US4339526A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Acetylene terminated, branched polyphenylene resist and protective coating for integrated circuit devices
Assignee: International Business Machines Corp
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Filing: 1981-06-24
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Granted: 1982-07-13
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Expires: 2001-06-24
Abstract
Abstract A protective coating is formed on an integrated circuit device by coating the device with a solution of acetylene terminated, branched polyphenylene prepolymer material and heating the material to form a thermoset crosslinked polymer layer. Selectively patterned portions may be provided when, after the coating step and prior to the heating step, the steps of imagewise exposure to radiation and rinsing with an organic solvent are carried out.
Inventors
- 👤 Arnold I. Baise
- 👤 George Czornyj
- 👤 Anthony W. Wu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 23:27
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/68; H10P14/683; G; G03; G03F; G03F7/00; G03F7/004; G03F7/025; H10P14/65; H10P14/6516; H10P14/6536; H10P14/6538; H10P14/6539; H10P14/63; H10P14/6326; H10P14/6342
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
70 words
A process for forming a selectively patterned protective layer on an integrated circuit device by the steps of: (1) coating an acetylene terminated branched polyphenylene prepolymer material on the device, (2) patternwise selectively exposing the coating to radiation so as to crosslink the exposed portions, (3) removing the unexposed portions of the coating with a solvent, and (4) then heating the coating to form a thermoset cross-linked pattern protective layer.
Claim 2
Dependent Claim
70 words
A process for forming a selectively patterned protective layer on an integrated circuit device by the steps of: (1) coating an acetylene terminated branched polyphenylene prepolymer material on the device, (2) patternwise selectively exposing the coating to radiation so as to crosslink the exposed portions, (3) removing the unexposed portions of the coating with a solvent, and (4) then heating the coating to form a thermoset cross-linked pattern protective layer.
Claim 3
Dependent Claim
14 words
A process as claimed in claim 1 wherein the radiation is ultra violet light.
Claim 4
Dependent Claim
15 words
A process as claimed in claim 1 wherein the radiation is a beam of electrons.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1985-07-12 | 1986-01-11 | 1986-07-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1989-07-12 | 1990-01-11 | 1990-07-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1993-07-12 | 1994-01-11 | 1994-07-13 | $7700.00 | Window Closed / Lapsed |