US4263336A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Reduced pressure induction heated reactor and method
Assignee: Motorola Solutions Inc
•
Filing: 1979-11-23
•
Granted: 1981-04-21
•
Expires: 1999-11-23
Abstract
Abstract A reduced pressure induction heated reactor and method for the deposition, especially epitaxial deposition, onto workpieces placed in the reactor. The workpieces are positioned within a hollow susceptor which is, in turn, positioned within a reactor tube. The ends of the reactor tube are sealed by end caps which provide for input and exhaust of reactant species. The workpieces are inductively heated by an RF induction coil which surrounds the reactor tube and which inductively couples with the susceptor. A vacuum pump maintains a low pressure within the reactor tube. Low pressure deposition is made possible without arcing by shorting together the susceptor and end caps and by having the shorted together combination electrically floating.
Inventors
- 👤 Stephen W. Thompson
- 👤 Harry G. Smith
- 👤 Richard S. Rosler
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 22:20
CPC Classifications
C; C30; C30B; C30B25/00; C30B25/02; C30B25/10; C23; C23C; C23C16/00; C23C16/44; C23C16/46
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
101 words
A reduced pressure induction heated reactor for depositing material on workpieces in the reactor which comprises: first means defining a reaction volume, said first means surrounded by an induction coil capable of being energized by an RF energy source and said first means having an opening therein; second hollow means positioned within said first means for receiving the workpieces; third means positioned to seal said opening in said first means; shorting means electrically connecting said second means and said third means, said second means, third means and shorting means insulatively supported and electrically isolated from direct contact to external electrical potential.
Claim 2
Dependent Claim
101 words
A reduced pressure induction heated reactor for depositing material on workpieces in the reactor which comprises: first means defining a reaction volume, said first means surrounded by an induction coil capable of being energized by an RF energy source and said first means having an opening therein; second hollow means positioned within said first means for receiving the workpieces; third means positioned to seal said opening in said first means; shorting means electrically connecting said second means and said third means, said second means, third means and shorting means insulatively supported and electrically isolated from direct contact to external electrical potential.
Claim 3
Dependent Claim
16 words
The reactor of claim 1 further comprising fourth means for entry and exit of reactant species.
Claim 4
Dependent Claim
17 words
The reactor of claim 2 wherein said fourth means includes feedthroughs positioned in proximity to said workpieces.
Claim 5
Dependent Claim
14 words
The reactor of claim 1 wherein said first means comprises a quartz reactor tube.
Claim 6
Dependent Claim
15 words
The reactor of claim 1 wherein said second hollow means comprises a cylindrical graphite susceptor.
Claim 7
Dependent Claim
101 words
A reduced pressure induction heated reactor for depositing material on workpieces in the reactor, which comprises: a tube which defines a reaction volume; an induction coil surrounding said tube capable of being energized by RF energy from an RF generator; a hollow susceptor positioned within said tube within which the workpieces can be placed; electrically conductive end caps closing the ends of said tube; electrically insulated means for entry and exit of reactant species within said end caps; and shorting means electrically connecting said susceptor and said electrically conductive end caps, said electrically conductive end caps and susceptor being electrically floating.
Claim 8
Dependent Claim
101 words
A reduced pressure induction heated reactor for depositing material on workpieces in the reactor, which comprises: a tube which defines a reaction volume; an induction coil surrounding said tube capable of being energized by RF energy from an RF generator; a hollow susceptor positioned within said tube within which the workpieces can be placed; electrically conductive end caps closing the ends of said tube; electrically insulated means for entry and exit of reactant species within said end caps; and shorting means electrically connecting said susceptor and said electrically conductive end caps, said electrically conductive end caps and susceptor being electrically floating.
Claim 9
Dependent Claim
14 words
The reactor of claim 6 wherein said electrically conductive end caps are stainless steel.
Claim 10
Dependent Claim
110 words
A process for the induction heated deposition of material onto workpieces positioned within a hollow susceptor within a reactor tube and surrounded by an RF induction coil which comprises the steps of: positioning a workpiece within said hollow susceptor; closing said reactor tube with electrically conductive end caps; electrically shorting said susceptor and said electrically conductive end caps; reducing the pressure within said reactor tube; introducing reactants into said reaction tube by electrically insulated means, said reactants comprising a source of material to be deposited; electrically floating said susceptor and said electrically conductive end caps; and heating said workpiece by energizing said RF induction coil to inductively heat said susceptor.
Claim 11
Dependent Claim
110 words
A process for the induction heated deposition of material onto workpieces positioned within a hollow susceptor within a reactor tube and surrounded by an RF induction coil which comprises the steps of: positioning a workpiece within said hollow susceptor; closing said reactor tube with electrically conductive end caps; electrically shorting said susceptor and said electrically conductive end caps; reducing the pressure within said reactor tube; introducing reactants into said reaction tube by electrically insulated means, said reactants comprising a source of material to be deposited; electrically floating said susceptor and said electrically conductive end caps; and heating said workpiece by energizing said RF induction coil to inductively heat said susceptor.
Claim 12
Dependent Claim
14 words
The process of claim 8 wherein said workpiece comprises a plurality of silicon wafers.
Claim 13
Dependent Claim
43 words
The process of claim 9 wherein said wafers each have two substantially flat surfaces and said wafers are positioned in a holder to place said flat surface of a first wafer in a face-to-face relationship with said flat surface of a second wafer.
Claim 14
Dependent Claim
13 words
The process of claim 8 wherein said reactants comprise silicon tetrachloride and hydrogen.
Claim 15
Dependent Claim
12 words
The process of claim 8 wherein said reactants comprise dichlorosilane and hydrogen.
Claim 16
Dependent Claim
18 words
The process of claim 8 wherein said pressure is reduced to less than about 10 torr (1.3 kPa).
Claim 17
Dependent Claim
16 words
The process of claim 13 wherein said pressure is reduced to about 1-2 torr (0.12-0.26 kPa).
Claim 18
Independent Claim
62 words
A method for suppressing glow discharge arcs within a reduced pressure reactor wherein the reactor includes a reactor tube closed at the ends by electrically conductive end caps and an inductively heated susceptor positioned within the tube, the method comprising the steps of: shorting together the electrically conductive end caps and susceptor and electrically floating the shorted together end caps and susceptor.
Claim 19
Independent Claim
62 words
A method for suppressing glow discharge arcs within a reduced pressure reactor wherein the reactor includes a reactor tube closed at the ends by electrically conductive end caps and an inductively heated susceptor positioned within the tube, the method comprising the steps of: shorting together the electrically conductive end caps and susceptor and electrically floating the shorted together end caps and susceptor.
Claim 20
Dependent Claim
92 words
In a reduced pressure induction heated reactor for depositing material on workpieces having a tube which defines a reaction volume surrounded by an induction coil capable of being energized by RF energy from an RF generator, a hollow susceptor positioned within said tube within which the workpiece can be placed, the improvement comprising: electrically conductive end caps for closing said tube; shorting means electrically connecting said susceptor and said electrically conductive end caps, said susceptor and electrically conductive end caps being electrically floating; insulating means for entry and exit of reactant species.
Claim 21
Dependent Claim
92 words
In a reduced pressure induction heated reactor for depositing material on workpieces having a tube which defines a reaction volume surrounded by an induction coil capable of being energized by RF energy from an RF generator, a hollow susceptor positioned within said tube within which the workpiece can be placed, the improvement comprising: electrically conductive end caps for closing said tube; shorting means electrically connecting said susceptor and said electrically conductive end caps, said susceptor and electrically conductive end caps being electrically floating; insulating means for entry and exit of reactant species.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1984-04-20 | 1984-10-20 | 1985-04-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1988-04-20 | 1988-10-20 | 1989-04-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1992-04-20 | 1992-10-20 | 1993-04-21 | $7700.00 | Window Closed / Lapsed |