Patent US4233135A successfully refreshed from Google Patents.
US4233135A
Expired / Lapsed
US
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Method of fabricating piezoelectric thin film
Assignee: Toko Inc
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Filing: 1979-02-15
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Granted: 1980-11-11
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Expires: 1999-02-15
Abstract
Abstract In a method of fabricating a piezoelectric thin film of zinc oxide by means of a sputtering process, zinc and alkaline earth metal are sputtered together in an oxygen atmosphere to thereby produce zinc oxide containing the alkaline earth metal.
Inventors
- 👤 Mitsuo Sakakura
- 👤 Tetsuo Takaku
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 09:46
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/06; C23C14/08; C23C14/086; H; H03; H03H; H03H3/00; H03H3/007; H03H3/08; H10; H10N; H10N30/00; H10N30/01; H10N30/07; H10N30/074; H10N30/076
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
45 words
A method of fabricating a piezoelectric thin film of zinc oxide by means of a sputtering process, characterized by sputtering zinc and beryllium together in an oxygen atmosphere to thereby produce a thin film of zinc oxide containing 1 to 10 atom % of beryllium.
Claim 2
Independent Claim
45 words
A method of fabricating a piezoelectric thin film of zinc oxide by means of a sputtering process, characterized by sputtering zinc and beryllium together in an oxygen atmosphere to thereby produce a thin film of zinc oxide containing 1 to 10 atom % of beryllium.
Claim 3
Dependent Claim
51 words
A method according to claim 1, characterized by using a cathode provided with separate targets which are formed by zinc and beryllium respectively, and causing the zinc and beryllium targets to be sputtered together to thereby produce a thin film of zinc oxide containing 1 to 10 atom % of beryllium.
Claim 4
Dependent Claim
45 words
A method according to claim 1, characterized by using a cathode provided with a target formed of zinc mingled with beryllium, and causing said target to be sputtered to thereby produce a thin film of zinc oxide containing 1 to 10 atom % of beryllium.
Claim 5
Dependent Claim
49 words
A method according to claim 1, characterized by using a cathode provided with a target formed of zinc mingled with 1 to 10 atom % of beryllium, and causing said target to be sputtered to thereby produce a zinc oxide thin film containing 1 to 10 atom % beryllium.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1983-11-11 | 1984-05-12 | 1984-11-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1987-11-11 | 1988-05-12 | 1988-11-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1991-11-11 | 1992-05-12 | 1992-11-11 | $7700.00 | Window Closed / Lapsed |