Scanning electron microscope

Claim 2

A scanning electron microscope comprising means for generating an electron beam; means for scanning a specimen with the electron beam so as to obtain an information signal characteristic of the specimen from said specimen; means for displaying an image of the specimen on the basis of the information signal; means for setting a magnification of the image; means for indicating first and second marks of variable positions on the display means in a manner to be superposed on the image; and means for calculating a distance between first and second points on the specimen corresponding respectively to the first and second marks on the basis of the magnification and positions of said first and second marks, the calculation means including means for multiplying the calculated value of the distance between the first and second points by a predetermined constant so as to compensate for a possible error in the magnification setting.

Claim 3

A scanning electron microscope comprising means for generating an electron beam; means for scanning a specimen with the electron beam so as to obtain an information signal characteristic of the specimen from said specimen; means for displaying an image of the specimen on the basis of the information signal; means for setting a magnification of the image; means for setting an inclination angle of the specimen with respect to the electron beam; means for indicating first and second marks of variable positions on the display means in a manner to be superposed on the image; and means for calculating a distance between first and second points on the specimen corresponding respectively to the first and second marks on the basis of the magnification, the inclination angle and positions of said first and second marks, the calculation means including means for multiplying the calculated value of the distance between the first and second points by a predetermined constant so as to compensate for a possible error in the magnification setting.

Claim 4

A scanning electron microscope comprising means for generating an electron beam; means for scanning a specimen with the electron beam so as to obtain an information signal characteristic of the specimen from said specimen; means for displaying an image of the specimen on the basis of the information signal; means for setting a magnification of the image; means for setting an inclination angle of the specimen with respect to the electron beam; means for indicating first and second marks of variable positions on the display means in a manner to be superposed on the image; and means for calculating a distance between first and second points on the specimen corresponding respectively to the first and second marks on the basis of the magnification, the inclination angle and positions of said first and second marks, the calculation means including means for multiplying the calculated value of the distance between the first and second points by a predetermined constant so as to compensate for a possible error in the magnification setting.

Claim 5

A scanning electron microscope comprising means for generating an electron beam; means for selectively scanning a reference specimen and an unknown specimen with the electron beam so as to selectively obtain an information signal characteristic of the reference specimen and an information signal characteristic of the unknown specimen; means for selectively displaying an image of the reference specimen and an image of the unknown specimen on the basis of the information signal of said reference specimen and the information signal of said unknown specimen respectively; means for setting a magnification of the image of the reference specimen and the image of the unknown specimen; means for indicating first and second marks of variable positions on the display means in a manner to be selectively superposed on the image of the reference specimen and the image of the unknown specimen; and means for selectively calculating a distance between first and second positions on the reference specimen corresponding respectively to the first and second marks and a distance between first and second positions on the unknown specimen corresponding respectively thereto on the basis of the magnification and positions of said first and second marks, the calculation means including means for multiplying the calculated value of the distance between the first and second points on the unknown specimen by a predetermined constant, the constant being proportional to a ratio between the distance between the first and second points on the reference specimen as is known and said distance between the first and second points on the reference specimen as calculated by said calculation means.

Claim 6

A scanning electron microscope comprising means for generating an electron beam; means for selectively scanning a reference specimen and an unknown specimen with the electron beam so as to selectively obtain an information signal characteristic of the reference specimen and an information signal characteristic of the unknown specimen; means for selectively displaying an image of the reference specimen and an image of the unknown specimen on the basis of the information signal of said reference specimen and the information signal of said unknown specimen respectively; means for setting a magnification of the image of the reference specimen and the image of the unknown specimen; means for indicating first and second marks of variable positions on the display means in a manner to be selectively superposed on the image of the reference specimen and the image of the unknown specimen; and means for selectively calculating a distance between first and second positions on the reference specimen corresponding respectively to the first and second marks and a distance between first and second positions on the unknown specimen corresponding respectively thereto on the basis of the magnification and positions of said first and second marks, the calculation means including means for multiplying the calculated value of the distance between the first and second points on the unknown specimen by a predetermined constant, the constant being proportional to a ratio between the distance between the first and second points on the reference specimen as is known and said distance between the first and second points on the reference specimen as calculated by said calculation means.

Claim 7

A scanning electron microscope comprising means for generating an electron beam; means for selectively scanning a reference specimen and an unknown specimen with the electron beam so as to selectively obtain an information signal characteristic of the reference specimen and an information signal characteristic of the unknown specimen; means for selectively displaying an image of the reference specimen and an image of the unknown specimen on the basis of the information signal of said reference specimen and the information signal of said unknown specimen respectively; means for setting a magnification of the image of the reference specimen and the image of the unknown specimen; means for setting an inclination angle of the reference specimen and the unknown specimen with respect to the electron beam; means for indicating first and second marks of variable positions on the display means in a manner to be selectively superposed on the image of the reference specimen and the image of the unknown specimen; and means for calculating a distance between first and second points on the reference specimen corresponding respectively to the first and second marks and a distance between first and second points on the unknown speciment corresponding respectively thereto on the basis of the magnification, the inclination angle and positions of said first and second marks, the calculation means including means for multiplying the calculated value of the distance between the first and second points on the unknown specimen by a predetermined constant, the constant being proportional to a ratio between the distance between the first and second points on the reference specimen as is known and said distance between the first and second points on the reference specimen as calculated by said calculation means.

Claim 8

A scanning electron microscope comprising means for generating an electron beam; means for selectively scanning a reference specimen and an unknown specimen with the electron beam so as to selectively obtain an information signal characteristic of the reference specimen and an information signal characteristic of the unknown specimen; means for selectively displaying an image of the reference specimen and an image of the unknown specimen on the basis of the information signal of said reference specimen and the information signal of said unknown specimen respectively; means for setting a magnification of the image of the reference specimen and the image of the unknown specimen; means for setting an inclination angle of the reference specimen and the unknown specimen with respect to the electron beam; means for indicating first and second marks of variable positions on the display means in a manner to be selectively superposed on the image of the reference specimen and the image of the unknown specimen; and means for calculating a distance between first and second points on the reference specimen corresponding respectively to the first and second marks and a distance between first and second points on the unknown speciment corresponding respectively thereto on the basis of the magnification, the inclination angle and positions of said first and second marks, the calculation means including means for multiplying the calculated value of the distance between the first and second points on the unknown specimen by a predetermined constant, the constant being proportional to a ratio between the distance between the first and second points on the reference specimen as is known and said distance between the first and second points on the reference specimen as calculated by said calculation means.

Claim 9

A scanning electron microscope comprising means for generating an electron beam; means for selectively scanning a reference specimen and an unknown specimen with the electron beam so as to selectively obtain an information signal characteristic of the reference specimen and an information signal characteristic of the unknown specimen; means for selectively displaying an image of the reference specimen and an image of the unknown specimen on the basis of the information signal of said reference specimen and the information signal of said unknown specimen respectively; means for setting a variable magnification of the images of the reference specimen and the unknown specimen, the magnification being set at a first value when the image of the reference specimen is displayed and being set at a second value when the image of the unknown specimen is displayed; means for indicating first and second marks of variable positions on the display means in a manner to be selectively superposed on the image of the reference specimen and the image of the unknown specimen; and means for selectively calculating a distance between first and second points on the reference specimen corresponding respectively to the first and second marks as based on the magnification of the first value and positions of said first and second marks and a distance between first and second points on the unknown specimen corresponding respectively to the first and second marks as based on the magnification of the second value and the positions of the first and second marks, the calculation means including means for multiplying the calculated value of the distance between the first and second points on the unknown specimen by a predetermined constant, the constant being proportional to a ratio between the distance between the first and second points on the reference specimen as is known and said distance between the first and second points on the reference specimen as calculated by said calculation means.

Claim 10

A scanning electron microscope comprising means for generating an electron beam; means for selectively scanning a reference specimen and an unknown specimen with the electron beam so as to selectively obtain an information signal characteristic of the reference specimen and an information signal characteristic of the unknown specimen; means for selectively displaying an image of the reference specimen and an image of the unknown specimen on the basis of the information signal of said reference specimen and the information signal of said unknown specimen respectively; means for setting a variable magnification of the images of the reference specimen and the unknown specimen, the magnification being set at a first value when the image of the reference specimen is displayed and being set at a second value when the image of the unknown specimen is displayed; means for indicating first and second marks of variable positions on the display means in a manner to be selectively superposed on the image of the reference specimen and the image of the unknown specimen; and means for selectively calculating a distance between first and second points on the reference specimen corresponding respectively to the first and second marks as based on the magnification of the first value and positions of said first and second marks and a distance between first and second points on the unknown specimen corresponding respectively to the first and second marks as based on the magnification of the second value and the positions of the first and second marks, the calculation means including means for multiplying the calculated value of the distance between the first and second points on the unknown specimen by a predetermined constant, the constant being proportional to a ratio between the distance between the first and second points on the reference specimen as is known and said distance between the first and second points on the reference specimen as calculated by said calculation means.

Claim 11

A scanning electron microscope according to claim 5, comprising means for regulating the magnification of the second value.

Claim 12

A scanning electron microscope comprising means for generating an electron beam; means for selectively scanning a reference specimen and an unknown specimen with the electron beam so as to selectively obtain an information signal characteristic of the reference specimen and an information signal characteristic of the unknown specimen; means for selectively displaying an image of the reference specimen and an image of the unknown specimen on the basis of the information signal of said reference specimen and the information signal of said unknown specimen respectively; means for setting a variable magnification of the images of the reference specimen and the unknown specimen, the magnification being set at a first value when the image of the reference specimen is displayed and being set at a second value when the image of the unknown specimen is displayed; means for setting an inclination angle of the reference specimen and the unknown specimen with respect to the electron beam; means for indicating first and second marks of variable positions on the display means in a manner to be selectively superposed on the image of the reference specimen and the image of the unknown specimen; and means for selectively calculating a distance between first and second points on the reference specimen corresponding respectively to the first and second marks as based on the magnification of the first value, the inclination angle and positions of said first and second marks and a distance between first and second points on the unknown specimen corresponding respectively to the first and second marks as based on the magnification of the second value, the inclination angle and the positions of said first and second marks, the calculation means including means for multiplying the calculated view of the distance between the first and second points on the unknown specimen by a predetermined constant, the constant being proportional to a ratio between the distance between the first and second points on the reference specimen as is known and said distance between the first and second points on the reference specimen as calculated by said calculation means.

Claim 13

A scanning electron microscope comprising means for generating an electron beam; means for selectively scanning a reference specimen and an unknown specimen with the electron beam so as to selectively obtain an information signal characteristic of the reference specimen and an information signal characteristic of the unknown specimen; means for selectively displaying an image of the reference specimen and an image of the unknown specimen on the basis of the information signal of said reference specimen and the information signal of said unknown specimen respectively; means for setting a variable magnification of the images of the reference specimen and the unknown specimen, the magnification being set at a first value when the image of the reference specimen is displayed and being set at a second value when the image of the unknown specimen is displayed; means for setting an inclination angle of the reference specimen and the unknown specimen with respect to the electron beam; means for indicating first and second marks of variable positions on the display means in a manner to be selectively superposed on the image of the reference specimen and the image of the unknown specimen; and means for selectively calculating a distance between first and second points on the reference specimen corresponding respectively to the first and second marks as based on the magnification of the first value, the inclination angle and positions of said first and second marks and a distance between first and second points on the unknown specimen corresponding respectively to the first and second marks as based on the magnification of the second value, the inclination angle and the positions of said first and second marks, the calculation means including means for multiplying the calculated view of the distance between the first and second points on the unknown specimen by a predetermined constant, the constant being proportional to a ratio between the distance between the first and second points on the reference specimen as is known and said distance between the first and second points on the reference specimen as calculated by said calculation means.

Claim 14

A scanning electron microscope according to claim 7, comprising means for regulating the magnification of the second value.

Claim 15

A scanning electron microscope comprising means for generating an electron beam; means for selectively scanning a reference specimen and an unknown specimen with the electron beam so as to selectively obtain an information signal characteristic of the reference specimen and an information signal characteristic of the unknown specimen; means for selectively displaying an image of the reference specimen and an image of the unknown specimen on the basis of the information signal of said reference specimen and the information signal of said unknown specimen respectively; means for setting a variable magnification of the images of the reference specimen and the unknown specimen, the magnification being set at a first value when the image of the reference specimen is displayed and being set at a second value when the image of the unknown specimen is displayed; means for setting an inclination angle of the reference specimen and the unknown specimen with respect to the electron beam; means for indicating first and second marks of variable positions on the display means in a manner to be selectively superposed on the image of the reference specimen and the image of the unknown specimen; means for selectively calculating a distance between first and second points on the reference specimen corresponding respectively to the first and second marks as based on the magnification of the first value, the inclination angle and positions of said first and second marks and a distance between first and second points on the unknown specimen corresponding respectively to the first and second marks as based on the magnification of the second value, the inclination angle and the positions of said first and second marks; and means for regulating the magnification of the second value; the calculation means including means for setting a constant representative of a ratio between a distance between first and second points on the reference specimen as is known and said distance between the first and second points on the reference specimen as calculated by said calculation means, and means for calculating a product between the constant and a value of a distance between first and second points on the unknown specimen corresponding respectively to the first and second marks as calculated by said calculation means.

Claim 16

A scanning electron microscope comprising means for generating an electron beam; means for selectively scanning a reference specimen and an unknown specimen with the electron beam so as to selectively obtain an information signal characteristic of the reference specimen and an information signal characteristic of the unknown specimen; means for selectively displaying an image of the reference specimen and an image of the unknown specimen on the basis of the information signal of said reference specimen and the information signal of said unknown specimen respectively; means for setting a variable magnification of the images of the reference specimen and the unknown specimen, the magnification being set at a first value when the image of the reference specimen is displayed and being set at a second value when the image of the unknown specimen is displayed; means for setting an inclination angle of the reference specimen and the unknown specimen with respect to the electron beam; means for indicating first and second marks of variable positions on the display means in a manner to be selectively superposed on the image of the reference specimen and the image of the unknown specimen; means for selectively calculating a distance between first and second points on the reference specimen corresponding respectively to the first and second marks as based on the magnification of the first value, the inclination angle and positions of said first and second marks and a distance between first and second points on the unknown specimen corresponding respectively to the first and second marks as based on the magnification of the second value, the inclination angle and the positions of said first and second marks; and means for regulating the magnification of the second value; the calculation means including means for setting a constant representative of a ratio between a distance between first and second points on the reference specimen as is known and said distance between the first and second points on the reference specimen as calculated by said calculation means, and means for calculating a product between the constant and a value of a distance between first and second points on the unknown specimen corresponding respectively to the first and second marks as calculated by said calculation means.

Claim 17

A scanning electron microscope comprising means for generating an electron beam; means for selectively scanning a reference specimen and an unknown specimen with the electron beam so as to selectively obtain an information signal characteristic of the reference specimen and an information signal characteristic of the unknown specimen; means for selectively displaying an image of the reference specimen and an image of the unknown specimen on the basis of the information signal of said reference specimen and the information signal of said unknown specimen respectively; means for setting a variable magnification of the images of the reference specimen and the unknown specimen, the magnification being set at a first value when the image of the reference specimen is displayed and being set at a second value when the image of the unknown specimen is displayed; means for setting an inclination angle of the reference specimen and the unknown specimen with respect to the electron beam; means for indicating first and second marks of variable positions on the display means in a manner to be selectively superposed on the image of the reference specimen and the image of the unknown specimen; means for selectively calculating a distance between first and second points on the reference specimen corresponding respectively to the first and second marks as based on the magnification of the first value, the inclination angle and positions of said first and second marks and a distance between first and second points on the unknown specimen corresponding respectively to the first and second marks as based on the magnification of the second value, the inclination angle and the positions of said first and second marks; and means for regulating the magnification of the second value; the calculation means including means for setting a distance between first and second points on the reference specimen as is known, means for computing a ratio between said distance and the distance between the first and second points on the reference specimen as calculated by said calculation means, and means for evaluating a product between the value of the ratio and a distance between first and second points on the unknown specimen as calculated by said calculation means.

Claim 18

A scanning electron microscope comprising means for generating an electron beam; means for selectively scanning a reference specimen and an unknown specimen with the electron beam so as to selectively obtain an information signal characteristic of the reference specimen and an information signal characteristic of the unknown specimen; means for selectively displaying an image of the reference specimen and an image of the unknown specimen on the basis of the information signal of said reference specimen and the information signal of said unknown specimen respectively; means for setting a variable magnification of the images of the reference specimen and the unknown specimen, the magnification being set at a first value when the image of the reference specimen is displayed and being set at a second value when the image of the unknown specimen is displayed; means for setting an inclination angle of the reference specimen and the unknown specimen with respect to the electron beam; means for indicating first and second marks of variable positions on the display means in a manner to be selectively superposed on the image of the reference specimen and the image of the unknown specimen; means for selectively calculating a distance between first and second points on the reference specimen corresponding respectively to the first and second marks as based on the magnification of the first value, the inclination angle and positions of said first and second marks and a distance between first and second points on the unknown specimen corresponding respectively to the first and second marks as based on the magnification of the second value, the inclination angle and the positions of said first and second marks; and means for regulating the magnification of the second value; the calculation means including means for setting a distance between first and second points on the reference specimen as is known, means for computing a ratio between said distance and the distance between the first and second points on the reference specimen as calculated by said calculation means, and means for evaluating a product between the value of the ratio and a distance between first and second points on the unknown specimen as calculated by said calculation means.