US4318975A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Dry film multilayer photoresist element
Assignee: Individual
•
Filing: 1980-08-25
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Granted: 1982-03-09
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Expires: 2000-08-25
Abstract
Abstract A dry film photoresist consisting of a two-layer base incorporating a solid polymeric substrate with a thickness of from 15 to 100μ and an intermediate polymeric layer with a thickness of from 3 to 15μ transparent to UV-radiation within the range of from 300 to 400 nm, a light-sensitive layer with a thickness of from 4 to 20μ and a protective polymeric film with a thickness of from 5 to 50μ. All four of these layers are bonded therebetween by adhesion forces so that the adhesion of the protective polymeric film to the light-sensitive layer is less than the cohesion strength of the light-sensitive layer; the adhesion of the solid polymeric substrate to the intermediate polymeric layer is less than the adhesion of the intermediate polymeric layer to the light-sensitive layer and the adhesion force of each of the three above-mentioned layers is less than the cohesion strength of each of said layers.
Inventors
- 👤 Vladimir N. Kuznetsov
- 👤 Nadezhda F. Smirnova
- 👤 Vladimir D. Karpov
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 17:07
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/09; G03F7/11; G03F7/26; G03F7/34; H; H05; H05K; H05K3/00; H05K3/0073
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
221 words
A dry film photoresist which is a flexible laminated system comprising a solid polymeric substrate with a thickness of from 15 to 100μ, a light-sensitive layer having a thickness of 4 to 20μ comprising at least one light-sensitive compound capable of forming free radicals upon exposure to UV-radiation, at least one unsaturated compound containing in its molecule ethylene-like ##STR4## and also at least one polymer layer, and a protective polymeric film with a thickness of from 5 to 50μ located above the light-sensitive layer, characterized in that between the solid polymeric substrate and the light-sensitive layer there is an intermediate polymeric layer, transparent to UV-radiation within the range of 300 to 400 nm, having a thickness of 3 to 15μ consisting of a polymeric alcohol or a polymeric ester or a polyamide, or a halogenated polymer, or polyacrylonitrile, or mixtures thereof, all said four layers being bonded therebetween by adhesion forces so that the adhesion of said polymeric protective film to said light-sensitive layer is less than the cohesion strength of said light-sensitive layer, the adhesion of said solid polymeric substrate to said intermediate polymeric layer is less than the adhesion of said intermediate polymeric layer to the light-sensitive layer and the adhesion force of each of said three layers is less than the cohesion strength of each of said layers.
Claim 2
Dependent Claim
221 words
A dry film photoresist which is a flexible laminated system comprising a solid polymeric substrate with a thickness of from 15 to 100μ, a light-sensitive layer having a thickness of 4 to 20μ comprising at least one light-sensitive compound capable of forming free radicals upon exposure to UV-radiation, at least one unsaturated compound containing in its molecule ethylene-like ##STR4## and also at least one polymer layer, and a protective polymeric film with a thickness of from 5 to 50μ located above the light-sensitive layer, characterized in that between the solid polymeric substrate and the light-sensitive layer there is an intermediate polymeric layer, transparent to UV-radiation within the range of 300 to 400 nm, having a thickness of 3 to 15μ consisting of a polymeric alcohol or a polymeric ester or a polyamide, or a halogenated polymer, or polyacrylonitrile, or mixtures thereof, all said four layers being bonded therebetween by adhesion forces so that the adhesion of said polymeric protective film to said light-sensitive layer is less than the cohesion strength of said light-sensitive layer, the adhesion of said solid polymeric substrate to said intermediate polymeric layer is less than the adhesion of said intermediate polymeric layer to the light-sensitive layer and the adhesion force of each of said three layers is less than the cohesion strength of each of said layers.
Claim 3
Dependent Claim
27 words
A dry film photoresist according to claim 1, wherein the intermediate polymeric layer contains a compound selected from the group consisting of water-soluble methylcellulose and polyvinyl alcohol.
Claim 4
Dependent Claim
26 words
A dry film photoresist according to claim 1, wherein the intermediate polymeric layer contains a compound selected from the group consisting of cellulose triacetate and polyethyleneterephthalate.
Claim 5
Dependent Claim
25 words
A dry film photoresist according to claim 1, wherein the intermediate polymeric layer contains a compound selected from the group consisting of polyhexamethyleneadipamide and gelatine.
Claim 6
Dependent Claim
40 words
A dry film photoresist according to claim 1, wherein the halogenated polymer its intermediate polymeric layer contains a compound selected from the group consisting of a copolymer of tetrafluoroethylene with vinylidene fluoride and a copolymer of trifluorochloroethylene with vinylidene fluoride.
Claim 7
Dependent Claim
22 words
A dry film photoresist according to claim 1, wherein the polyacrylonitrile its intermediate polymeric layer contains a polymeric nitrile of acrylic acid.
Claim 8
Dependent Claim
30 words
A dry film photoresist according to claim 1, wherein the intermediate polymeric layer also incorporates dyestuff in an amount of from 0.01 to 1.0% by weight of the intermediate layer.
Claim 9
Dependent Claim
19 words
A dry film photoresist according to claim 7, wherein the dyestuff its intermediate polymeric layer contains rhodamine GG (G).
Claim 10
Dependent Claim
31 words
A dry film photoresist according to claim 1, wherein the intermediate polymeric layer contains also plastifying agents in an amount of from 5 to 15% by weight of the intermediate layer.
Claim 11
Dependent Claim
20 words
A dry film photoresist according to claim 9 wherein the plastifying agent of the intermediate polymeric layer contains hydroxyethylated dodecylphenol.
Claim 12
Dependent Claim
30 words
A dry film photoresist according to claim 1, wherein the intermediate polymeric layer also contains surfactants in an amount of from 0.1 to 0.5% by weight of the intermediate layer.
Claim 13
Dependent Claim
18 words
A dry film photoresist according to claim 11, wherein the surfactant is a sodium salt of dibutylnaphthalenesulphonic acid.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1985-03-08 | 1985-09-07 | 1986-03-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1989-03-08 | 1989-09-07 | 1990-03-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1993-03-08 | 1993-09-07 | 1994-03-09 | $7700.00 | Window Closed / Lapsed |