US4198159A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Optical alignment system in projection printing
Assignee: International Business Machines Corp
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Filing: 1978-12-29
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Granted: 1980-04-15
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Expires: 1998-12-29
Abstract
Abstract Apparatus for placing a resist coated semiconductor wafer surface in the image plane of an optical system by means of three drivers (e.g. actuated flexure joints), with non-contact sensing (e.g. air gauges) at each driver providing individual feedback thereto to move the wafer into the image plane.
Inventors
- 👤 Rene P. Cachon
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 03:55
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70691; G03F7/70716; B; B23; B23Q; B23Q1/00; B23Q1/25; B23Q1/26; B23Q1/34; B23Q1/36; Y; Y10; Y10S; Y10S101/00; Y10S101/36
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
198 words
A focusing apparatus adapted for positioning a planar object in a focal plane of an optical system, comprising: A. means for mounting said object and for positioning a planar surface thereof in parallel conincidence in said focal plane of said system; B. at least three sensing means equiangularly disposed about the periphery of said focal plane for sensing the displacement of said surface from said focal plane; C. at least three reversible drive means for said mounting means and equiangularly disposed below corresponding ones of said sensing means; and D. means responsive to said sensing means for independently activating corresponding ones of said drive means for positioning said surface into coincidence with said focal plane; wherein E. said drive means comprises (a) a carrier for said mounting means; (b) an elastic metal block having a kerf extending therethrough with a thinned bight thereof defining a cantilevered resilient lever arm opposite a base portion of said block, with said base portion mounted to said carrier and said arm mounted at its distal end to said mounting means; and (c) a reversibly extensible means (i) between said distal portion and said base portion and (ii) responsive to said actuating means.
Claim 2
Dependent Claim
198 words
A focusing apparatus adapted for positioning a planar object in a focal plane of an optical system, comprising: A. means for mounting said object and for positioning a planar surface thereof in parallel conincidence in said focal plane of said system; B. at least three sensing means equiangularly disposed about the periphery of said focal plane for sensing the displacement of said surface from said focal plane; C. at least three reversible drive means for said mounting means and equiangularly disposed below corresponding ones of said sensing means; and D. means responsive to said sensing means for independently activating corresponding ones of said drive means for positioning said surface into coincidence with said focal plane; wherein E. said drive means comprises (a) a carrier for said mounting means; (b) an elastic metal block having a kerf extending therethrough with a thinned bight thereof defining a cantilevered resilient lever arm opposite a base portion of said block, with said base portion mounted to said carrier and said arm mounted at its distal end to said mounting means; and (c) a reversibly extensible means (i) between said distal portion and said base portion and (ii) responsive to said actuating means.
Claim 3
Dependent Claim
20 words
The apparatus of claim 1 wherein each said sensing means comprises an air probe adapted to coact with said surface.
Claim 4
Dependent Claim
12 words
The apparatus of claim 1 wherein said object comprises a semiconductor substrate.
Claim 5
Dependent Claim
14 words
The apparatus of claim 1 wherein said drive means comprises a pneumatically actuated bellows.
Claim 6
Dependent Claim
20 words
The apparatus of claim 4 wherein each said sensing means comprises an air probe adapted to coact with said surface.
Claim 7
Dependent Claim
29 words
The apparatus of claim 1 wherein said optical system is a projection printing system for semiconductor fabrication, and said focal plane comprises the image plane of said projection system.
Claim 8
Dependent Claim
20 words
The apparatus of claim 6 wherein each said sensing means comprises an air probe adapted to coact with said surface.
Claim 9
Dependent Claim
14 words
The apparatus of claim 6 wherein said drive means comprises a pneumatically actuated bellows.
Claim 10
Dependent Claim
20 words
The apparatus of claim 8 wherein each said sensing means comprises an air probe adapted to coact with said surface.
Claim 11
Independent Claim
32 words
The apparatus of claims 2, 5, 7 or 9 including means for pivotally moving each said air probe over and away from said surface in a plane parallel to said focal plane.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1983-04-15 | 1983-10-15 | 1984-04-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1987-04-15 | 1987-10-15 | 1988-04-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1991-04-15 | 1991-10-15 | 1992-04-15 | $7700.00 | Window Closed / Lapsed |