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US4285007A
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US
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Color solid-state imager and method of making the same
Assignee: Hitachi Ltd
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Filing: 1980-02-20
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Granted: 1981-08-18
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Expires: 2000-02-20
Abstract
Abstract A color solid-state imager comprises a semiconductor body over which are successively laminated a predetermined number of filter layers of any desired shape having predetermined spectral characteristics and, laminated on the filter layers, a predetermined number of layers composed of a transparent, organic high molecular material which is sensitive to radiation, the semiconductor substrate having at least a detector portion composed of an array of a plurality of optical detector elements. The method of making color solid-state imagers can be simplified by at least using the radiation-sensitive high molecular material for the intermediate layers or protection layers which are used for forming a laminate construction of color-decomposing filters. Further, in mounting the color-decomposing filters on the semiconductor substrate, it is particularly preferred to form beforehand a film of an organic high molecular material.
Inventors
- 👤 Toshio Nakano
- 👤 Tadao Kaneko
- 👤 Michiaki Hashimoto
- 👤 Yoshio Hatano
- 👤 Haruo Matsumaru
- 👤 Akira Sasano
- 👤 Eiichi Maruyama
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 11:06
CPC Classifications
H; H10; H10F; H10F39/00; H10F39/10; H10F39/12; H10F39/18; H10F39/182; H10F39/80; H10F39/803; H10F39/805; H10F39/8053
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
39 words
A color solid-state imager in which color-decomposing filters are formed, via layers of an organic, high molecular material, over a semiconductor body having at least a light detector portion in which are arrayed a plurality of light detector elements.
Claim 2
Dependent Claim
39 words
A color solid-state imager in which color-decomposing filters are formed, via layers of an organic, high molecular material, over a semiconductor body having at least a light detector portion in which are arrayed a plurality of light detector elements.
Claim 3
Dependent Claim
20 words
A color solid-state imager according to claim 1, wherein said organic, high molecular material is composed of a radiation-sensitive material.
Claim 4
Dependent Claim
41 words
A color solid-state imager according to claim 1 or 2, wherein said color-decomposing filters comprise filter layers having predetermined shapes and predetermined spectral characteristics, and layers of a transparent radiation-sensitive organic, high molecular material, which are successively laminated in required numbers.
Claim 5
Independent Claim
158 words
A method of making color solid-state imagers comprising: a step for forming a color-decomposing filter layer having a predetermined shape and predetermined spectral characteristics over a semiconductor body which has at least a light detector portion in which a plurality of light detector elements are arrayed; a step for forming a layer of a transparent radiation-sensitive organic high molecular material; a step for forming a color-decomposing filter layer having a predetermined shape and predetermined spectral characteristics; and a step for forming a layer of a transparent radiation-sensitive organic high molecular material; the above-mentioned steps being repetitively carried out to successively form filter layers of desired shapes which have been dyed, and the uppermost layer being made of a transparent radiation-sensitive organic high molecular material, said method of making color solid-state imagers further comprising: a step for irradiating predetermined portions of said laminated filter layers with a predetermined radiant ray; and a step for processing said laminated filter layers.
Claim 6
Independent Claim
158 words
A method of making color solid-state imagers comprising: a step for forming a color-decomposing filter layer having a predetermined shape and predetermined spectral characteristics over a semiconductor body which has at least a light detector portion in which a plurality of light detector elements are arrayed; a step for forming a layer of a transparent radiation-sensitive organic high molecular material; a step for forming a color-decomposing filter layer having a predetermined shape and predetermined spectral characteristics; and a step for forming a layer of a transparent radiation-sensitive organic high molecular material; the above-mentioned steps being repetitively carried out to successively form filter layers of desired shapes which have been dyed, and the uppermost layer being made of a transparent radiation-sensitive organic high molecular material, said method of making color solid-state imagers further comprising: a step for irradiating predetermined portions of said laminated filter layers with a predetermined radiant ray; and a step for processing said laminated filter layers.
Claim 7
Dependent Claim
23 words
A method of making color solid-state imagers according to claim 4, wherein said radiation-sensitive organic high molecular material is a positive-working photosensitive material.
Claim 8
Dependent Claim
46 words
A method for making color solid-state imagers according to claim 4 or 5, wherein said radiation-sensitive organic high molecular material is a thermosetting material, and the layer of said radiation-sensitive organic high molecular material is formed by applying a solution of said material followed by heating.
Claim 9
Dependent Claim
46 words
A method of making color solid-state imagers according to claim 4, 5 or 6, wherein said filter members is a negative-working radiation-sensitive organic high molecular material, and said transparent radiation-sensitive organic high molecular material formed on the layer of said filter member has positive-working photosensitive characteristics.
Claim 10
Dependent Claim
54 words
A method of making color solid-state imagers according to claim 4, 5, 6 or 7, wherein in forming a layer of the filter member on said semiconductor substrate, a layer of a radiation-sensitive organic high molecular material is formed beforehand on said semiconductor substrate, and a layer of the filter member is formed thereon.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1984-08-17 | 1985-02-16 | 1985-08-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1988-08-17 | 1989-02-16 | 1989-08-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1992-08-17 | 1993-02-16 | 1993-08-18 | $7700.00 | Window Closed / Lapsed |