Process for forming semiconductor devices using electron-sensitive resist patterns with controlled line profiles

Claim 2

A process for forming a conductive electrode of variable cross-section area which comprises the steps of: (a) providing a three layer mask on a substrate with the first or inner layer and third or outer layer being of a chosen electron-sensitive resist material and separated by an intermediate etch resistant conductive layer; (b) defining predetermined patterns in said first layer and said third layer of resist simultaneously by electron bombardment which penetrates said conductive layer; (c) forming a first opening in said third layer while shielding said first layer with said conductive layer, said first opening having a first chosen width; (d) successively removing portions of said intermediate and first layers to thereby produce second and third openings therein, said second opening in said intermediate layer having a second chosen width substantially equal to said first width of said first opening and said third opening in said first layer having a third chosen width smaller than said first and second widths; and (e) depositing a chosen metal in said openings formed in (c) and (d) above to thereby form said electrode of variable cross-section area, and with variable width essential replicating said widths of said first, second, and third openings.

Claim 3

A process for defining a predetermined region on and above a substrate by using a resist pattern having a controlled line profile comprising the steps of: (a) providing said substrate; (b) forming on said substrate a composite electron beam-sensitive resist comprising a bottom layer of said resist, a middle layer of a chosen conductive material, and a top layer of said resist to create a resist/conductor/resist composite; (c) exposing said substrate with said resist/conductor/resist composite formed thereon to a beam of electrons so as to define a predetermined pattern in both of said resist layers, said beam having sufficient energy to expose said bottom and top layers of said resist; (d) developing said pattern in said top layer of said resist by exposure to a first chosen solvent for a first predetermined period of time whereby said relatively thin layer of said conductive material protects said bottom layer of said resist from exposure to said first chosen solvent; (e) removing the portion of said conductive layer which is exposed after said developing of said top layer of said resist; and (f) developing said pattern in said bottom layer of said resist by exposure to a second chosen solvent for a second predetermined period of time to thereby form a T-shaped profile in said resist/conductor/resist composite, which defines said region on and above said substrate.

Claim 4

A process for defining a predetermined region on and above a substrate by using a resist pattern having a controlled line profile comprising the steps of: (a) providing said substrate; (b) forming on said substrate a composite electron beam-sensitive resist comprising a bottom layer of said resist, a middle layer of a chosen conductive material, and a top layer of said resist to create a resist/conductor/resist composite; (c) exposing said substrate with said resist/conductor/resist composite formed thereon to a beam of electrons so as to define a predetermined pattern in both of said resist layers, said beam having sufficient energy to expose said bottom and top layers of said resist; (d) developing said pattern in said top layer of said resist by exposure to a first chosen solvent for a first predetermined period of time whereby said relatively thin layer of said conductive material protects said bottom layer of said resist from exposure to said first chosen solvent; (e) removing the portion of said conductive layer which is exposed after said developing of said top layer of said resist; and (f) developing said pattern in said bottom layer of said resist by exposure to a second chosen solvent for a second predetermined period of time to thereby form a T-shaped profile in said resist/conductor/resist composite, which defines said region on and above said substrate.

Claim 5

A process as set forth in claim 2 wherein said forming of said composite resist further comprises: (a) depositing a bottom layer of an electron beam-sensitive resist material on the surface of said substrate; (b) depositing a relatively thin layer of a chosen conductive material on said bottom layer of said resist; and (c) depositing a top layer of said resist on said conductive layer to form said resist/conductor/resist composite on said substrate.

Claim 6

A process as set forth in claim 3 wherein: (a) said resist material is polymethylmethacrylate; (b) said bottom layer of said resist is deposited to a thickness of 3000 A; (c) said chosen conductive material is germanium and is deposited to a thickness of 300 A; and (d) said top layer of said resist is deposited to a thickness of 5000 A.

Claim 7

A process for depositing a metal pattern having a controlled profile on a substrate comprising the steps of: (a) providing said substrate; (b) forming on said substrate a composite electron beam-sensitive resist comprising a bottom layer of said resist, a middle layer of a chosen conductive material, and a top layer of said resist to create a resist/conductor/resist composite; (c) exposing said substrate with said resist/conductor/resist composite formed thereon to a beam of electrons so as to define a predetermined pattern in both of said resist layers, said beam having sufficient energy to expose said bottom and top layers of said resist; (d) developing said pattern in said top layer of said resist by exposure to a first chosen solvent for a first predetermined period of time whereby said relatively thin layer of said conductive material protects said bottom layer of said resist from exposure to said first chosen solvent; (e) removing the portion of said conductive layer which is exposed after said developing of said top layer of said resist; (f) developing said pattern in said bottom layer of said resist by exposure to a second chosen solvent for a second predetermined period of time to thereby form a T-shaped profile in said resist/conductor/resist composite, which defines said controlled profile on and above said substrate; (g) depositing a chosen metal on said patterned resist/conductor/resist composite having said T-shaped profile and into contact with the region of said substrate defined by said controlled profile; and (h) removing said resist/conductor/resist/ composite from the surface of said substrate, to thereby remove the portion of said metal which overlies said top layer of said resist and to leave said metal pattern having said controlled profile on said substrate.

Claim 8

A process for depositing a metal pattern having a controlled profile on a substrate comprising the steps of: (a) providing said substrate; (b) forming on said substrate a composite electron beam-sensitive resist comprising a bottom layer of said resist, a middle layer of a chosen conductive material, and a top layer of said resist to create a resist/conductor/resist composite; (c) exposing said substrate with said resist/conductor/resist composite formed thereon to a beam of electrons so as to define a predetermined pattern in both of said resist layers, said beam having sufficient energy to expose said bottom and top layers of said resist; (d) developing said pattern in said top layer of said resist by exposure to a first chosen solvent for a first predetermined period of time whereby said relatively thin layer of said conductive material protects said bottom layer of said resist from exposure to said first chosen solvent; (e) removing the portion of said conductive layer which is exposed after said developing of said top layer of said resist; (f) developing said pattern in said bottom layer of said resist by exposure to a second chosen solvent for a second predetermined period of time to thereby form a T-shaped profile in said resist/conductor/resist composite, which defines said controlled profile on and above said substrate; (g) depositing a chosen metal on said patterned resist/conductor/resist composite having said T-shaped profile and into contact with the region of said substrate defined by said controlled profile; and (h) removing said resist/conductor/resist/ composite from the surface of said substrate, to thereby remove the portion of said metal which overlies said top layer of said resist and to leave said metal pattern having said controlled profile on said substrate.

Claim 9

A process for defining a non-symmetrical T-shaped region on and above a substrate by using a resist pattern having a controlled line profile comprising the steps of: (a) providing said substrate; (b) forming on said substrate a composite electron beam-sensitive resist comprising a bottom layer of said resist, a middle layer of a chosen conductive material, and a top layer of said resist to create a resist/conductor/resist composite; (c) exposing said substrate with said resist/conductor/resist composite formed thereon to a primary beam of electrons so as to define a predetermined pattern in both of said resist layers, said beam having sufficient energy to expose said bottom and top layers of said resist; (d) after (c), exposing said substrate with said resist/conductor/resist composite formed thereon to a secondary beam of electrons in a position adjacent to the position of exposure by said primary beam of electrons, said secondary beam exposing only said top layer of said resist; (e) developing said pattern in said top layer of said resist by exposure to a first chosen solvent for a first predetermined period of time whereby said relatively thin layer of said conductive material protects said bottom layer of said resist from exposure to said first chosen solvent; (f) removing the portion of said conductive layer which is exposed after said developing of said top layer of said resist; and (g) developing said pattern in said bottom layer of said resist by exposure to a second chosen solvent for a second predetermined period of time to thereby form a non-symmetrical T-shaped profile in said resist/conductor/resist composite, which defines said non-symmetrical T-shaped region on and above said substrate.

Claim 10

A process for defining a non-symmetrical T-shaped region on and above a substrate by using a resist pattern having a controlled line profile comprising the steps of: (a) providing said substrate; (b) forming on said substrate a composite electron beam-sensitive resist comprising a bottom layer of said resist, a middle layer of a chosen conductive material, and a top layer of said resist to create a resist/conductor/resist composite; (c) exposing said substrate with said resist/conductor/resist composite formed thereon to a primary beam of electrons so as to define a predetermined pattern in both of said resist layers, said beam having sufficient energy to expose said bottom and top layers of said resist; (d) after (c), exposing said substrate with said resist/conductor/resist composite formed thereon to a secondary beam of electrons in a position adjacent to the position of exposure by said primary beam of electrons, said secondary beam exposing only said top layer of said resist; (e) developing said pattern in said top layer of said resist by exposure to a first chosen solvent for a first predetermined period of time whereby said relatively thin layer of said conductive material protects said bottom layer of said resist from exposure to said first chosen solvent; (f) removing the portion of said conductive layer which is exposed after said developing of said top layer of said resist; and (g) developing said pattern in said bottom layer of said resist by exposure to a second chosen solvent for a second predetermined period of time to thereby form a non-symmetrical T-shaped profile in said resist/conductor/resist composite, which defines said non-symmetrical T-shaped region on and above said substrate.

Claim 11

A processs for depositing a metal pattern having a non-symmetrical T-shaped profile on a substrate comprising the steps of: (a) defining a non-symmetrical T-shaped region on and above said substrate by the process set forth in claim 6; (b) depositing a chosen metal on said resist/conductor/resist composite having said non-symmetrical T-shaped profile formed therein, and into contact with the region of said substrate defined by said profile; and (c) removing said resist/conductor/resist composite from the surface of said substrate, to thereby remove the portion of said metal which overlies said top layer of said resist and to leave said metal pattern having said non-symmetrical T-shaped profile on said substrate.