US3566185A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Sputter-type penning discharge for metallic ions
Assignee: United States Atomic Energy Commission
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Filing: 1969-03-12
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Granted: 1971-02-23
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Expires: 1989-03-12
Abstract
Abstract An ion source in which ions of normally solid materials are easily produced. A plasma is generated in a gas adjacent the solid material from which ions are to be produced. The solid is negatively charged and the gas plasma ions bombard the solid, sputtering off ions of the solid. This is accomplished through the use of a Penning discharge with a cold cathode-type source and a centrally positioned and negatively charged dynode upon which the solid material is mounted, the dynode being electrically connected to the cathode and provided with an exit slit through which the metallic ions are extracted from plasma potential.
Inventors
- 👤 Basil F Gavin
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 20:06
CPC Classifications
H; H01; H01J; H01J27/00; H01J27/02; H01J27/04; H01J27/06; Y; Y10; Y10S; Y10S422/00; Y10S422/906
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
32 words
The apparatus defined in claim 1, additionally including switch means intermediate said dynode means and said cathode means for selectively electrically isolating or connecting said dynode means with respect to cathode means.
Claim 2
Dependent Claim
56 words
The apparatus defined in claim 1, additionally including a hollow insulating member positioned between said dynode means and each of said anode means, and a hollow insulator member positioned between said anode means and said cathode means, the hollow interior of said insulating members and said insulator members forming a portion of said support gas chamber.
Claim 3
Dependent Claim
18 words
The apparatus defined in claim 1, wherein said support gas maintaining means is located adjacent said anode means.
Claim 4
Dependent Claim
14 words
The apparatus defined in claim 1, wherein said support gas is an inert gas.
Claim 5
Dependent Claim
14 words
The apparatus defined in claim 1, wherein said dynode means is constructed of aluminum.
Claim 6
Dependent Claim
15 words
The apparatus defined in claim 1, wherein said anode means are constructed of stainless steel.
Claim 7
Dependent Claim
30 words
The apparatus defined in claim 1, wherein said cathode means are constructed of copper with a titanium insert therein, said insert being exposed in spaced relationship with said anode means.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-02-22 | 1974-08-24 | 1975-02-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-02-22 | 1978-08-24 | 1979-02-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-02-22 | 1982-08-24 | 1983-02-23 | $7700.00 | Window Closed / Lapsed |