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US3873319A Expired / Lapsed US ⏱️ 0.0 years remaining

Dry-film negative photoresist having amidized styrene-maleic anhydride binder material

Assignee: 3M Co
•
Filing: 1974-01-31
•
Granted: 1975-03-25
•
Expires: 1994-01-31
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Abstract

Abstract Photopolymerizable composition comprising photopolymerizable monomers dispersed in a binder material that is the reaction product of a styrene-maleic anhydride and a dialkylamine. Such a photopolymerizable composition can be used as a heat-adhereable photosensitive layer carried on a carrier film to form a dryfilm, negative-acting photoresist.

Inventors

  • 👤 Carl John Berg

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-30 11:36
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/027; G03F7/032

Claims Analysis

Total Claims: 8
Claim 1
Independent Claim 160 words
A DRY-FILM NEGATIVE PHOTORESIST COMPRISING (1) A CARRIER FILM, (2) A PHOTOSENSITIVE LAYER CARRIED ON THE CARRIER FILM THAT IS HEAT-SOFTENABLE AND ADHEREABLE TO A METAL SUBSTRATE, REACTS WHEN EXPOSED TO AN IMAGEWISE PATTERN OF LIGHT TO PROVIDE IMAGEWISE DIFFERENTIAL REMOVABILITY FROM THE METAL SUBSTRATE IN AN AQUEOUS DEVELOPING BATH, AND COMPRISES (A) 100 PARTS BY WEIGHT OF THE REACTION PRODUCT OF A STYRENE-MALEIC ANHYDRIDE COPOLYMER AND DIALKYLAMINE IN WHICH THE ALKYL GROUP HAS 4 TO 8 CARBON ATOMS, THE STYRENE-MALEIC ANHYDRIDE MER HAS A MOLECULAR WEIGHT OF ABOUT 1.000 TO 10.000, AND BETWEEN ABOUT ONE-THIRD AND TWO-THIRDS OF THE ANHYDRIDE GROUPS ARE REACTED WITH THE DIALKYLAMINE, (B) ABOUT 50 TO 200 PARTS BY WEIGHT OF COMPATIBLE PHOTOPOLYMERIZABLE MONOMER DISPERSED IN THE BINDER MATERIAL, AND (C) A CATALYTIC AMOUNT OF A PHOTOINITIATOR FOR INITIATING IMAGEWISE REACTION OF THE PHOTOPOLYMERIZABLE MONOMER UPON IMAGEWISE REACTION OF THE PHOTOPHOTOSENSITIVE LAYER TO LIGHT, AND (3) A PROTECTIVE COVER FILM DISPOSED OVER THE PHOTOSENSITIVE LAYER.
Claim 2
Dependent Claim 160 words
A DRY-FILM NEGATIVE PHOTORESIST COMPRISING (1) A CARRIER FILM, (2) A PHOTOSENSITIVE LAYER CARRIED ON THE CARRIER FILM THAT IS HEAT-SOFTENABLE AND ADHEREABLE TO A METAL SUBSTRATE, REACTS WHEN EXPOSED TO AN IMAGEWISE PATTERN OF LIGHT TO PROVIDE IMAGEWISE DIFFERENTIAL REMOVABILITY FROM THE METAL SUBSTRATE IN AN AQUEOUS DEVELOPING BATH, AND COMPRISES (A) 100 PARTS BY WEIGHT OF THE REACTION PRODUCT OF A STYRENE-MALEIC ANHYDRIDE COPOLYMER AND DIALKYLAMINE IN WHICH THE ALKYL GROUP HAS 4 TO 8 CARBON ATOMS, THE STYRENE-MALEIC ANHYDRIDE MER HAS A MOLECULAR WEIGHT OF ABOUT 1.000 TO 10.000, AND BETWEEN ABOUT ONE-THIRD AND TWO-THIRDS OF THE ANHYDRIDE GROUPS ARE REACTED WITH THE DIALKYLAMINE, (B) ABOUT 50 TO 200 PARTS BY WEIGHT OF COMPATIBLE PHOTOPOLYMERIZABLE MONOMER DISPERSED IN THE BINDER MATERIAL, AND (C) A CATALYTIC AMOUNT OF A PHOTOINITIATOR FOR INITIATING IMAGEWISE REACTION OF THE PHOTOPOLYMERIZABLE MONOMER UPON IMAGEWISE REACTION OF THE PHOTOPHOTOSENSITIVE LAYER TO LIGHT, AND (3) A PROTECTIVE COVER FILM DISPOSED OVER THE PHOTOSENSITIVE LAYER.
Claim 3
Dependent Claim 20 words
A photoresist of claim 1 in which the photopolymerizable monomer comprises a chemically mixed acrylic acid/methyacrylic acid ester of tris-(2-hydroxyethyl)isocyanurate.
Claim 4
Dependent Claim 11 words
A photoresist of claim 1 in which the dialkylamine is di-n-hexylamine.
Claim 5
Dependent Claim 177 words
A photopolymerizable composition useful as a negative photoresist, and that in film form is heat-softenable and adhereable to a copper substrate, and reacts when exposed to an imagewise pattern of light to provide imagewise differential removability from the copper substrate iN an aqueous developing bath, comprising (a) 100 parts by weight of the reaction product of a styrene-maleic anhydride copolymer and dialkylamine in which the alkyl group has 4 to 8 carbon atoms, the styrene-maleic anhydride copolymer has a molecular weight of about 1,000 to 10, 000, and between about one-third and two-thirds of the anhydride groups are reacted with the dialkylamine; (b) about 50 to 200 parts by weight of a compatible photopolymerizable monomer dispersed in the binder material, said monomer having on the average between about 2 and 4 terminal ethylenically unsaturated groups by which the photopolymerizable monomer undergoes chain-propagating addition polymerization in the presence of actinic radiation; and (c) a catalytic amount of a photoinitiator that initiates and promotes imagewise reaction of the photopolymerizable monomer upon imagewise exposure of the photopolymerizable composition to light.
Claim 6
Dependent Claim 177 words
A photopolymerizable composition useful as a negative photoresist, and that in film form is heat-softenable and adhereable to a copper substrate, and reacts when exposed to an imagewise pattern of light to provide imagewise differential removability from the copper substrate iN an aqueous developing bath, comprising (a) 100 parts by weight of the reaction product of a styrene-maleic anhydride copolymer and dialkylamine in which the alkyl group has 4 to 8 carbon atoms, the styrene-maleic anhydride copolymer has a molecular weight of about 1,000 to 10, 000, and between about one-third and two-thirds of the anhydride groups are reacted with the dialkylamine; (b) about 50 to 200 parts by weight of a compatible photopolymerizable monomer dispersed in the binder material, said monomer having on the average between about 2 and 4 terminal ethylenically unsaturated groups by which the photopolymerizable monomer undergoes chain-propagating addition polymerization in the presence of actinic radiation; and (c) a catalytic amount of a photoinitiator that initiates and promotes imagewise reaction of the photopolymerizable monomer upon imagewise exposure of the photopolymerizable composition to light.
Claim 7
Dependent Claim 21 words
A photopolymerizable composition of claim 4 in which the photopolymerizable monomer comprises a chemically mixed acrylic acid/methacrylic acid ester of tris-(2-hydroxyethyl)isocyanurate.
Claim 8
Dependent Claim 12 words
A photopolymerizable composition of claim 4 in which the dialkylamine is di-n-hexylamine.

References Cited (Backward Citations)

US3070158A Cited
US3476086A Cited
US3753715A Cited
US3765898A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1978-03-24 1978-09-23 1979-03-25 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1982-03-24 1982-09-23 1983-03-25 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1986-03-24 1986-09-23 1987-03-25 $7700.00 Window Closed / Lapsed

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