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US4039829A Expired / Lapsed US ⏱️ 0.0 years remaining

Stereoscopic measuring apparatus

Assignee: Hitachi Ltd
•
Filing: 1976-05-14
•
Granted: 1977-08-02
•
Expires: 1996-05-14
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Abstract

Abstract Apparatus capable of tridimensionally measuring the distance between two arbitrary points on the surface of a sample is disclosed. In apparatus wherein the surface of the sample to be observed is scanned with an energized beam, wherein a secondary radiation emitted from the sample is detected and wherein a sample image is displayed by making the detected signal a video signal, two sample images obtained by changing-over the incident angle of the beam on the sample surface are displayed, whereby the stereoscopic viewing of the sample surface is enabled. In this invention, there is added means for superposing and displaying marks at two positions of both the sample images as correspond to two arbitrary points on the sample surface and for automatically calculating the tridimensional distance between the two points on the sample surface on the basis of positioning signals of the marks.

Inventors

  • 👤 Yasuo Kato
  • 👤 Masahide Okumura
  • 👤 Hideo Todokoro

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-26 22:18
CPC Classifications
G; G01; G01B; G01B15/00; H; H01; H01J; H01J37/00; H01J37/26; H01J37/28; H04; H04N; H04N13/00; H04N13/30; H04N13/332; H04N13/341

Claims Analysis

Total Claims: 6
Claim 1
Independent Claim 141 words
Stereoscopic measuring apparatus, comprising: means to irradiate a surface of a sample with an energized beam converged to be fine, means to cause said beam to scan the sample surface, means to detect secondary information of said sample as obtained by the irradiation with said beam, means to display an image of said sample by making an output signal of the detection means a video signal, means to change-over an incident angle of said beam on said sample surface, means to superpose and display marks at two positions on each of the two sample images obtained by the change-over of said incident angle of said beam, said two positions corresponding to two arbitrary points on said sample surface, and means to calculate a distance between said two points on said sample surface on the basis of positioning signals of said marks.
Claim 2
Dependent Claim 141 words
Stereoscopic measuring apparatus, comprising: means to irradiate a surface of a sample with an energized beam converged to be fine, means to cause said beam to scan the sample surface, means to detect secondary information of said sample as obtained by the irradiation with said beam, means to display an image of said sample by making an output signal of the detection means a video signal, means to change-over an incident angle of said beam on said sample surface, means to superpose and display marks at two positions on each of the two sample images obtained by the change-over of said incident angle of said beam, said two positions corresponding to two arbitrary points on said sample surface, and means to calculate a distance between said two points on said sample surface on the basis of positioning signals of said marks.
Claim 3
Dependent Claim 40 words
The apparatus according to claim 1, wherein the sample image display means is composed of two display devices which individually display said two sample images obtained by the change-over of said incident angle of said beam on said sample surface.
Claim 4
Dependent Claim 26 words
The apparatus according to claim 1, wherein the sample image display means is composed of a single display device which alternately displays said two sample images.
Claim 5
Dependent Claim 53 words
The apparatus according to claim 1, wherein the mark display means comprises means to compare a scanning deflection voltage of the sample image display means and a reference voltage and to generate a mark displaying pulse signal when both said voltages coincide, and means to combine said pulse signal with said video signal.
Claim 6
Dependent Claim 28 words
The apparatus according to claim 4, wherein the distance calculating means calculates said distance between said two points on said sample on the basis of said reference voltage.

References Cited (Backward Citations)

US2786096A Cited
US3585382A Cited
US3986027A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1980-08-01 1981-01-31 1981-08-02 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1984-08-01 1985-01-31 1985-08-02 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1988-08-01 1989-01-31 1989-08-02 $7700.00 Window Closed / Lapsed

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