US4240094A
Expired / Lapsed
US
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Laser-configured logic array
Assignee: Harris Corp
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Filing: 1978-03-20
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Granted: 1980-12-16
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Expires: 1998-03-20
Abstract
Abstract An LSI fabrication process employs pulsed laser energy to selectively tailor individual logic elements of which the building blocks of an LSI array may be configured and to selectively interconnect these laser-configured building blocks. On an LSI chip, an array of universal logic devices or building blocks may be formed together with a matrix pattern of intrablock pathways or signal channels through which the building blocks may be tested and selectively interconnected in order that a prescribed LSI configured system or subsystem may be formed. By selectively directing pulsed laser energy onto prescribed connection regions of the building blocks and onto selected regions of the intrablock pathways, thereby interconnecting and/or disconnecting portions of a conductor matrix pattern relative to the structural components of the various cells, there is obtained a prescribed LSI containing both laser-configured logic devices (building blocks) and laser-configured highways interconnecting the selectively tailored logic devices.
Inventors
- 👤 Jim M. Mader
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 04:55
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/40; H10W20/49; H10W20/491; H10W20/492; H10D; H10D84/00; H10D84/90; H10D84/903; H10D84/907; H10P; H10P34/00; H10P34/40; H10P34/42; H10W20/493; H10W20/494
Claims Analysis
Total Claims: 41
Claim 1
Independent Claim
180 words
A process for forming an integrated circuit comprising the steps of: (a) providing a semiconductor substrate which contains a plurality of logic cells from which the integrated circuit is to be formed, each logic cell containing a plurality of semiconductor elements together with intracell semiconductor and metallization connection paths to be selectively interconnected with one another to define a prescribed functional cell, and interconnection pathways by way of which prescribed ones of said logic cells may be connected together; (b) selectively directing electromagnetic energy at prescribed portions of selected ones of said logic cells so as to disconnect selected portions of said semiconductor connection paths and to interconnect selected portions of said metallization connection paths to selected semiconductor material of said cells, thereby changing the transfer function originally defined by said selected ones of said logic cells; and (c) selectively interconnecting logic cells among said plurality including said selected ones of said logic cells, to thereby produce an integrated circuit composed of a plurality of interconnected logic cells, the transfer functions of selected ones of which have been electromagnetically altered.
Claim 2
Dependent Claim
180 words
A process for forming an integrated circuit comprising the steps of: (a) providing a semiconductor substrate which contains a plurality of logic cells from which the integrated circuit is to be formed, each logic cell containing a plurality of semiconductor elements together with intracell semiconductor and metallization connection paths to be selectively interconnected with one another to define a prescribed functional cell, and interconnection pathways by way of which prescribed ones of said logic cells may be connected together; (b) selectively directing electromagnetic energy at prescribed portions of selected ones of said logic cells so as to disconnect selected portions of said semiconductor connection paths and to interconnect selected portions of said metallization connection paths to selected semiconductor material of said cells, thereby changing the transfer function originally defined by said selected ones of said logic cells; and (c) selectively interconnecting logic cells among said plurality including said selected ones of said logic cells, to thereby produce an integrated circuit composed of a plurality of interconnected logic cells, the transfer functions of selected ones of which have been electromagnetically altered.
Claim 3
Dependent Claim
54 words
A process according to claim 1, wherein at least some of said logic cells include a plurality of subcells interconnected together to form a respective logic cell, and wherein step (b) comprises the step of selectively directing said electromagnetic energy at prescribed subcells among those contained in said selected ones of said logic cells.
Claim 4
Dependent Claim
30 words
A process according to claim 1, wherein each of the subcells at which electromagnetic energy is to be selectively directed in step (b) is structurally identical prior to step (b).
Claim 5
Dependent Claim
13 words
A process according to claim 1, wherein said electromagnetic energy comprises optical energy.
Claim 6
Dependent Claim
18 words
A process according to claim 4, wherein said optical energy is in the form of pulsed optical energy.
Claim 7
Dependent Claim
39 words
A process according to claim 2, wherein step (b) comprises the step of selectively directing electromagnetic energy at preselected portions of said prescribed subcells, thereby causing the interconnection of circuit components of which said prescribed subcells have been formed.
Claim 8
Dependent Claim
39 words
A process according to claim 2, wherein step (b) comprises the step of selectively directing electromagnetic energy at preselected portions of said prescribed subcells, thereby causing the disconnection of circuit components of which said prescribed subcells have been formed.
Claim 9
Dependent Claim
68 words
A process according to claim 2, wherein step (b) comprises the steps of selectively directing electromagnetic energy at first preselected portions of said prescribed subcells, thereby causing the interconnection of circuit components of which said prescribed subcells have been formed, and selectively directing electromagnetic energy at second preselected portions of said prescribed subcells, thereby causing the disconnection of circuit components of which said prescribed subcells have been formed.
Claim 10
Dependent Claim
43 words
A process according to claim 2, wherein each of said subcells comprises: an input signal pathway, an output signal pathway, and an active circuit element having an input coupled to said input signal pathway and an output coupled to said output signal pathway.
Claim 11
Dependent Claim
44 words
A process according to claim 1, wherein step (b) comprises the step of selectively directing a pulsed laser beam at prescribed portions of selected ones of said logic cells, thereby changing the transfer function originally defined by said selected ones of said logic cells.
Claim 12
Dependent Claim
67 words
A process according to claim 1, wherein step (c) comprises the step of selectively directing electromagnetic energy at said interconnection pathways, thereby selectively interconnecting logic cells among said plurality of logic cells including said selected ones of said logic cells, to thereby produce an integrated circuit composed of a plurality of electromagnetically interconnected logic cells the transfer functions of selected ones of which have been electromagnetically altered.
Claim 13
Dependent Claim
28 words
A process according to claim 11, wherein the electromagnetic energy selectively directed in accordance with steps (b) and (c) is in the form of a pulsed laser beam.
Claim 14
Dependent Claim
66 words
A process according to claim 2, wherein step (c) comprises the step of selectively-directing electromagnetic energy at said interconnection pathways, thereby selectively interconnecting logic cells among said plurality of logic cells including said selected ones of said logic cells, to thereby produce an integrated circuit composed of a plurality of electromagnetically interconnected logic cells the transfer functions of selected ones of which have been electromagnetically altered.
Claim 15
Dependent Claim
28 words
A process according to claim 13, wherein the electromagnetic energy selectively directed in accordance with steps (b) and (c) is in the form of a pulsed laser beam.
Claim 16
Dependent Claim
68 words
A process according to claim 1, wherein step (c) comprises the step of selectively directing electromagnetic energy at said interconnection pathways, thereby selectively disconnecting logic cells among said plurality of logic cells, except for said selected ones of said logic cells, to thereby produce an integrated circuit composed of a plurality of electromagnetically interconnected logic cells the transfer functions of selected ones of which have been electromagnetically altered.
Claim 17
Dependent Claim
28 words
A process according to claim 15, wherein the electromagnetic energy selectively directed in accordance with steps (b) and (c) is in the form of a pulsed laser beam.
Claim 18
Dependent Claim
28 words
A process according to claim 1, wherein said semiconductor elements and said intracell semiconductor connection paths are formed of layers of semiconductor material disposed upon said semiconductor substrate.
Claim 19
Dependent Claim
165 words
A process for forming a logic circuit device comprising the steps of: (a) providing a semiconductor substrate which contains a plurality of logic elements from which a logic circuit device is to be formed, each logic element containing a plurality of semiconductor elements together with intraelement semiconductor and metallization connection paths to be selectively interconnected with one another to define a prescribed function logic element, and interconnection pathways by way of which said logic elements are connected together to thereby provide any one of a plurality of diverse logic operations; and (b) selectively directing electromagnetic energy at prescribed portions of selected ones of said logic elements so as to disconnect selected portions of said semiconductor connection paths and to interconnect selected portions of said metallization connection paths to selected semiconductor material of said logic elements, thereby changing the transfer function originally defined by said selected ones of said logic elements and causing said logic circuit device to provide one of said plurality of logic operations.
Claim 20
Dependent Claim
165 words
A process for forming a logic circuit device comprising the steps of: (a) providing a semiconductor substrate which contains a plurality of logic elements from which a logic circuit device is to be formed, each logic element containing a plurality of semiconductor elements together with intraelement semiconductor and metallization connection paths to be selectively interconnected with one another to define a prescribed function logic element, and interconnection pathways by way of which said logic elements are connected together to thereby provide any one of a plurality of diverse logic operations; and (b) selectively directing electromagnetic energy at prescribed portions of selected ones of said logic elements so as to disconnect selected portions of said semiconductor connection paths and to interconnect selected portions of said metallization connection paths to selected semiconductor material of said logic elements, thereby changing the transfer function originally defined by said selected ones of said logic elements and causing said logic circuit device to provide one of said plurality of logic operations.
Claim 21
Dependent Claim
31 words
A process according to claim 18, wherein each of the logic elements at which electromagnetic energy is to be selectively directed in step (b) is structurally identical prior to step (b).
Claim 22
Dependent Claim
13 words
A process according to claim 19, wherein said electromagnetic energy comprises optical energy.
Claim 23
Dependent Claim
19 words
A process according to claim 20, wherein said optical energy is in the form of a pulsed laser beam.
Claim 24
Dependent Claim
45 words
A process according to claim 18, wherein each of said selected logic elements comprises: an input signal pathway, an output signal pathway, and an active circuit element having an input coupled to said input signal pathway and an output coupled to said output signal pathway.
Claim 25
Dependent Claim
28 words
A process according to claim 18, wherein said semiconductor elements and said intracell semiconductor connection paths are formed of layers of semiconductor material disposed upon said semiconductor substrate.
Claim 26
Dependent Claim
142 words
An integrated circuit comprising: a semiconductor substrate which contains a plurality of logic cells from which the integrated circuit is formed, each logic cell containing a plurality of semiconductor elements together with intracell semiconductor and metallization connection paths, and interconnection pathways by way of which prescribed ones of said logic cells are connected together, prescribed portions of selected ones of said logic cells having been altered by the impingement of electromagnetic energy thereon with selected portions of said semiconductor connection paths having been disconnected and selected portions of said metallization connection paths having been interconnected to selected semiconductor material of said cells to define the transfer function of said selected ones of said logic cells, and selected ones of said interconnection pathways having been interconnected to thereby selectively interconnect logic cells among said plurality, including said selected ones of said logic cells.
Claim 27
Dependent Claim
142 words
An integrated circuit comprising: a semiconductor substrate which contains a plurality of logic cells from which the integrated circuit is formed, each logic cell containing a plurality of semiconductor elements together with intracell semiconductor and metallization connection paths, and interconnection pathways by way of which prescribed ones of said logic cells are connected together, prescribed portions of selected ones of said logic cells having been altered by the impingement of electromagnetic energy thereon with selected portions of said semiconductor connection paths having been disconnected and selected portions of said metallization connection paths having been interconnected to selected semiconductor material of said cells to define the transfer function of said selected ones of said logic cells, and selected ones of said interconnection pathways having been interconnected to thereby selectively interconnect logic cells among said plurality, including said selected ones of said logic cells.
Claim 28
Dependent Claim
53 words
An integrated circuit according to claim 24, wherein at least some of said logic cells include a plurality of subcells interconnected together to form a respective logic cell, and wherein prescribed subcells among those contained in said selected ones of said logic cells have been altered by the impingement of electromagnetic energy thereon.
Claim 29
Dependent Claim
14 words
An integrated circuit according to claim 24, wherein said electromagnetic energy comprises optical energy.
Claim 30
Dependent Claim
19 words
An integrated circuit according to claim 26, wherein said optical energy is in the form of pulsed optical energy.
Claim 31
Dependent Claim
34 words
An integrated circuit according to claim 25, wherein preselected portions of said prescribed subcells have been irradiated with electromagnetic energy to cause the interconnection of circuit components of which said prescribed subcells are formed.
Claim 32
Dependent Claim
34 words
An integrated circuit according to claim 25, wherein preselected portions of said prescribed subcells have been irradiated with electromagnetic energy to cause the disconnection of circuit components of which said prescribed subcells are formed.
Claim 33
Dependent Claim
63 words
An integrated circuit according to claim 25, wherein first preselected portions of said prescribed subcells have been irradiated with electromagnetic energy to cause the interconnection of circuit components of which said prescribed subcells are formed, and second preselected portions of said prescribed subcells have been irradiated with electromagnetic energy to cause the disconnection of circuit components of which said prescribed subcells are formed.
Claim 34
Dependent Claim
44 words
An integrated circuit according to claim 25, wherein each of said subcells comprises: an input signal pathway, an output signal pathway, and an active circuit element having an input coupled to said input signal pathway and an output coupled to said output signal pathway.
Claim 35
Dependent Claim
29 words
An integrated circuit according to claim 24, wherein said semiconductor elements and said intracell semiconductor connection paths are formed of layers of semiconductor material disposed upon said semiconductor substrate.
Claim 36
Dependent Claim
128 words
A logic circuit device comprising: a semiconductor substrate which contains a plurality of logic elements from which the logic circuit device is formed, each logic element containing a plurality of semiconductor elements together with intraelement semiconductor and metallization connection paths, and interconnection pathways by way of which said logic elements are connected together, and prescribed portions of selected ones of said logic elements having been altered by the impingement of electromagnetic energy thereon with selected portions of said semiconductor connection paths having been disconnected and selected portions of said metallization connection paths having been interconnected to selected semiconductor material of said logic elements to define the transfer function of said selected ones of said logic elements to cause said logic circuit device to perform a specified logic operation.
Claim 37
Dependent Claim
128 words
A logic circuit device comprising: a semiconductor substrate which contains a plurality of logic elements from which the logic circuit device is formed, each logic element containing a plurality of semiconductor elements together with intraelement semiconductor and metallization connection paths, and interconnection pathways by way of which said logic elements are connected together, and prescribed portions of selected ones of said logic elements having been altered by the impingement of electromagnetic energy thereon with selected portions of said semiconductor connection paths having been disconnected and selected portions of said metallization connection paths having been interconnected to selected semiconductor material of said logic elements to define the transfer function of said selected ones of said logic elements to cause said logic circuit device to perform a specified logic operation.
Claim 38
Dependent Claim
15 words
A logic circuit device according to claim 33, wherein said electromagnetic energy comprises optical energy.
Claim 39
Dependent Claim
16 words
A logic circuit device according to claim 34, wherein said optical energy is pulsed laser energy.
Claim 40
Dependent Claim
47 words
A logic circuit device according to claim 33, wherein each of said selected logic elements comprises: an input signal pathway, an output signal pathway, and an active circuit element having an input coupled to said input signal pathway and an output coupled to said output signal pathway.
Claim 41
Dependent Claim
30 words
A logic circuit device according to claim 33, wherein said semiconductor elements and said intracell semiconductor connection paths are formed of layers of semiconductor material disposed upon said semiconductor substrate.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1983-12-16 | 1984-06-16 | 1984-12-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1987-12-16 | 1988-06-16 | 1988-12-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1991-12-16 | 1992-06-16 | 1992-12-16 | $7700.00 | Window Closed / Lapsed |