogen, inert gas and mixtures thereof.
Claim 6
Dependent Claim 38 words
A method as defined in claim 1 wherein said gas nozzles are arranged so that the spacing between one gas nozzle center and an adjacent gas nozzle center is in the range of about 150 to 3000 μm.
Claim 7
Dependent Claim 25 words
A method as defined in claim 3 wherein said spacing between one gas nozzle center and an adjacent gas nozzle center is about 1000 μm.

References Cited (Backward Citations)

US762879A Cited
US3173765A Cited
US3317300A Cited
US3294507A Cited
US3804682A Cited
GB1539244A Cited
DE2508803C3 Cited
US4264407A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1985-07-26 1986-01-25 1986-07-27 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1989-07-26 1990-01-25 1990-07-27 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1993-07-26 1994-01-25 1994-07-27 $7700.00 Window Closed / Lapsed

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