US4315692A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Mask alignment for semiconductor processing
Assignee: International Standard Electric Corp
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Filing: 1980-10-29
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Granted: 1982-02-16
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Expires: 2000-10-29
Abstract
Abstract A high power microscope is fitted with a gas jet arrangement for blowing a thin flexible mask into local contact with a semiconductor substrate so as to facilitate mask alignment.
Inventors
- 👤 Rudolf A. H. Heinecke
- 👤 David J. Moule
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 05:23
CPC Classifications
G; G03; G03F; G03F9/00; G03F9/70; G03F9/7049; G03F9/7053; G03F9/7057; G02; G02B; G02B21/00; G02B21/0004; G02B21/0016
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
158 words
An apparatus for facilitating alignment of a flexible mask with a semiconductor process wafer and adapted to be mounted on a cylindrical objective portion of a split field microscope, the apparatus comprising a tubular member of a diameter such that the member is a sliding fit on the objective portion, a cylindrical housing member mounted on the tubular member so as to define an annular cavity therebetween, and means for supplying gas to said cavity, in which the housing member has an opening into which the tubular member protrudes so as to define an orifice, the orifice being concentric with an objective lens of the microscope when the apparatus is fitted thereto, and in which the orifice is so dimensioned as to produce a gas stream creating a region of sufficient energy density to deform that portion of the mask disposed between the microscope objective and the process wafer into local soft contact with the semiconductor process wafer.
Claim 2
Independent Claim
158 words
An apparatus for facilitating alignment of a flexible mask with a semiconductor process wafer and adapted to be mounted on a cylindrical objective portion of a split field microscope, the apparatus comprising a tubular member of a diameter such that the member is a sliding fit on the objective portion, a cylindrical housing member mounted on the tubular member so as to define an annular cavity therebetween, and means for supplying gas to said cavity, in which the housing member has an opening into which the tubular member protrudes so as to define an orifice, the orifice being concentric with an objective lens of the microscope when the apparatus is fitted thereto, and in which the orifice is so dimensioned as to produce a gas stream creating a region of sufficient energy density to deform that portion of the mask disposed between the microscope objective and the process wafer into local soft contact with the semiconductor process wafer.
Claim 3
Dependent Claim
24 words
An apparatus as claimed in claim 1, in which said region of sufficient energy density is produced beneath the center of the objective lens.
Claim 4
Dependent Claim
28 words
An apparatus as claimed in claim 1, and in which the objective lens is so arranged that the gas flows radially inwardly following part of the lens surface.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1985-02-15 | 1985-08-17 | 1986-02-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1989-02-15 | 1989-08-17 | 1990-02-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1993-02-15 | 1993-08-17 | 1994-02-16 | $7700.00 | Window Closed / Lapsed |