US3952203A Expired / Lapsed US ⏱️ 0.0 years remaining

Object adjustment device for a charged particle beam apparatus

Assignee: Max-Planck-Gesellschaft zur Förderung der Wissenschaften eV

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Filing: 1974-11-07

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Granted: 1976-04-20

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Expires: 1994-11-07

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Abstract

Abstract Object positioning apparatus for positioning the object to be observed in aorpuscular beam apparatus such as an electron microscope or the like having both lateral or rotational degrees of freedom in which means are provided to mechanically separate the lateral motion and rotational or tilting motion of the object whereby a point on the object can be laterally positioned on the rotational axis and after separation from the lateral moving means may then be rotated or tilted without wandering out of the field of view of the microscope.

Inventors

👤 Walter Hoppe

Bibliographic Details

Application Number —

Jurisdiction US

Data Source google_patents

Last Synchronized 2026-10-29 04:14

CPC Classifications

H; H01; H01J; H01J37/00; H01J37/02; H01J37/20; B; B82; B82Y; B82Y15/00

Claims Analysis

Total Claims: 15

Claim 1

Independent Claim 170 words

In a charged particle beam inspection apparatus, the improvement comprising: a fixed support in an evacuated chamber; a linearly movable object stage, disposed on said support, and intersected by a first axis which is coincident with the particle beam of the apparatus at the point of its intersection with said object stage; first means for linearly moving said object stage on said support; an object carrier for receiving a specimen; second means coupled to said said object stage for detachably coupling said object carrier to said object stage and releasing said carrier therefrom; and third means, coupled to said support and disposed below said object stage, for receiving said object carrier from said object stage and supporting said carrier therebelow, said third means being rotatable about a second axis which is not coincident with said first axis, and being mechanically independent of and separate from said object stage and said means for linearly moving said object stage, so that said object carrier is rotatable meachanically independently of said object stage.

Claim 2

Dependent Claim 170 words

Claim 3

Dependent Claim 17 words

The apparatus recited in claim 1, wherein said second axis is disposed perpendicular to said first axis.

Claim 4

Dependent Claim 41 words

The apparatus recited in claim 2, wherein said third means comprises an elongated rod mounted in said support so as to be rotatable about said second axis and having a recess disposed therein below said object stage of receiving said carrier.

Claim 5

Dependent Claim 38 words

The apparatus recited in claim 2, further comprising an object cartridge mounted in said object stage and means, coupled to said object cartridge, for rotating said cartridge about a third axis which is parallel to said first axis.

Claim 6

Dependent Claim 30 words

The apparatus recited in claim 2, further comprising means, coupled to said third means, for rotating said object carrier about a fourth axis which is perpendicular to said second axis.

Claim 7

Dependent Claim 51 words

The apparatus recited in claim 1, wherein said second axis is disposed at an angle of between approximately 0° to 90° with respect to said first axis, and wherein said means for linearly moving said object stage moves said stage in a plane which is disposed perpendicular to said second axis.

Claim 8

Dependent Claim 33 words

The apparatus recited in claim 1, wherein said second means comprises a plurality of moveable grippers disposed about the periphery of said object stage for removably coupling said object carrier to said stage.

Claim 9

Dependent Claim 23 words

The apparatus recited in claim 3, wherein said rod further comprises a sleeve moveably secured in said recess for receiving said object carrier.

Claim 10

Dependent Claim 21 words

The apparatus recited in claim 8, wherein said rod further comprises spring means for moveably securing said sleeve in said recess.

Claim 11

Dependent Claim 45 words

The apparatus recited in claim 3, wherein said object carrier comprises two separate parts moveably coupled to each other and each slidable with respect to the other, one of said parts being disposable in said recess and the other of said parts containing the object.

Claim 12

Dependent Claim 16 words

The apparatus recited in claim 10, wherein said object carrier parts are moveably coupled by adhesion.

Claim 13

Dependent Claim 17 words

The apparatus recited in claim 10, wherein said object carrier parts are moveably coupled by spring means.

Claim 14

Dependent Claim 18 words

The apparatus recited in claim 3, wherein said recess includes adhesive means for securing said object carrier therein.

Claim 15

Dependent Claim 37 words

The apparatus as recited in claim 6, wherein said third means comprises a rotatable disc rotatably mounted in the apparatus, and drive means, coupled to said disc and operable externally of the apparatus, for rotating said disc.

References Cited (Backward Citations)

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US3240934A Cited

US3444367A Cited

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USPTO Annuity & Maintenance Windows

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	1979-04-20	1979-10-20	1980-04-20	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	1983-04-20	1983-10-20	1984-04-20	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	1987-04-20	1987-10-20	1988-04-20	$7700.00	Window Closed / Lapsed

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