US4237601A
Expired / Lapsed
US
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Method of cleaving semiconductor diode laser wafers
Assignee: McDonnell Douglas Corp
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Filing: 1978-10-13
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Granted: 1980-12-09
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Expires: 1998-10-13
Abstract
Abstract Thick double heterostructure (Al,Ga)As wafers comprising layers of gallium arsenide and gallium aluminum arsenide on a metallized n-GaAs substrate are separated into individual devices for use as diode lasers. In contrast to prior art techniques employed with thinner wafers of mechanically cleaving the wafer in mutually orthogonal directions, the wafer is first separated into bars of diodes by a process which comprises (a) forming channels of substantially parallel sidewalls about 1 to 4 mils deep into the surface of the n-GaAs substrate (b) etching into the n-GaAs substrate with an anisotropic etchant to a depth sufficient to form V-grooves in the bottom of the channels and (c) mechanically cleaving into bars of diodes. The cleaving may be done by prior art techniques using a knife, razor blade or tweezer edge or by attaching the side of the wafer opposite to the V-grooves to a flexible adhesive tape and rolling the assembly in a manner such as over a tool of small radius. The diode bars may then, following passivation, be further cleaved into individual diodes by the prior art technique of mechanically scribing and cleaving. Processing in accordance with the invention results in good length definition and uniformity, high device yields and low density of striations on laser facets. The inventive process permits handling of thicker wafers on the order of 6 to 10 mils or so, which are cleaved only with great difficulty by prior art techniques. Such thicker wafers are less susceptible to breaking during handling and permit fabrication of shorter diode (cavity) length, which in turn is related to lower threshold current for device operation.
Inventors
- 👤 Geoffrey R. Woolhouse
- 👤 Harold A. Huggins
- 👤 David W. Collins
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 22:44
CPC Classifications
H; H10; H10P; H10P50/00; H10P50/60; H10P50/64; H10P50/642; H10P50/646; H10P50/648; H01; H01S; H01S5/00; H01S5/02; H01S5/0201; H10H; H10H20/00; H10H20/80; H10H20/81; H10H20/811; H10H20/822; H10H20/824; H10P54/00; H10P95/00; H01S5/0202
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
171 words
A method of cleaving a semiconductor wafer into individual devices, said wafer comprising a substrate, at least a portion of one surface of which is metallized, and a plurality of semiconductor layers deposited on at least a portion of the opposite surface, at least one of which layers, when appropriately biased, generates coherent electromagnetic radiation, which method includes: (a) forming channels of substantially parallel sidewalls about 1 to 4 mils deep in the substrate, said substrate being at least about 6 mils thick; (b) etching into the substrate with an anisotropic etchant to a depth sufficient to form V-grooves in the bottom of the channels said V-grooves terminating at a point before reaching the said one layer; (c) mechanically cleaving the wafer including the said one layer along the etched grooves to form bars of diodes, thereby generating substantially damage-free lasing facets along the plane of cleaving the bars of diodes being of substantially equal width; passivating said lasing facets; and further mechanically cleaving said bars of diodes into individual devices.
Claim 2
Independent Claim
171 words
A method of cleaving a semiconductor wafer into individual devices, said wafer comprising a substrate, at least a portion of one surface of which is metallized, and a plurality of semiconductor layers deposited on at least a portion of the opposite surface, at least one of which layers, when appropriately biased, generates coherent electromagnetic radiation, which method includes: (a) forming channels of substantially parallel sidewalls about 1 to 4 mils deep in the substrate, said substrate being at least about 6 mils thick; (b) etching into the substrate with an anisotropic etchant to a depth sufficient to form V-grooves in the bottom of the channels said V-grooves terminating at a point before reaching the said one layer; (c) mechanically cleaving the wafer including the said one layer along the etched grooves to form bars of diodes, thereby generating substantially damage-free lasing facets along the plane of cleaving the bars of diodes being of substantially equal width; passivating said lasing facets; and further mechanically cleaving said bars of diodes into individual devices.
Claim 3
Dependent Claim
16 words
The method of claim 2 in which the wafer is about 6 to 10 mils thick.
Claim 4
Dependent Claim
27 words
The method of claim 1 in which the V-grooves are etched to a depth of about 1 to 3 mils deeper than the bottom of the channels.
Claim 5
Dependent Claim
25 words
The method of claim 1 in which the semiconductor wafer comprises a substrate of gallium arsenide and layers of gallium arsenide and gallium aluminum arsenide.
Claim 6
Dependent Claim
27 words
The method of claim 4 in which the anisotropic etchant comprises a solution of H 2 SO 4 , H 2 O 2 and H 2 O.
Claim 7
Dependent Claim
23 words
The method of claim 5 in which the etchant comprises 1H 2 SO 4 -8H 2 O 2 -1H 2 O by volume.
Claim 8
Dependent Claim
27 words
The method of claim 1 in which the V-grooves have sidewalls at an angle of at least about 45° with respect to the plane of the wafer.
Claim 9
Independent Claim
146 words
A method of cleaving a wafer into bars of diodes, said wafer comprising a substrate, at least a portion of which is metallized, and a plurality of semiconductor layers deposited on at least a portion of the opposite surface, at least one of which layers, when appropriately biased, generates coherent electromagnetic radiation, which method comprises: (a) forming channels of substantially parallel side walls about 1 to 4 mils deep in the substrate; (b) etching into the substrate with an anisotropic etchant to a depth sufficient to form V-grooves in the bottom of the channels said V-grooves terminating at a point before reacing the said one layer; and (c) mechanically cleaving the wafer including the said one layer along the etched grooves to form bars of diodes, thereby generating substantially damage-free lsing facets along the plane of cleaving the bars of diodes being of substantially equal width.
Claim 10
Independent Claim
146 words
A method of cleaving a wafer into bars of diodes, said wafer comprising a substrate, at least a portion of which is metallized, and a plurality of semiconductor layers deposited on at least a portion of the opposite surface, at least one of which layers, when appropriately biased, generates coherent electromagnetic radiation, which method comprises: (a) forming channels of substantially parallel side walls about 1 to 4 mils deep in the substrate; (b) etching into the substrate with an anisotropic etchant to a depth sufficient to form V-grooves in the bottom of the channels said V-grooves terminating at a point before reacing the said one layer; and (c) mechanically cleaving the wafer including the said one layer along the etched grooves to form bars of diodes, thereby generating substantially damage-free lsing facets along the plane of cleaving the bars of diodes being of substantially equal width.
Claim 11
Dependent Claim
16 words
The method of claim 8 in which the wafer is at least about 6 mils thick.
Claim 12
Dependent Claim
16 words
The method of claim 9 in which the wafer is about 6 to 10 mils thick.
Claim 13
Dependent Claim
27 words
The method of claim 10 in which the V-grooves are etched to a depth of about 1 to 3 mils deeper than the bottom of the channels.
Claim 14
Dependent Claim
25 words
The method of claim 8 in which the semiconductor wafer comprises a substrate of gallium arsenide and layers of gallium arsenide and aluminum gallium arsenide.
Claim 15
Dependent Claim
27 words
The method of claim 12 in which the anisotropic etchant comprises a solution of H 2 SO 4 , H 2 O 2 and H 2 O.
Claim 16
Dependent Claim
23 words
The method of claim 13 in which the etchant comprises 1H 2 SO 4 -8H 2 O 2 -1H 2 O by volume.
Claim 17
Dependent Claim
27 words
The method of claim 8 in which the V-grooves have sidewalls at an angle of at least about 45° with respect to the plane of the wafer.
Claim 18
Dependent Claim
27 words
The method set forth in claim 1 wherein said further mechanical cleaving of the bars of diodes into individual devices is substantially perpendicular to said lasing facets.
Claim 19
Independent Claim
29 words
The method set forth in claims 8 or 15 wherein said V-grooves are etched into the (001) surface of, and in the <001> direction, off the gallium arsenide substrate.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1983-12-09 | 1984-06-09 | 1984-12-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1987-12-09 | 1988-06-09 | 1988-12-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1991-12-09 | 1992-06-09 | 1992-12-09 | $7700.00 | Window Closed / Lapsed |