Specimen adjustment method and system for a corpuscular beam apparatus

Claim 1

A method for adjusting a specimen supported by a specimen support of a corpuscular beam apparatus, such as an electronmicroscope, in relation to the axis of the beam of said apparatus, comprising the sequential steps of: coupling said specimen support to a specimen table having at least one angular adjustment axis; making a first adjustment of said specimen table in two coordinate directions in a plane normal to said beam axis so that a selected portion of said specimen intersects said beam axis; releasing said specimen support from said table and coupling said specimen support to a support member which remains substantially in a fixed position in relation to said axis of said beam as determined by said first adjustment, as long as said specimen support is coupled to said support member; making a second adjustment of said specimen table to align said angular adjustment axis with said beam axis; and returning said specimen support, which has been maintained by said support member in the position selected by said first adjustment, to said specimen table, whereby said specimen may be rotationally adjusted while maintaining said selected portion on said beam axis.

Claim 2

A method for adjusting a specimen supported by a specimen support of a corpuscular beam apparatus, such as an electronmicroscope, in relation to the axis of the beam of said apparatus, comprising the sequential steps of: coupling said specimen support to a specimen table having at least one angular adjustment axis; making a first adjustment of said specimen table in two coordinate directions in a plane normal to said beam axis so that a selected portion of said specimen intersects said beam axis; releasing said specimen support from said table and coupling said specimen support to a support member which remains substantially in a fixed position in relation to said axis of said beam as determined by said first adjustment, as long as said specimen support is coupled to said support member; making a second adjustment of said specimen table to align said angular adjustment axis with said beam axis; and returning said specimen support, which has been maintained by said support member in the position selected by said first adjustment, to said specimen table, whereby said specimen may be rotationally adjusted while maintaining said selected portion on said beam axis.

Claim 5

A system for adjustment of a specimen in relation to a longitudinal beam axis in a corpuscular beam apparatus comprising: a specimen table having means for adjustment in two directions normal with respect to said beam axis and having at least one angular adjustment axis; a specimen support; and a coupling system for selectively coupling said specimen support alternatively to said specimen table and a support member (32) which member, but for some degrees of freedom of motion as needed during coupling and decoupling operations, is generally stationary when in operation for receiving or delivering said specimen support, said coupling system coupling said specimen support to said specimen table during a first adjustment of said table, whereby a selected position of said specimen intersects said beam axis, decoupling said specimen support from said table and coupling said specimen support to said support member during a second adjustment of said table to align said angular adjustment axis with said beam axis, and recoupling said specimen support to said table after said second adjustment, whereby said specimen may be rotationally adjusted while maintaining said selected portion on said beam axis.

Claim 6

A system for adjustment of a specimen in relation to a longitudinal beam axis in a corpuscular beam apparatus comprising: a specimen table having means for adjustment in two directions normal with respect to said beam axis and having at least one angular adjustment axis; a specimen support; and a coupling system for selectively coupling said specimen support alternatively to said specimen table and a support member (32) which member, but for some degrees of freedom of motion as needed during coupling and decoupling operations, is generally stationary when in operation for receiving or delivering said specimen support, said coupling system coupling said specimen support to said specimen table during a first adjustment of said table, whereby a selected position of said specimen intersects said beam axis, decoupling said specimen support from said table and coupling said specimen support to said support member during a second adjustment of said table to align said angular adjustment axis with said beam axis, and recoupling said specimen support to said table after said second adjustment, whereby said specimen may be rotationally adjusted while maintaining said selected portion on said beam axis.

Claim 10

A system for adjustment of a specimen in relation to the beam axis in a corpuscular beam apparatus, comprising a specimen table having means for adjustment in two directions normal to said beam axis and having at least one angular adjustment axis, a specimen cartridge adapted for insertion into said table from above through an airlock, a specimen support, and a device for turning said specimen through certain angles around each of two axes which are generally normal to each other, wherein a clutch plate (32') is provided which is supported so that it may be turned from below and contacted against the specimen support (18') of said specimen cartridge (80) and wherein a coupling is provided for selectively coupling said specimen support with said specimen cartridge and said clutch plate (32), said coupling system coupling said specimen support to said specimen cartridge during a first adjustment of said table whereby a selected portion of said specimen intersects said beam axis, said coupling system decoupling said specimen support and said cartridge and coupling said specimen support to said clutch plate during a second adjustment of said table to align said angular adjustment axis with said beam axis, and recoupling said specimen support to said cartridge after said second adjustment, whereby said specimen may be rotationally adjusted while maintaining said selected portion on said beam axis.

Claim 11

A system for adjustment of a specimen in relation to the beam axis in a corpuscular beam apparatus, comprising a specimen table having means for adjustment in two directions normal to said beam axis and having at least one angular adjustment axis, a specimen cartridge adapted for insertion into said table from above through an airlock, a specimen support, and a device for turning said specimen through certain angles around each of two axes which are generally normal to each other, wherein a clutch plate (32') is provided which is supported so that it may be turned from below and contacted against the specimen support (18') of said specimen cartridge (80) and wherein a coupling is provided for selectively coupling said specimen support with said specimen cartridge and said clutch plate (32), said coupling system coupling said specimen support to said specimen cartridge during a first adjustment of said table whereby a selected portion of said specimen intersects said beam axis, said coupling system decoupling said specimen support and said cartridge and coupling said specimen support to said clutch plate during a second adjustment of said table to align said angular adjustment axis with said beam axis, and recoupling said specimen support to said cartridge after said second adjustment, whereby said specimen may be rotationally adjusted while maintaining said selected portion on said beam axis.

Claim 12

A system for adjustment of a specimen in relation to the beam axis in a corpuscular beam apparatus, comprising a specimen table adjustable in two directions normal with respect to each other and said beam axis and having at least one angular adjustment axis, a specimen cartridge adapted for insertion into the table through an airlock and including means for turning the specimen, wherein said specimen cartridge (80) has a generally tube-like catridge body (92) and is provided at its lower end with a specimen support base (108), and means for rotating said body around a single axis (106) which is essentially normal to the axis of said cartridge body, said specimen cartridge (80) further comprising means (83 and 84) for rotating said cartridge body around its axis and an axis generally parallel to said beam axis; and a coupling system (30') which includes a clutch plate (32') supported so that it may be turned to come up against the lower end of said cartridge (80) and means for selectively coupling a specimen support (18') with said clutch (32') and said specimen support base, said coupling system coupling said specimen support to said cartridge during a first adjustment of said table whereby a selected portion of said specimen intersects said beam axis, said coupling system decoupling said specimen support and said cartridge and coupling said specimen support and said clutch during a second adjustment of said table to align said angular adjustment axis with said beam axis, and recoupling said specimen support to said cartridge after said second adjustment, whereby said specimen may be rotationally adjusted while maintaining said selected portion on said beam axis.

Claim 13

A system for adjustment of a specimen in relation to the beam axis in a corpuscular beam apparatus, comprising a specimen table adjustable in two directions normal with respect to each other and said beam axis and having at least one angular adjustment axis, a specimen cartridge adapted for insertion into the table through an airlock and including means for turning the specimen, wherein said specimen cartridge (80) has a generally tube-like catridge body (92) and is provided at its lower end with a specimen support base (108), and means for rotating said body around a single axis (106) which is essentially normal to the axis of said cartridge body, said specimen cartridge (80) further comprising means (83 and 84) for rotating said cartridge body around its axis and an axis generally parallel to said beam axis; and a coupling system (30') which includes a clutch plate (32') supported so that it may be turned to come up against the lower end of said cartridge (80) and means for selectively coupling a specimen support (18') with said clutch (32') and said specimen support base, said coupling system coupling said specimen support to said cartridge during a first adjustment of said table whereby a selected portion of said specimen intersects said beam axis, said coupling system decoupling said specimen support and said cartridge and coupling said specimen support and said clutch during a second adjustment of said table to align said angular adjustment axis with said beam axis, and recoupling said specimen support to said cartridge after said second adjustment, whereby said specimen may be rotationally adjusted while maintaining said selected portion on said beam axis.