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Lattice constant grading in the Aly Ca1-y As1-x Sbx alloy system

Assignee: Varian Medical Systems Inc
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Filing: 1979-07-23
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Granted: 1981-01-20
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Expires: 1999-07-23
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Abstract

Abstract Liquid phase epitaxy is employed to grow a lattice matched layer of GaAsSb on GaAs substrates through the compositional intermediary of the III-V alloy system AlGaAsSb which acts as a grading layer. The Al constituent reaches a peak atomic concentration of about 6% within the first 2.5μm of the transition layer, then decreases smoothly to about 1% to obtain a lattice constant of 5.74 A. In the same interval the equilibrium concentration of Sb smoothly increases from 0 to about 9 atomic percent to form a surface on which a GaAsSb layer having the desired energy bandgap of 1.1 ev for one junction of an optimized dual junction photovoltaic device. The liquid phase epitaxy is accomplished with a step cooling procedure whereby dislocation defects are more uniformly distributed over the surface of the growing layer.

Inventors

  • 👤 Ronald L. Moon

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-02 16:06
CPC Classifications
H; H10; H10D; H10D62/00; H10D62/80; H10D62/82; H10D62/824; H10P; H10P14/00; H10P14/20; H10P14/26; H10P14/263; H10P14/265; H10P14/29; H10P14/2901; H10P14/2907; H10P14/2911; H10P14/32; H10P14/3202; H10P14/3214; H10P14/3221; H10P14/3222; H10P14/3242; H10P14/3244; H10P14/3254; H10P14/34; H10P14/3402; H10P14/3414; H10P14/3421; Y; Y10; Y10S; Y10S438/00; Y10S438/938

Claims Analysis

Total Claims: 4
Claim 1
Independent Claim 92 words
The method of lattice grading GaAsSb to GaAs by liquid phase epitaxy comprising the steps of forming a melt of Al, Ga, As, and Sb, the proportion of Sb to Ga being in the range greater than 0 to 4, the melt saturated with GaAs and the proportion of Al being in the range from 1 to 5×10 -3 atomic percent, heating said melt to the temperature of at least 830° C., contacting said GaAs with said melt, cooling the melt at a desired rate to a temperature lower than 770° C.
Claim 2
Independent Claim 92 words
The method of lattice grading GaAsSb to GaAs by liquid phase epitaxy comprising the steps of forming a melt of Al, Ga, As, and Sb, the proportion of Sb to Ga being in the range greater than 0 to 4, the melt saturated with GaAs and the proportion of Al being in the range from 1 to 5×10 -3 atomic percent, heating said melt to the temperature of at least 830° C., contacting said GaAs with said melt, cooling the melt at a desired rate to a temperature lower than 770° C.
Claim 3
Dependent Claim 26 words
The method of claim 1 wherein the step of cooling includes carrying out said cooling at a rate of less than approximately 0.5 C per minute.
Claim 4
Dependent Claim 49 words
The method of claim 2 wherein the step of cooling includes maintaining said rate for a desired temperature range and maintaining the melt at the lower temperature of said temperature range for a length of time sufficient for the distribution of dislocation defects over the surface of said layer.

References Cited (Backward Citations)

US3537029A Cited
US3560275A Cited
US3729348A Cited
US4032951A Cited
US4072544A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1984-01-20 1984-07-21 1985-01-20 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1988-01-20 1988-07-21 1989-01-20 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1992-01-20 1992-07-21 1993-01-20 $7700.00 Window Closed / Lapsed

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