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US4330768A Expired / Lapsed US ⏱️ 0.0 years remaining

Dispersion compensated acoustic surface waveguides using diffused substrates

Assignee: United States Department of the Navy
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Filing: 1980-10-02
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Granted: 1982-05-18
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Expires: 2000-10-02
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Abstract

Abstract A surface acoustical wave (SAW) waveguide device which compensates for dispersion by utilizing diffused substrates. Various embodiments have in-diffused or out-diffused core regions in which the ray is channeled that are topped by a thin metallic film overlay. Partially surrounding each core region are cladding portions which are also selectively in-diffused or out-diffused and may be covered by the metal overlay. By varying the amounts of in-diffusion or out-diffusion for the particular application, the effects of dispersion are minimized.

Inventors

  • 👤 Peter H. C. Huang
  • 👤 Joseph F. Weller
  • 👤 Thomas G. Giallorenzi

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-26 16:09
CPC Classifications
H; H03; H03H; H03H9/00; H03H9/30; H03H9/42; H03H9/44; H03H9/02; H03H9/02535; H03H9/02614; H03H9/02637; H03H9/02779; H03H9/02787; H03H9/02818; H03H9/02881; H03H9/46; H03H9/64; H03H9/6403

Claims Analysis

Total Claims: 22
Claim 1
Independent Claim 118 words
An electronic device comprising: piezoelectric means for propagation of an elastic wave, said piezoelectric means having at least one means forming a surface over which an elastic wave is adapted to travel; transducer means for converting an electrical signal to an elastic wave; metallic film means in contact with said surface means for electrical interaction with an elastic wave propagated over said surface means, at least a portion of said surface means being at least partially diffused so as to effect a change in the wave propagating properties of said piezoelectric means; whereby due to different wave propagating properties in different portions of said surface means, said wave is effectively channeled as it travels across said piezoelectric means.
Claim 2
Dependent Claim 118 words
An electronic device comprising: piezoelectric means for propagation of an elastic wave, said piezoelectric means having at least one means forming a surface over which an elastic wave is adapted to travel; transducer means for converting an electrical signal to an elastic wave; metallic film means in contact with said surface means for electrical interaction with an elastic wave propagated over said surface means, at least a portion of said surface means being at least partially diffused so as to effect a change in the wave propagating properties of said piezoelectric means; whereby due to different wave propagating properties in different portions of said surface means, said wave is effectively channeled as it travels across said piezoelectric means.
Claim 3
Dependent Claim 28 words
The invention as claimed in claim 1 wherein said surface means includes a generally rectangular wave propagating portion through which said elastic wave travels as it is channeled.
Claim 4
Dependent Claim 37 words
The invention as claimed in claim 2 wherein said metallic film means has substantially linear sides and the substantially linear sides of said generally rectangular portion substantially coincide with the substantially linear sides of metallic film means.
Claim 5
Dependent Claim 39 words
The invention as claimed in claims 1 or 3 wherein at least a portion of said surface means is in-diffused by metallic ions whereby said diffusion results in a change of the wave propagating characteristics of said surface means.
Claim 6
Dependent Claim 45 words
The invention as claimed in claims 2, or 3 wherein said surface means is at least partially diffused by metallic ions in the region outside of said wave propagating rectangular portion and is not substantially diffused by metallic ions in said wave propagating rectangular portion.
Claim 7
Dependent Claim 15 words
The invention as claimed in claim 5 wherein said wave propagating rectangular portion is out-diffused.
Claim 8
Dependent Claim 36 words
The invention as claimed in claim 2, wherein said generally rectangular wave propagating portion is at least partially diffused by metallic ions and the portions of said surface means adjacent said wave propagating portion are out-diffused.
Claim 9
Dependent Claim 19 words
The invention as claimed in claim 1 wherein said metallic film means is substantially coextensive with said surface means.
Claim 10
Dependent Claim 151 words
An electronic device comprising: piezoelectric means for propagating an elastic wave; said piezoelectric means having at least one surface over which elastic waves are adapted to be propagated; metallic means in close proximity to said at least one surface for electrical interaction with said elastic wave; said piezoelectric means being at least partially diffused so as to effect a change in the wave propagating properties of said piezoelectric means; said piezoelectric means including channel means having wave propagating properties in which, in conjunction with said metallic means, said elastic wave travels slower, and cladding means surrounding said channel means having wave propagating properties which allow an elastic wave to travel faster than in said channel means; transducer means in close proximity to said surface for conversion of an electrical input signal to an elastic wave; whereby an elastic wave produced at said transducer means will travel substantially within said channel means.
Claim 11
Dependent Claim 151 words
An electronic device comprising: piezoelectric means for propagating an elastic wave; said piezoelectric means having at least one surface over which elastic waves are adapted to be propagated; metallic means in close proximity to said at least one surface for electrical interaction with said elastic wave; said piezoelectric means being at least partially diffused so as to effect a change in the wave propagating properties of said piezoelectric means; said piezoelectric means including channel means having wave propagating properties in which, in conjunction with said metallic means, said elastic wave travels slower, and cladding means surrounding said channel means having wave propagating properties which allow an elastic wave to travel faster than in said channel means; transducer means in close proximity to said surface for conversion of an electrical input signal to an elastic wave; whereby an elastic wave produced at said transducer means will travel substantially within said channel means.
Claim 12
Dependent Claim 18 words
The invention as claimed in claim 9 wherein said metallic means and said channel means are substantially coextensive.
Claim 13
Dependent Claim 24 words
The invention as claimed in claim 9 wherein said metallic means extends beyond said channel means and at least partially covers said cladding means.
Claim 14
Dependent Claim 21 words
The invention as claimed in claims 9 or 10 wherein said channel means is at least partially diffused by metallic ions.
Claim 15
Dependent Claim 13 words
The invention as claimed in claim 12 wherein said cladding means are out-diffused.
Claim 16
Dependent Claim 24 words
The invention as claimed in claims 9 or 10 wherein said channel means is out-diffused and said cladding means is in-diffused by metallic ions.
Claim 17
Dependent Claim 39 words
The invention as claimed in claim 14 further including ground means positioned on said cladding means, said ground means being electrically connected to a first output terminal and said metallic means being electrically connected to a second output terminal.
Claim 18
Dependent Claim 44 words
The invention as claimed in claim 15 wherein said transducer means includes two input transducers and said metallic means comprises a beam compressor whereby a signal is inputted at each of said transducers and a convoluted output signal is transmitted from said output terminals.
Claim 19
Dependent Claim 19 words
The invention as claimed in claims 9, 10, or 11 wherein said metallic means is substantially formed of aluminum.
Claim 20
Dependent Claim 16 words
The invention as claimed in claims 4 or 12 wherein said metallic ions are substantially titanium.
Claim 21
Independent Claim 107 words
A method of fabricating a SAW waveguide device comprising the steps of: placing a continuous metal film in the range of 200-1500 angstroms in thickness over the portions of a piezoelectric substrate which are to be in-diffused by metal ions from said metal film; heating said piezoelectric substrate to a temperature in the range of 950°-1100° C. to allow the metal ions to be diffused into said substrate; implacing two transducers at opposite ends of said piezoelectric substrate and covering the central region of said substrate with a thin film of substantially aluminum composition in the range of 200-1500 angstroms thick; and bonding wires to said transducers.
Claim 22
Independent Claim 107 words
A method of fabricating a SAW waveguide device comprising the steps of: placing a continuous metal film in the range of 200-1500 angstroms in thickness over the portions of a piezoelectric substrate which are to be in-diffused by metal ions from said metal film; heating said piezoelectric substrate to a temperature in the range of 950°-1100° C. to allow the metal ions to be diffused into said substrate; implacing two transducers at opposite ends of said piezoelectric substrate and covering the central region of said substrate with a thin film of substantially aluminum composition in the range of 200-1500 angstroms thick; and bonding wires to said transducers.

References Cited (Backward Citations)

US3837827A Cited
US3795879A Cited
US3831115A Cited
US3990775A Cited
US3946338A Cited
US4217564A Cited
US4181904A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1985-05-17 1985-11-16 1986-05-18 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1989-05-17 1989-11-16 1990-05-18 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1993-05-17 1993-11-16 1994-05-18 $7700.00 Window Closed / Lapsed

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