Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
137 words
A cutting method, which comprises the steps of: providing a laminated film comprising at least two layers made of synthetic resin, wherein one of said layers is strippable from the other layer and contains coloring matter so that its spectral absorption characteristic is different from the spectral absorption characteristic of the other layer; focusing a laser beam on said one, strippable layer, said laser beam having a wave length such that it is absorbed by said one, strippable layer and is transmitted through said other layer; effecting relative movement between said laminated film and said laser beam along a predetermined path, while maintaining said laser beam focused on said one, strippable layer, so that said one layer is cut along a line whereby to form a cut pattern in said one layer, without cutting the other layer.
Claim 2
Dependent Claim
137 words
A cutting method, which comprises the steps of: providing a laminated film comprising at least two layers made of synthetic resin, wherein one of said layers is strippable from the other layer and contains coloring matter so that its spectral absorption characteristic is different from the spectral absorption characteristic of the other layer; focusing a laser beam on said one, strippable layer, said laser beam having a wave length such that it is absorbed by said one, strippable layer and is transmitted through said other layer; effecting relative movement between said laminated film and said laser beam along a predetermined path, while maintaining said laser beam focused on said one, strippable layer, so that said one layer is cut along a line whereby to form a cut pattern in said one layer, without cutting the other layer.
Claim 3
Dependent Claim
63 words
A method as claimed in claim 1, in which said one, strippable layer transmits red light and completely absorbs light of other wave lengths, said other layer transmits all visible light, and said laser beam has a wave length in a range other than that of red light, whereby the energy of said laser beam is absorbed only by said one, strippable layer.
Claim 4
Dependent Claim
20 words
A method as claimed in claim 1, in which said laser beam is emitted from an argon gas laser source.
Claim 5
Dependent Claim
20 words
A method as claimed in claim 1, in which said laser beam is emitted from a crypton gas laser source.
Claim 6
Dependent Claim
32 words
A method as claimed in claim 1, in which said laminated film is moved in the plane of said one, strippable layer under a stationary laser focused on said one, strippable layer.
Claim 7
Dependent Claim
35 words
A method as claimed in claim 1, in which smoke containing the evaporated substances procuded by the thermal decomposition of said one, strippable layer is blown off by applying a stream of an assistant gas.
Claim 8
Dependent Claim
27 words
A method as claimed in claim 6, in which the stream of an assistant gas is supplied by an assistant gas pipe provided near the cutting spot.
Claim 9
Dependent Claim
20 words
A method as claimed in claim 1, in which said laser beam is focused by means of a convergent lens.
Claim 10
Dependent Claim
21 words
A method as claimed in claim 1, in which said laser beam is directed horizontally against a vertically positioned laminated film.
Claim 11
Dependent Claim
13 words
A photomask original image prepared by the method as claimed in claim 2.
Claim 12
Dependent Claim
32 words
A method as claimed in claim 1, in which the laser focal point is scanned on the plane of said one, strippable layer while said laminated film is fixed and remains stationary.
Claim 13
Dependent Claim
30 words
A method as claimed in claim 1, including the additional step of stripping a cut portion or portions of said one, strippable layer from the remainder of said laminated film.
Claim 14
Dependent Claim
13 words
A photomask original image prepared by the method as claimed in claim 12.
Claim 15
Dependent Claim
17 words
A method as claimed in claim 1, in which said coloring matter is a pigment or dye.