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US4329016A Expired / Lapsed US ⏱️ 0.0 years remaining

Optical waveguide formed by diffusing metal into substrate

Assignee: The AT&T MVPD Group LLC
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Filing: 1979-09-24
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Granted: 1982-05-11
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Expires: 1999-09-24
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Abstract

Abstract The specification describes an optical waveguide device formed by diffusing a metal into a substrate which may be either a semiconductor material or a dielectric material. The substrate is first coated with a liquid composition comprising organo-metallic solutions of the desired metal and silica. The coated substrate is then heated at an elevated temperature for a period of time sufficient to cause the organic portion of the solution to decompose, thereby leaving a composite film comprising an oxide of the desired metal and SiO 2 . Upon further heating, the metal from the metal oxide diffuses into the substrate. The residual composite film may be left in place or removed.

Inventors

  • 👤 Bor-Uei Chen

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-25 13:21
CPC Classifications
G; G02; G02B; G02B6/00; G02B6/10; G02B6/12; G02B6/13; G02B6/134; G02B6/1342; C; C23; C23C; C23C10/00; C23C10/28; C30; C30B; C30B29/00; C30B29/10; C30B29/16; C30B29/22; C30B29/30; C30B31/00; C30B31/02

Claims Analysis

Total Claims: 2
Claim 1
Independent Claim 96 words
An optical waveguide structure wherein a lithium niobate (LiNbO 3 ) substrate has a titanium-diffused waveguiding layer therein atop which is disposed a dielectric layer comprising a composite film of titanium oxide and silicon dioxide, formed by a process comprising the deposition and subsequent thermal decomposition of an organo-metallic titanium-silica film on a surface of said lithium niobate substrate to thereby diffuse said titanium into said substrate and form said dielectric layer and simultaneously prevent unwanted out-diffusion of lithium oxide (Li 2 O) from said substrate, whereby the optical waveguiding properties of said waveguide are enhanced.
Claim 2
Dependent Claim 96 words
An optical waveguide structure wherein a lithium niobate (LiNbO 3 ) substrate has a titanium-diffused waveguiding layer therein atop which is disposed a dielectric layer comprising a composite film of titanium oxide and silicon dioxide, formed by a process comprising the deposition and subsequent thermal decomposition of an organo-metallic titanium-silica film on a surface of said lithium niobate substrate to thereby diffuse said titanium into said substrate and form said dielectric layer and simultaneously prevent unwanted out-diffusion of lithium oxide (Li 2 O) from said substrate, whereby the optical waveguiding properties of said waveguide are enhanced.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1985-05-10 1985-11-09 1986-05-11 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1989-05-10 1989-11-09 1990-05-11 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1993-05-10 1993-11-09 1994-05-11 $7700.00 Window Closed / Lapsed

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